Iwamoto; Kazunori

Patent Applications and Registrations

Patent applications and USPTO patent grants for Iwamoto; Kazunori.The latest application filed is for "method for producing cleaning device and cleaning device".

Company Profile

0.24.10

Iwamoto; Kazunori - Kanagawa JP
Iwamoto; Kazunori - Utsunomiya JP
Iwamoto; Kazunori - Tochigi JP
Iwamoto, Kazunori - Utsunomiya-shi JP
Iwamoto; Kazunori - Yokohama JP
Iwamoto; Kazunori - Yokoyama JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Method for producing cleaning device and cleaning device Grant 8,244,156 - Iwamoto , et al. August 14, 2	2012-08-14
Method For Producing Cleaning Device And Cleaning Device App 20090317124 - Iwamoto; Kazunori ; et al.	2009-12-24
Moving mechanism and stage system in exposure apparatus Grant 7,346,414 - Tanaka , et al. March 18, 2	2008-03-18
Stage apparatus, exposure apparatus, and semiconductor device manufacturing mehtod App 20060017909 - Muto; Yasuyo ; et al.	2006-01-26
Moving mechanism and stage system in exposure apparatus Grant 6,990,386 - Tanaka , et al. January 24, 2	2006-01-24
Moving mechanism and stage system in exposure apparatus App 20050280799 - Tanaka, Hideo ; et al.	2005-12-22
Stage apparatus, exposure apparatus, and semiconductor device manufacturing method Grant 6,965,428 - Muto , et al. November 15, 2	2005-11-15
Stage apparatus and exposure apparatus Grant 6,891,599 - Iwamoto May 10, 2	2005-05-10
Stage Apparatus Which Supports Interferometer, Stage Position Measurement Method, Projection Exposure Apparatus, Projection Exposure Apparatus Maintenance Method, Semiconductor Device Manufacturing Method, And Semiconductor Manufacturing Factory Grant 6,867,849 - Iwamoto , et al. March 15, 2	2005-03-15
Scanning exposure method and apparatus, and device manufacturing method using the same Grant 6,856,404 - Iwamoto , et al. February 15, 2	2005-02-15
Exposure apparatus including interferometer system Grant 6,819,433 - Takai , et al. November 16, 2	2004-11-16
Stage apparatus, exposure apparatus, and semiconductor device manufacturing method App 20040124594 - Muto, Yasuyo ; et al.	2004-07-01
Moving mechanism in exposure apparatus, and exposure apparatus having the same Grant 6,717,653 - Iwamoto , et al. April 6, 2	2004-04-06
Scanning Exposure Method And Apparatus, And Device Manufacturing Method Using The Same App 20030151748 - IWAMOTO, KAZUNORI ; et al.	2003-08-14
Stage apparatus and exposure apparatus App 20030098961 - Iwamoto, Kazunori	2003-05-29
Moving mechanism and stage system in exposure apparatus App 20030040831 - Tanaka, Hideo ; et al.	2003-02-27
Stage apparatus, exposure apparatus and device manufacturing method Grant 6,469,773 - Iwamoto October 22, 2	2002-10-22
Exposure apparatus including interferometer system App 20020109850 - Takai, Ryo ; et al.	2002-08-15
Moving mechanism in exposure apparatus, and exposure apparatus having the same App 20020018195 - Iwamoto, Kazunori ; et al.	2002-02-14
Stage apparatus which supports interferometer, stage position measurement method, projection exposure apparatus, projection exposure apparatus maintenance method, semiconductor device manufacturing method, and semiconductor manufacturing factory App 20020008877 - Iwamoto, Kazunori ; et al.	2002-01-24
Scanning exposure method and apparatus Grant 6,069,683 - Iwamoto May 30, 2	2000-05-30
Scanning exposure apparatus Grant 6,008,885 - Takahashi , et al. December 28, 1	1999-12-28
Exposure apparatus and device manufacturing method using the same Grant 5,933,215 - Inoue , et al. August 3, 1	1999-08-03
Stage and exposure apparatus using same Grant 5,909,272 - Osanai , et al. June 1, 1	1999-06-01
Substrate holding device and exposing apparatus using the same Grant 5,883,932 - Chiba , et al. March 16, 1	1999-03-16
Projection exposure apparatus and exposure method and semiconductor device production method therewith Grant 5,781,277 - Iwamoto July 14, 1	1998-07-14
Mounting method Grant 5,687,947 - Iwamoto , et al. November 18, 1	1997-11-18
Substrate conveying system Grant 5,640,440 - Kuno , et al. June 17, 1	1997-06-17
Wavelength compensator in a helium ambience Grant 5,483,343 - Iwamoto , et al. January 9, 1	1996-01-09
Support device Grant 5,467,720 - Korenaga , et al. November 21, 1	1995-11-21
Wafer table and exposure apparatus with the same Grant 5,231,291 - Amemiya , et al. July 27, 1	1993-07-27
Conveying apparatus and method of controlling the same Grant 5,226,523 - Kawakami , et al. July 13, 1	1993-07-13
Vacuum chuck Grant 5,191,218 - Mori , et al. March 2, 1	1993-03-02
Method of manufacture of semiconductor devices Grant 5,168,512 - Iwamoto , et al. December 1, 1	1992-12-01

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