| Patent | Date |
|---|
Substrate Processing Apparatus And Substrate Processing Method
App 20220154342 - Morikawa; Katsuhiro ; et al. | 2022-05-19 |
Substrate Processing Apparatus And Substrate Processing Method
App 20220056590 - Morita; Satoshi ; et al. | 2022-02-24 |
Multilayer Wiring Forming Method And Recording Medium
App 20210358767 - Tanaka; Takashi ; et al. | 2021-11-18 |
Method for manufacturing a contact pad, method for manufacturing a semiconductor device using same, and semiconductor device
Grant 11,171,050 - Yatsuda , et al. November 9, 2 | 2021-11-09 |
Plating Method, Plating Apparatus And Recording Medium
App 20210175079 - Iwashita; Mitsuaki | 2021-06-10 |
Forming method of hard mask
Grant 11,004,684 - Iwashita , et al. May 11, 2 | 2021-05-11 |
Multilayer Wiring Forming Method And Recording Medium
App 20200395243 - Iwashita; Mitsuaki | 2020-12-17 |
Method For Manufacturing A Contact Pad, Method For Manufacturing A Semiconductor Device Using Same, And Semiconductor Device
App 20200035553 - YATSUDA; Koichi ; et al. | 2020-01-30 |
Forming Method Of Hard Mask
App 20190157083 - Iwashita; Mitsuaki ; et al. | 2019-05-23 |
Forming method of hard mask, forming apparatus of hard mask and recording medium
Grant 10,224,202 - Iwashita , et al. | 2019-03-05 |
Plating method and recording medium
Grant 10,224,208 - Mizutani , et al. | 2019-03-05 |
Substrate processing method, substrate processing apparatus, and storage medium
Grant 10,199,240 - Hayashi , et al. Fe | 2019-02-05 |
Plating method, plating apparatus, and storage medium
Grant 10,138,556 - Mizutani , et al. Nov | 2018-11-27 |
Plating method, plating system and storage medium
Grant 10,030,308 - Tanaka , et al. July 24, 2 | 2018-07-24 |
Catalyst layer forming method, catalyst layer forming system and recording medium
Grant 9,966,306 - Inatomi , et al. May 8, 2 | 2018-05-08 |
Method for manufacturing wiring structure, copper displacement plating solution, and wiring structure
Grant 9,888,585 - Shinguhara , et al. February 6, 2 | 2018-02-06 |
Plating method, plating system and storage medium
Grant 9,837,308 - Mizutani , et al. December 5, 2 | 2017-12-05 |
Forming Method Of Hard Mask, Forming Apparatus Of Hard Mask And Recording Medium
App 20170287713 - Iwashita; Mitsuaki ; et al. | 2017-10-05 |
Plating apparatus, plating method and storage medium
Grant 9,777,379 - Inatomi , et al. October 3, 2 | 2017-10-03 |
Plating apparatus, plating method and storage medium having plating program stored thereon
Grant 9,731,322 - Tanaka , et al. August 15, 2 | 2017-08-15 |
Plating method, plating apparatus and storage medium
Grant 9,725,810 - Mizutani , et al. August 8, 2 | 2017-08-08 |
Plating method, recording medium and plating system
Grant 9,711,363 - Mizutani , et al. July 18, 2 | 2017-07-18 |
Pre-treatment method for plating and storage medium
Grant 9,653,350 - Tanaka , et al. May 16, 2 | 2017-05-16 |
Metal wiring layer forming method, metal wiring layer forming apparatus, and recording medium
Grant 9,653,354 - Tanaka , et al. May 16, 2 | 2017-05-16 |
Pre-treatment method of plating, storage medium, and plating system
Grant 9,650,717 - Iwai , et al. May 16, 2 | 2017-05-16 |
Plating Apparatus, Plating Method And Recording Medium
App 20170121822 - Mizutani; Nobutaka ; et al. | 2017-05-04 |
Substrate Processing Apparatus, Substrate Processing Method And Recording Medium
App 20170084480 - Mizutani; Nobutaka ; et al. | 2017-03-23 |
Supercritical drying method for semiconductor substrate and supercritical drying apparatus
Grant 9,583,330 - Ji , et al. February 28, 2 | 2017-02-28 |
Plating apparatus, plating method, and storage medium
Grant 9,552,994 - Inatomi , et al. January 24, 2 | 2017-01-24 |
Pre-treatment method for plating and storage medium
Grant 9,523,153 - Tanaka , et al. December 20, 2 | 2016-12-20 |
Plating apparatus, plating method and storage medium
Grant 9,505,019 - Inatomi , et al. November 29, 2 | 2016-11-29 |
Plating Method And Recording Medium
App 20160336179 - Mizutani; Nobutaka ; et al. | 2016-11-17 |
Plating apparatus, plating method and storage medium
Grant 9,487,865 - Inatomi , et al. November 8, 2 | 2016-11-08 |
Plating Method, Recording Medium And Plating System
App 20160307759 - Mizutani; Nobutaka ; et al. | 2016-10-20 |
Catalyst Layer Forming Method, Catalyst Layer Forming System And Recording Medium
App 20160247683 - Inatomi; Yuichiro ; et al. | 2016-08-25 |
Semiconductor Device, Plating Method, Plating System And Recording Medium
App 20160247765 - Inatomi; Yuichiro ; et al. | 2016-08-25 |
Plating apparatus, plating method and storage medium
Grant 9,421,569 - Tanaka , et al. August 23, 2 | 2016-08-23 |
Metal Wiring Layer Forming Method, Metal Wiring Layer Forming Apparatus, And Recording Medium
App 20160240436 - Tanaka; Takashi ; et al. | 2016-08-18 |
Wiring Layer Forming Method, Wiring Layer Forming System And Recording Medium
App 20160190040 - Iwashita; Mitsuaki ; et al. | 2016-06-30 |
Method For Manufacturing Wiring Structure, Copper Displacement Plating Solution, And Wiring Structure
App 20160095228 - Shinguhara; Shoso ; et al. | 2016-03-31 |
Apparatus for plating process
Grant 9,255,331 - Tanaka , et al. February 9, 2 | 2016-02-09 |
Substrate processing apparatus, substrate processing method, and storage medium
Grant 9,236,280 - Toshima , et al. January 12, 2 | 2016-01-12 |
Catalyst Adsorption Method And Catalyst Adsorption Device
App 20150303103 - Shinguhara; Shoso ; et al. | 2015-10-22 |
Pre-treatment Method Of Plating, Storage Medium, And Plating System
App 20150247242 - Iwai; Kazutoshi ; et al. | 2015-09-03 |
Plating Apparatus, Plating Method And Storage Medium
App 20150232994 - Inatomi; Yuichiro ; et al. | 2015-08-20 |
Electroless Plating Method, Electroless Plating Apparatus And Storage Medium
App 20150218702 - Mizutani; Nobutaka ; et al. | 2015-08-06 |
Plating Apparatus, Plating Method, And Storage Medium
App 20150167174 - Mizutani; Nobutaka ; et al. | 2015-06-18 |
Plating Method, Plating Apparatus, And Storage Medium
App 20150147476 - Mizutani; Nobutaka ; et al. | 2015-05-28 |
Pre-treatment Method For Plating And Storage Medium
App 20150140209 - Tanaka; Takashi ; et al. | 2015-05-21 |
Pre-treatment Method For Plating And Storage Medium
App 20150140816 - Tanaka; Takashi ; et al. | 2015-05-21 |
Plating Apparatus, Plating Method, And Storage Medium
App 20150099355 - Inatomi; Yuichiro ; et al. | 2015-04-09 |
Apparatus For Plating Process
App 20150096490 - Tanaka; Takashi ; et al. | 2015-04-09 |
Cap metal forming method
Grant 8,999,432 - Tanaka , et al. April 7, 2 | 2015-04-07 |
Plating Method, Plating System And Storage Medium
App 20150079785 - Mizutani; Nobutaka ; et al. | 2015-03-19 |
Plating Method, Plating System And Storage Medium
App 20150030774 - Tanaka; Takashi ; et al. | 2015-01-29 |
Liquid treatment apparatus and liquid treatment method
Grant 8,937,014 - Tanaka , et al. January 20, 2 | 2015-01-20 |
Plating Apparatus, Plating Method And Storage Medium
App 20140356539 - Inatomi; Yuichiro ; et al. | 2014-12-04 |
Plating Apparatus, Plating Method And Storage Medium Having Plating Program Stored Thereon
App 20140302242 - Tanaka; Takashi ; et al. | 2014-10-09 |
Supercritical Drying Method For Semiconductor Substrate And Supercritical Drying Apparatus
App 20140250714 - JI; Linan ; et al. | 2014-09-11 |
Semiconductor manufacturing apparatus and semiconductor manufacturing method
Grant 8,770,138 - Hara , et al. July 8, 2 | 2014-07-08 |
Supercritical drying method for semiconductor substrate and supercritical drying apparatus
Grant 8,771,429 - Ji , et al. July 8, 2 | 2014-07-08 |
Liquid Treatment Apparatus And Liquid Treatment Method
App 20140148006 - Tanaka; Takashi ; et al. | 2014-05-29 |
Plating Apparatus, Plating Method And Storage Medium
App 20140134345 - Inatomi; Yuichiro ; et al. | 2014-05-15 |
Plating Method, Plating Apparatus And Storage Medium
App 20140127410 - Mizutani; Nobutaka ; et al. | 2014-05-08 |
Plating Apparatus, Plating Method And Storage Medium
App 20140120264 - Inatomi; Yuichiro ; et al. | 2014-05-01 |
Developing treatment method
Grant 8,691,497 - Inatomi , et al. April 8, 2 | 2014-04-08 |
Plating Apparatus, Plating Method And Storage Medium
App 20130302525 - Tanaka; Takashi ; et al. | 2013-11-14 |
Supercritical processing apparatus and supercritical processing method
Grant 8,465,596 - Toshima , et al. June 18, 2 | 2013-06-18 |
Micro pattern forming method
Grant 8,383,522 - Nakajima , et al. February 26, 2 | 2013-02-26 |
Supercritical drying method and apparatus for semiconductor substrates
Grant 8,372,212 - Sato , et al. February 12, 2 | 2013-02-12 |
Supercritical Drying Method For Semiconductor Substrate And Supercritical Drying Apparatus
App 20130019905 - JI; Linan ; et al. | 2013-01-24 |
Coating Apparatus And Coating Method
App 20130011555 - SAWADA; Ikuo ; et al. | 2013-01-10 |
Heat Treatment Apparatus And Heat Treatment Method
App 20120328273 - KAWANO; Hisashi ; et al. | 2012-12-27 |
Substrate Processing Method, Substrate Processing Apparatus, And Storage Medium
App 20120304485 - Hayashi; Hidekazu ; et al. | 2012-12-06 |
Supercritical Drying Method And Apparatus For Semiconductor Substrates
App 20120247516 - SATO; Yohei ; et al. | 2012-10-04 |
Developing Treatment Method
App 20120183909 - Inatomi; Yuichiro ; et al. | 2012-07-19 |
Cap metal forming method
Grant 8,206,785 - Toshima , et al. June 26, 2 | 2012-06-26 |
Substrate Processing Apparatus, Substrate Processing Method, and Storage Medium
App 20120132230 - Toshima; Takayuki ; et al. | 2012-05-31 |
Pattern forming method and method of manufacturing semiconductor device by using the same
Grant 8,168,377 - Mitsuoka , et al. May 1, 2 | 2012-05-01 |
Patterning method
Grant 8,168,375 - Nakajima , et al. May 1, 2 | 2012-05-01 |
Substrate Processing Method And Substrate Processing Apparatus
App 20110318925 - Tanaka; Takashi ; et al. | 2011-12-29 |
Substrate processing method and substrate processing apparatus
Grant 8,062,955 - Tanaka , et al. November 22, 2 | 2011-11-22 |
Semiconductor Manufacturing Apparatus And Semiconductor Manufacturing Method
App 20110265718 - Hara; Kenichi ; et al. | 2011-11-03 |
Micro Pattern Forming Method
App 20110237082 - Nakajima; Shigeru ; et al. | 2011-09-29 |
Supercritical Processing Apparatus And Supercritical Processing Method
App 20110214694 - TOSHIMA; Takayuki ; et al. | 2011-09-08 |
Semiconductor manufacturing apparatus and semiconductor manufacturing method
Grant 8,003,509 - Hara , et al. August 23, 2 | 2011-08-23 |
Patterning method
Grant 7,989,354 - Nakajima , et al. August 2, 2 | 2011-08-02 |
Substrate Treatment Method And Substrate Treatment Apparatus
App 20100307683 - IWASHITA; Mitsuaki ; et al. | 2010-12-09 |
Substrate treatment method for etching a base film using a resist pattern
Grant 7,781,342 - Iwashita , et al. August 24, 2 | 2010-08-24 |
Patterning method utilizing SiBN and photolithography
Grant 7,754,622 - Chou , et al. July 13, 2 | 2010-07-13 |
Patterning Method
App 20100130015 - Nakajima; Shigeru ; et al. | 2010-05-27 |
Patterning Method
App 20100112796 - Chou; Pao-Hwa ; et al. | 2010-05-06 |
Patterning Method
App 20100112496 - Nakajima; Shigeru ; et al. | 2010-05-06 |
Cap Metal Forming Method
App 20100075027 - Toshima; Takayuki ; et al. | 2010-03-25 |
Cap Metal Forming Method
App 20100062159 - Tanaka; Takashi ; et al. | 2010-03-11 |
Method And Apparatus For Reforming Film And Controlling Slimming Amount Thereof
App 20100040980 - Nishimura; Eiichi ; et al. | 2010-02-18 |
Supply Apparatus, Semiconductor Manufacturing Apparatus And Semiconductor Manufacturing Method
App 20100015791 - Tanaka; Takashi ; et al. | 2010-01-21 |
Semiconductor Manufacturing Apparatus And Semiconductor Manufacturing Method
App 20090253258 - Hara; Kenichi ; et al. | 2009-10-08 |
Pattern Forming Method And Method Of Manufacturing Semiconductor Device By Using The Same
App 20090220898 - MITSUOKA; Kazuyuki ; et al. | 2009-09-03 |
Coating Apparatus and Coating Method
App 20090162547 - Sawada; Ikuo ; et al. | 2009-06-25 |
Method of processing an organic-film
Grant 7,521,098 - Mitsuoka , et al. April 21, 2 | 2009-04-21 |
Substrate Processing Method and Substrate Processing Apparatus
App 20080280437 - Tanaka; Takashi ; et al. | 2008-11-13 |
Substrate Processing Method and Substrate Processing Apparatus
App 20080226826 - Tanaka; Takashi ; et al. | 2008-09-18 |
Substrate Processing Method, Substrate Processing System, And Storage Medium
App 20080199617 - Inatomi; Yuichiro ; et al. | 2008-08-21 |
Substrate Treatment Method and Substrate Treatment Apparatus
App 20070243711 - Iwashita; Mitsuaki ; et al. | 2007-10-18 |
Method of repairing seed layer for damascene interconnects
App 20070148972 - Hara; Kenichi ; et al. | 2007-06-28 |
Electroless plating apparatus and electroless plating method
App 20070134431 - Hara; Kenichi ; et al. | 2007-06-14 |
Electroless plating apparatus and electroless plating method
App 20070128373 - Hara; Kenichi ; et al. | 2007-06-07 |
Thin film processing method and system
Grant 7,195,936 - Onishi , et al. March 27, 2 | 2007-03-27 |
Processing device and processing method
App 20050260771 - Iwashita, Mitsuaki ; et al. | 2005-11-24 |
Method and apparatus for reforming film and controlling slimming amount thereof
App 20050214683 - Nishimura, Eiichi ; et al. | 2005-09-29 |
Method of processing an organic-film
App 20050042388 - Mitsuoka, Kazuyuki ; et al. | 2005-02-24 |
Film forming method and film forming apparatus
App 20050026454 - Konishi, Nobuo ; et al. | 2005-02-03 |
Film forming method by radiating a plasma on a surface of a low dielectric constant film
Grant 6,800,546 - Konishi , et al. October 5, 2 | 2004-10-05 |
Thin film processing method and system
App 20040137760 - Onishi, Tadashi ; et al. | 2004-07-15 |
Film forming method and film forming apparatus
App 20040127019 - Konishi, Nobuo ; et al. | 2004-07-01 |
Film forming method and film forming apparatus
Grant 6,683,006 - Konishi , et al. January 27, 2 | 2004-01-27 |
Polishing system and polishing method
Grant 6,660,124 - Kawasaki , et al. December 9, 2 | 2003-12-09 |
Film forming method and film forming apparatus
App 20020197878 - Konishi, Nobuo ; et al. | 2002-12-26 |
Film forming method and film forming apparatus
App 20020177298 - Konishi, Nobuo ; et al. | 2002-11-28 |
Polishing apparatus, polishing member
Grant 6,120,361 - Konishi , et al. September 19, 2 | 2000-09-19 |
Polishing system
Grant 6,106,369 - Konishi , et al. August 22, 2 | 2000-08-22 |
Method and apparatus for polishing
Grant 5,722,875 - Iwashita , et al. March 3, 1 | 1998-03-03 |
Film-forming apparatus
Grant 5,622,566 - Hosaka , et al. April 22, 1 | 1997-04-22 |
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