Iwao; Toshihiko
Patent Applications and Registrations
Patent applications and USPTO patent grants for Iwao; Toshihiko.The latest application filed is for "cyclic low temperature film growth processes".
Company Profile
4.20.31
- Iwao; Toshihiko - Austin TX
- IWAO; Toshihiko - Nirasaki City Yamanashi
- Iwao; Toshihiko - Yamanashi JP
- Iwao; Toshihiko - Nirasaki JP
- Iwao; Toshihiko - Miyagi JP
- Iwao; Toshihiko - Sendai Miyagi JP
- Iwao; Toshihiko - Tokyo N/A JP
- IWAO; Toshihiko - Sendai City JP
Patent Activity
| Patent | Date |
|---|---|
| Cyclic Low Temperature Film Growth Processes App 20220093395 - Zhao; Jianping ; et al. | 2022-03-24 |
| Hard Mask Deposition Using Direct Current Superimposed Radio Frequency Plasma App 20210404055 - Zhao; Jianping ; et al. | 2021-12-30 |
| Plasma Processing Apparatus And Plasma Processing Method App 20210351004 - IWAO; Toshihiko | 2021-11-11 |
| Plasma processing apparatus Grant 11,139,147 - Iwao , et al. October 5, 2 | 2021-10-05 |
| Antenna and plasma deposition apparatus Grant 10,991,549 - Ikeda , et al. April 27, 2 | 2021-04-27 |
| Microwave plasma source, microwave plasma processing apparatus and plasma processing method Grant 10,804,077 - Iwao October 13, 2 | 2020-10-13 |
| Substrate processing apparatus Grant 10,570,512 - Iwao , et al. Feb | 2020-02-25 |
| Plasma processing apparatus Grant 10,546,725 - Hirano , et al. Ja | 2020-01-28 |
| Film formation device Grant 10,513,777 - Iwasaki , et al. Dec | 2019-12-24 |
| Plasma processing apparatus Grant 10,370,763 - Hirano , et al. | 2019-08-06 |
| Plasma processing apparatus Grant 10,347,466 - Hirano , et al. July 9, 2 | 2019-07-09 |
| Antenna And Plasma Deposition Apparatus App 20190180984 - IKEDA; Taro ; et al. | 2019-06-13 |
| Film forming apparatus Grant 10,145,014 - Nozawa , et al. De | 2018-12-04 |
| Microwave Plasma Source, Microwave Plasma Processing Apparatus and Plasma Processing Method App 20180218883 - IWAO; Toshihiko | 2018-08-02 |
| Microwave surface-wave plasma device Grant 9,947,515 - Funk , et al. April 17, 2 | 2018-04-17 |
| Microwave plasma processing apparatus, slot antenna, and semiconductor device Grant 9,875,882 - Iwao , et al. January 23, 2 | 2018-01-23 |
| Plasma Processing Apparatus And Plasma Processing Method App 20170350014 - IWAO; Toshihiko ; et al. | 2017-12-07 |
| Plasma Processing Apparatus App 20170342564 - HIRANO; Takahiro ; et al. | 2017-11-30 |
| Film-forming apparatus Grant 9,831,067 - Iwasaki , et al. November 28, 2 | 2017-11-28 |
| Plasma Processing Apparatus App 20170298514 - Hirano; Takahiro ; et al. | 2017-10-19 |
| Microwave surface-wave plasma device Grant 9,793,095 - Funk , et al. October 17, 2 | 2017-10-17 |
| Plasma Processing Apparatus App 20170236690 - HIRANO; Takahiro ; et al. | 2017-08-17 |
| Microwave plasma processing apparatus and microwave supplying method Grant 9,633,821 - Kaneko , et al. April 25, 2 | 2017-04-25 |
| Plasma Processing Apparatus App 20160358758 - HIRANO; Takahiro ; et al. | 2016-12-08 |
| Microwave Plasma Processing Apparatus And Microwave Supplying Method App 20160172163 - KANEKO; Kazushi ; et al. | 2016-06-16 |
| Microwave plasma processing apparatus and microwave supplying method Grant 9,305,751 - Kaneko , et al. April 5, 2 | 2016-04-05 |
| Film-forming Apparatus App 20150279627 - Iwasaki; Masahide ; et al. | 2015-10-01 |
| Substrate Processing Apparatus App 20150232993 - IWAO; Toshihiko ; et al. | 2015-08-20 |
| Plasma tuning rods in microwave resonator plasma sources Grant 9,111,727 - Zhao , et al. August 18, 2 | 2015-08-18 |
| Film Forming Apparatus App 20150211124 - Nozawa; Toshihisa ; et al. | 2015-07-30 |
| Plasma Processing Apparatus App 20150194290 - Nozawa; Toshihisa ; et al. | 2015-07-09 |
| Microwave Plasma Processing Apparatus App 20150013913 - IWAO; Toshihiko ; et al. | 2015-01-15 |
| Microwave Plasma Processing Apparatus, Slot Antenna, And Semiconductor Device App 20150013912 - FUJII; Toru ; et al. | 2015-01-15 |
| Microwave Plasma Processing Apparatus, Slot Antenna, And Semiconductor Device App 20150013911 - IWAO; Toshihiko ; et al. | 2015-01-15 |
| Microwave Plasma Processing Apparatus And Microwave Supplying Method App 20150015139 - KANEKO; Kazushi ; et al. | 2015-01-15 |
| Microwave Plasma Processing Apparatus, Slot Antenna, And Semiconductor Device App 20150013907 - FUJII; Toru ; et al. | 2015-01-15 |
| Film Formation Device App 20150007774 - Iwasaki; Masahide ; et al. | 2015-01-08 |
| Microwave Surface-Wave Plasma Device App 20140262042 - Funk; Merritt ; et al. | 2014-09-18 |
| Microwave Surface-Wave Plasma Device App 20140262041 - Funk; Merritt ; et al. | 2014-09-18 |
| Plasma Processing Apparatus App 20140251541 - IWAO; Toshihiko ; et al. | 2014-09-11 |
| Plasma tuning rods in microwave processing systems Grant 8,808,496 - Zhao , et al. August 19, 2 | 2014-08-19 |
| Plasma Tuning Rods in Microwave Processing Systems App 20130081762 - Zhao; Jianping ; et al. | 2013-04-04 |
| Plasma-Tuning Rods in Surface Wave Antenna (SWA) Sources App 20130084706 - Zhao; Jianping ; et al. | 2013-04-04 |
| Plasma Tuning Rods in Microwave Resonator Plasma Sources App 20130082030 - Zhao; Jianping ; et al. | 2013-04-04 |
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