IWATA; Teruo

Patent Applications and Registrations

Patent applications and USPTO patent grants for IWATA; Teruo.The latest application filed is for "substrate processing method, storage medium, and substrate processing apparatus".

Company Profile

0.22.11

IWATA; Teruo - Nirasaki-Shi JP
Iwata; Teruo - Nirasaki JP
Iwata; Teruo - Yamanashi JP
Iwata; Teruo - Yamanashi-Ken JP
Iwata; Teruo - Tokyo JP
Iwata; Teruo - Asahi-machi JP
Iwata; Teruo - Hachiouji JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Substrate Processing Method, Storage Medium, And Substrate Processing Apparatus App 20120118231 - TAKAGI; Toshio ; et al.	2012-05-17
Plane heater Grant 8,143,557 - Shibata , et al. March 27, 2	2012-03-27
Film Forming Apparatus And Gas Injection Member App 20110283942 - IWATA; Teruo ; et al.	2011-11-24
Shower head and film-forming device using the same Grant 7,931,749 - Amikura , et al. April 26, 2	2011-04-26
Gasification monitor, method for detecting mist, film forming method and film forming apparatus Grant 7,887,873 - Iwata February 15, 2	2011-02-15
Plane Heater App 20100224620 - Shibata; Kazuo ; et al.	2010-09-09
Loading table and heat treating apparatus having the loading table Grant 7,718,930 - Kawasaki , et al. May 18, 2	2010-05-18
Method Of Substrate Treatment, Recording Medium And Substrate Treating Apparatus App 20090220692 - Takagi; Toshio ; et al.	2009-09-03
Shower Head and Film-Forming Device Using the Same App 20070272154 - Amikura; Manabu ; et al.	2007-11-29
Gasification monitor, method for detecting mist, film forming method and film forming apparatus App 20070212485 - Iwata; Teruo	2007-09-13
Gasification monitor, method for detecting mist, film forming method and film forming apparatus Grant 7,238,238 - Iwata July 3, 2	2007-07-03
Method for treating vapor deposition apparatus, method for depositing thin film, vapor deposition apparatus and computer program product for achieving thereof App 20060280868 - Kato; Yoshitake ; et al.	2006-12-14
Loading table and heat treating apparatus having the loading table App 20060199131 - Kawasaki; Hiroo ; et al.	2006-09-07
Film forming apparatus App 20050223987 - Iwata, Teruo ; et al.	2005-10-13
Gasification monitor, method for detecting mist, film forming method and film forming apparatus App 20050011448 - Iwata, Teruo	2005-01-20
Valve and vacuum processing device with the valve Grant 6,719,272 - Iwata April 13, 2	2004-04-13
Gas processing apparatus for object to be processed Grant 6,669,784 - Futamura , et al. December 30, 2	2003-12-30
Gas processing apparatus baffle member, and gas processing method Grant 6,436,193 - Kasai , et al. August 20, 2	2002-08-20
Gas processing apparatus for object to be processed App 20020096117 - Futamura, Munehisa ; et al.	2002-07-25
Gas processing apparatus for object to be processed Grant 6,372,048 - Futamura , et al. April 16, 2	2002-04-16
Film forming apparatus and method Grant 6,149,729 - Iwata , et al. November 21, 2	2000-11-21
Vacuum pump with gas heating Grant 5,879,139 - Hayashi , et al. March 9, 1	1999-03-09
Plasma processing method, plasma processing apparatus, and plasma generating apparatus Grant 5,783,492 - Higuchi , et al. July 21, 1	1998-07-21
Treatment apparatus Grant 5,753,891 - Iwata , et al. May 19, 1	1998-05-19
Fire detecting/extinguishing apparatus and water discharging nozzle therefor Grant 5,727,634 - Ishida , et al. March 17, 1	1998-03-17
Reduced pressure processing system and reduced pressure processing method Grant 5,455,082 - Saito , et al. October 3, 1	1995-10-03
Vacuum processing apparatus and exhaust system that prevents particle contamination Grant 5,433,780 - Ikeda , et al. July 18, 1	1995-07-18
Vacuum creating method and apparatus Grant 5,426,865 - Ikeda , et al. June 27, 1	1995-06-27
Firefighting double-nozzle deluge gun and control method thereof Grant 5,392,990 - Iwata , et al. February 28, 1	1995-02-28
Stage having electrostatic chuck and plasma processing apparatus using same Grant 5,382,311 - Ishikawa , et al. January 17, 1	1995-01-17
Reduced pressure processing system and reduced pressure processing method Grant 5,314,541 - Saito , et al. May 24, 1	1994-05-24
Surface-heating apparatus and surface-treating method Grant 5,240,556 - Ishikawa , et al. August 31, 1	1993-08-31
Sealing device Grant 5,133,561 - Hattori , et al. July 28, 1	1992-07-28

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