Iwahata; Shota

Patent Applications and Registrations

Patent applications and USPTO patent grants for Iwahata; Shota.The latest application filed is for "substrate processing apparatus and substrate processing method".

Company Profile

6.7.8

Iwahata; Shota - Kyoto JP
IWAHATA; Shota - Kyoto-shi JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Substrate processing apparatus and substrate processing method Grant 11,260,436 - Osada , et al. March 1, 2	2022-03-01
Processing liquid supplying apparatus, substrate processing apparatus and processing liquid supplying method Grant 11,094,564 - Iwahata , et al. August 17, 2	2021-08-17
Substrate processing method and substrate processing device Grant 10,886,133 - Shimizu , et al. January 5, 2	2021-01-05
Chemical solution feeder, substrate treatment apparatus, method for feeding chemical solution, and method for treating substrate Grant 10,816,141 - Higuchi , et al. October 27, 2	2020-10-27
Substrate Processing Apparatus And Substrate Processing Method App 20200290101 - OSADA; Naoyuki ; et al.	2020-09-17
Substrate processing apparatus and substrate processing method Grant 10,717,117 - Osada , et al.	2020-07-21
Substrate processing apparatus and substrate processing method Grant 10,651,029 - Takahashi , et al.	2020-05-12
Substrate processing method and substrate processing apparatus Grant 10,615,026 - Iwahata , et al.	2020-04-07
Substrate Processing Method And Substrate Processing Device App 20190267244 - SHIMIZU; Daisuke ; et al.	2019-08-29
Processing Liquid Supplying Apparatus, Substrate Processing Apparatus And Processing Liquid Supplying Method App 20190131144 - IWAHATA; Shota ; et al.	2019-05-02
Chemical Solution Feeder, Substrate Treatment Apparatus, Method For Feeding Chemical Solution, And Method For Treating Substrate App 20190056066 - HIGUCHI; Ayumi ; et al.	2019-02-21
Substrate Processing Method And Substrate Processing Apparatus App 20180261449 - IWAHATA; Shota ; et al.	2018-09-13
Substrate Processing Apparatus And Substrate Processing Method App 20180236510 - OSADA; Naoyuki ; et al.	2018-08-23
Substrate Processing Apparatus And Substrate Processing Method App 20170186599 - TAKAHASHI; Hiroaki ; et al.	2017-06-29
Substrate Processing Method And Substrate Processing Apparatus App 20160365238 - IWAHATA; Shota ; et al.	2016-12-15

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