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Ejection-material Ejection Apparatus And Imprinting Apparatus App 20210362507 - Kawahara; Nobuto ;   et al. | 2021-11-25 |
Switching device and method for controlling switching device Grant 11,146,163 - Shimomura , et al. October 12, 2 | 2021-10-12 |
Semiconductor Device App 20210183726 - TOMITA; Yosuke ;   et al. | 2021-06-17 |
Ejection-material ejection apparatus and imprinting apparatus Grant 10,987,840 - Iwasaki April 27, 2 | 2021-04-27 |
Switching Device And Method For Controlling Switching Device App 20200395838 - SHIMOMURA; Taku ;   et al. | 2020-12-17 |
Ejection Material Filling Device, Pressure Regulation Device, And Ejection Material Filling Method App 20200341371 - Iwasaki; Yuichi ;   et al. | 2020-10-29 |
Storage Device, Ejection-material Ejection Device, And Imprint Apparatus App 20200338806 - Kawahara; Nobuto ;   et al. | 2020-10-29 |
Drive device Grant 10,476,495 - Shimomura , et al. Nov | 2019-11-12 |
Ejection-material Ejection Apparatus And Imprinting Apparatus App 20190217516 - Iwasaki; Yuichi | 2019-07-18 |
Drive Device App 20190181854 - SHIMOMURA; Taku ;   et al. | 2019-06-13 |
Generating Method, Imprinting Method, Imprint Apparatus, Program, And Method Of Manufacturing Article App 20170140922 - Iwasaki; Yuichi ;   et al. | 2017-05-18 |
Lithography apparatus, and method of manufacturing article Grant 9,606,460 - Iwasaki , et al. March 28, 2 | 2017-03-28 |
Lithography Apparatus, And Method Of Manufacturing Article App 20160139510 - Iwasaki; Yuichi ;   et al. | 2016-05-19 |
Active dynamic vibration absorber Grant 8,484,910 - Shimoda , et al. July 16, 2 | 2013-07-16 |
Exposure apparatus Grant 8,363,205 - Iwasaki January 29, 2 | 2013-01-29 |
Copper Foil For Negative Electrode Current Collector Of Secondary Battery App 20130011734 - Arai; Hideta ;   et al. | 2013-01-10 |
Active Dynamic Vibration Absorber App 20120266547 - Shimoda; Ikuo ;   et al. | 2012-10-25 |
Immersion exposure apparatus and device manufacturing method Grant 8,035,796 - Iwasaki October 11, 2 | 2011-10-11 |
Exposure Apparatus App 20100245789 - Iwasaki; Yuichi | 2010-09-30 |
Exposure apparatus Grant 7,679,717 - Iwasaki March 16, 2 | 2010-03-16 |
Apparatus And Method For Exposure And Method Of Manufacturing Device App 20090273766 - Sakai; Keita ;   et al. | 2009-11-05 |
Immersion Exposure Apparatus And Device Manufacturing Method App 20090002649 - Iwasaki; Yuichi | 2009-01-01 |
Deflector, method of manufacturing deflector, and charged particle beam exposure apparatus Grant 7,276,707 - Iwasaki , et al. October 2, 2 | 2007-10-02 |
Exposure Apparatus App 20070146667 - IWASAKI; Yuichi | 2007-06-28 |
Fine structure and devices employing it Grant 7,018,783 - Iwasaki , et al. March 28, 2 | 2006-03-28 |
Deflector, method of manufacturing deflector, and charged particle beam exposure apparatus App 20050263713 - Iwasaki, Yuichi ;   et al. | 2005-12-01 |
Deflector, method of manufacturing deflector, and charged particle beam exposure apparatus Grant 6,953,938 - Iwasaki , et al. October 11, 2 | 2005-10-11 |
Method of manufacturing diffractive optical element Grant 6,930,834 - Ogusu , et al. August 16, 2 | 2005-08-16 |
Deflector, method of manufacturing deflector, and charged particle beam exposure apparatus App 20050035300 - Iwasaki, Yuichi ;   et al. | 2005-02-17 |
Array structure and method of manufacturing the same, charged particle beam exposure apparatus, and device manufacturing method Grant 6,818,911 - Tamamori , et al. November 16, 2 | 2004-11-16 |
Array structure and method of manufacturing the same, charged particle beam exposure apparatus, and device manufacturing method App 20030218140 - Tamamori, Kenji ;   et al. | 2003-11-27 |
Multiple exposure device formation Grant 6,534,242 - Sugita , et al. March 18, 2 | 2003-03-18 |
Method of forming an optical element Grant 6,514,674 - Iwasaki February 4, 2 | 2003-02-04 |
Fine structure and devices employing it App 20030008245 - Iwasaki, Yuichi ;   et al. | 2003-01-09 |
Method for forming fine structure Grant 6,475,704 - Iwasaki , et al. November 5, 2 | 2002-11-05 |
Method of manufacturing diffractive optical element App 20020122255 - Ogusu, Makoto ;   et al. | 2002-09-05 |
Exposure method, exposure apparatus, and device manufacturing method App 20020031725 - Sugita, Mitsuro ;   et al. | 2002-03-14 |