Patent | Date |
---|
Defect inspection system Grant 8,804,109 - Aiko , et al. August 12, 2 | 2014-08-12 |
Defect Inspection System App 20130182100 - AIKO; Kenji ;   et al. | 2013-07-18 |
Inspecting method, inspecting system, and method for manufacturing electronic devices Grant 8,428,336 - Ikeda , et al. April 23, 2 | 2013-04-23 |
Defect inspection system Grant 8,319,960 - Aiko , et al. November 27, 2 | 2012-11-27 |
Defect Inspection System App 20100271473 - AIKO; Kenji ;   et al. | 2010-10-28 |
Defect inspection system Grant 7,733,474 - Aiko , et al. June 8, 2 | 2010-06-08 |
Defect inspection system App 20080291436 - Aiko; Kenji ;   et al. | 2008-11-27 |
Method and apparatus for detecting defects Grant 7,426,023 - Ohshima , et al. September 16, 2 | 2008-09-16 |
Inspecting method, inspecting system, and method for manufacturing electronic devices App 20060274932 - Ikeda; Yoko ;   et al. | 2006-12-07 |
Method and apparatus for detecting defects App 20060139629 - Ohshima; Yoshimasa ;   et al. | 2006-06-29 |
Inspecting method, inspecting system, and method for manufacturing electronic devices Grant 7,068,834 - Ikeda , et al. June 27, 2 | 2006-06-27 |
Method and apparatus for detecting defects App 20050264797 - Nakano, Hiroyuki ;   et al. | 2005-12-01 |
Inspection condition setting program, inspection device and inspection system App 20050195396 - Ono, Makoto ;   et al. | 2005-09-08 |
Inspection condition setting program, inspection device and inspection system Grant 6,928,375 - Ono , et al. August 9, 2 | 2005-08-09 |
Inspection data analysis program, defect inspection apparatus, defect inspection system and method for semiconductor device Grant 6,826,735 - Ono , et al. November 30, 2 | 2004-11-30 |
Inspection system and semiconductor device manufacturing method Grant 6,775,817 - Ono , et al. August 10, 2 | 2004-08-10 |
Inspection system, inspection apparatus, inspection program, and production method of semiconductor devices Grant 6,687,633 - Ono , et al. February 3, 2 | 2004-02-03 |
Inspection condition setting program, inspection device and inspection system App 20030195712 - Ono, Makoto ;   et al. | 2003-10-16 |
Inspection system and method for manufacturing electronic devices using the inspection system Grant 6,611,728 - Morioka , et al. August 26, 2 | 2003-08-26 |
Inspection data analysis program, defect inspection apparatus, defect inspection system and method for semiconductor device App 20030058436 - Ono, Makoto ;   et al. | 2003-03-27 |
Inspection system, inspection apparatus, inspection program, and production method of semiconductor devices App 20020143483 - Ono, Makoto ;   et al. | 2002-10-03 |
Inspection system and semiconductor device manufacturing method App 20020052053 - Ono, Makoto ;   et al. | 2002-05-02 |
Pattern detecting method, pattern detecting apparatus, projection exposing apparatus using the same and exposure system Grant 5,684,565 - Oshida , et al. November 4, 1 | 1997-11-04 |
Method and apparatus for the inspection of defects Grant 5,293,538 - Iwata , et al. March 8, 1 | 1994-03-08 |
Method for producing thin film multilayer substrate, and method and apparatus for detecting circuit conductor pattern of the substrate Grant 5,278,012 - Yamanaka , et al. January 11, 1 | 1994-01-11 |
Method of aligning and bonding tab inner leads Grant 5,059,559 - Takahashi , et al. October 22, 1 | 1991-10-22 |