Patent | Date |
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Method of production of uniform metal plates and sputtering targets made thereby Grant 11,062,889 - Ivanov , et al. July 13, 2 | 2021-07-13 |
Tungsten-boron Sputter Targets And Films Made Thereby App 20200332410 - IVANOV; Eugene Y. ;   et al. | 2020-10-22 |
Method Of Making A Tantalum Sputter Target And Sputter Targets Made Thereby App 20200240006 - Ivanov; Eugene Y. ;   et al. | 2020-07-30 |
Method of making a tantalum sputter target and sputter targets made thereby Grant 10,655,214 - Ivanov , et al. | 2020-05-19 |
Magnesium Oxide Sputtering Target And Method Of Making Same App 20200010368 - Ivanov; Eugene Y. ;   et al. | 2020-01-09 |
Titanium-tantalum Powders For Additive Manufacturing App 20190084048 - Ivanov; Eugene Y. ;   et al. | 2019-03-21 |
Method Of Production Of Uniform Metal Plates And Sputtering Targets Made Thereby App 20180374690 - Ivanov; Eugene Y. ;   et al. | 2018-12-27 |
Method Of Making Low Resistivity Tungsten Sputter Targets And Targets Made Thereby App 20180312960 - Ivanov; Eugene Y. ;   et al. | 2018-11-01 |
Method Of Making A Tantalum Sputter Target And Sputter Targets Made Thereby App 20180080120 - Ivanov; Eugene Y. ;   et al. | 2018-03-22 |
Low deflection sputtering target assembly and methods of making same Grant 9,831,073 - Yuan , et al. November 28, 2 | 2017-11-28 |
Diffusion-bonded Sputter Target Assembly And Method Of Manufacturing App 20170084434 - Miao; Weifang ;   et al. | 2017-03-23 |
Silicon Sputtering Target With Special Surface Treatment And Good Particle Performance And Methods Of Making The Same App 20170076923 - Yuan; Yongwen ;   et al. | 2017-03-16 |
Silicon sputtering target with special surface treatment and good particle performance and methods of making the same Grant 9,566,618 - Yuan , et al. February 14, 2 | 2017-02-14 |
Boron-doped N-type Silicon Target App 20170022603 - Ivanov; Eugene Y. ;   et al. | 2017-01-26 |
Diffusion-bonded sputter target assembly and method of manufacturing Grant 9,546,418 - Miao , et al. January 17, 2 | 2017-01-17 |
Soft-magnetic Based Targets Having Improved Pass Through Flux App 20160298228 - Ivanov; Eugene Y. ;   et al. | 2016-10-13 |
Silicon Sputtering Target With Enhanced Surface Profile And Improved Performance And Methods Of Making The Same App 20150357169 - Yuan; Yongwen ;   et al. | 2015-12-10 |
Low Deflection Sputtering Target Assembly And Methods Of Making Same App 20150170887 - Yuan; Yongwen ;   et al. | 2015-06-18 |
Sputtering target Grant 8,992,748 - Ivanov , et al. March 31, 2 | 2015-03-31 |
Silicon Sputtering Target With Special Surface Treatment And Good Particle Performance And Methods Of Making The Same App 20140311900 - Yuan; Yongwen ;   et al. | 2014-10-23 |
Diffusion-bonded Sputter Target Assembly And Method Of Manufacturing App 20140034490 - Miao; Weifang ;   et al. | 2014-02-06 |
High purity target manufacturing methods Grant 8,506,882 - Ivanov August 13, 2 | 2013-08-13 |
Circular groove pressing mechanism and method for sputtering target manufacturing Grant 8,453,487 - Ivanov , et al. June 4, 2 | 2013-06-04 |
Sputter Target App 20120305393 - Ivanov; Eugene Y. ;   et al. | 2012-12-06 |
Sputtering Target App 20120298506 - Ivanov; Eugene Y. ;   et al. | 2012-11-29 |
Systems And Methods For A Target And Backing Plate Assembly App 20120267243 - Ivanov; Eugene Y. | 2012-10-25 |
Sputtering target assembly and method of making same Grant 8,235,277 - Ivanov , et al. August 7, 2 | 2012-08-07 |
Sputtering Target Assembly And Method Of Making Same App 20120000594 - Ivanov; Eugene Y. ;   et al. | 2012-01-05 |
Sputtering target assembly and method of making same Grant 8,020,748 - Ivanov , et al. September 20, 2 | 2011-09-20 |
Circular Groove Pressing Mechanism And Method For Sputtering Target Manufacturing App 20110219847 - Ivanov; Eugene Y. ;   et al. | 2011-09-15 |
Method Of Bonding Rotatable Ceramic Targets To A Backing Structure App 20110203921 - Ivanov; Eugene Y. | 2011-08-25 |
Sputtering Target With An Insulating Ring And A Gap Between The Ring And The Target App 20110139614 - Ivanov; Eugene Y. ;   et al. | 2011-06-16 |
Sputtering target with an insulating ring and a gap between the ring and the target Grant 7,922,881 - Ivanov , et al. April 12, 2 | 2011-04-12 |
Sputtering target assembly and method of making same App 20100044415 - Ivanov; Eugene Y. ;   et al. | 2010-02-25 |
Systems and methods for a target and backing plate assembly App 20100038241 - Ivanov; Eugene Y. | 2010-02-18 |
Copper Sputtering Target With Fine Grain Size And High Electromigration Resistance And Methods Of Making the Same App 20100000860 - Yuan; Yongwen ;   et al. | 2010-01-07 |
High purity target manufacturing methods App 20090214374 - Ivanov; Eugene Y. | 2009-08-27 |
Electronic Device, Method of Manufacture of Same and Sputtering Target App 20090022982 - Ivanov; Eugene Y. ;   et al. | 2009-01-22 |
Sputtering Target App 20090008786 - Ivanov; Eugene Y. ;   et al. | 2009-01-08 |
Sputtering Target with an Insulating Ring and a Gap Between the Ring and the Target App 20080164146 - Ivanov; Eugene Y. ;   et al. | 2008-07-10 |
High Purity Target Manufacturing Methods App 20070243095 - Ivanov; Eugene Y. | 2007-10-18 |
Metal foam shield for sputter reactor App 20070158188 - Ivanov; Eugene Y. | 2007-07-12 |
Low temperature sputter target/backing plate method and assembly Grant 7,146,703 - Ivanov December 12, 2 | 2006-12-12 |
Friction fit target assembly for high power sputtering operation Grant 7,114,643 - Ivanov , et al. October 3, 2 | 2006-10-03 |
High purity sputter targets with target end-of-life indication and method of manufacture Grant 7,063,773 - Ivanov , et al. June 20, 2 | 2006-06-20 |
Methods for making low silicon content ni-si sputtering targets and targets made thereby App 20060118407 - Ivanov; Eugene Y. | 2006-06-08 |
Systems and methods for a target and backing plate assembly App 20050284746 - Ivanov, Eugene Y. | 2005-12-29 |
Method of manufacturing sputter targets with internal cooling channels Grant 6,955,852 - Ivanov October 18, 2 | 2005-10-18 |
Method of manufacturing sputter targets with internal cooling channels App 20050092604 - Ivanov, Eugene Y. | 2005-05-05 |
Target and method of optimizing target profile Grant 6,872,284 - Ivanov , et al. March 29, 2 | 2005-03-29 |
Method of manufacturing sputter targets with internal cooling channels Grant 6,840,427 - Ivanov January 11, 2 | 2005-01-11 |
Low temperature sputter target bonding method and target assemblies produced thereby Grant 6,749,103 - Ivanov , et al. June 15, 2 | 2004-06-15 |
Method of assembling target and backing plates Grant 6,725,522 - Ivanov , et al. April 27, 2 | 2004-04-27 |
Method of manufacturing sputter targets with internal cooling channels App 20040056070 - Ivanov, Eugene Y | 2004-03-25 |
Friction fit target assembly for high power sputtering operation App 20040035698 - Ivanov, Eugene Y. ;   et al. | 2004-02-26 |
Target and method of optimizing target profile App 20030183506 - Ivanov, Eugene Y ;   et al. | 2003-10-02 |
Methods of bonding targets to backing plate members using gallium based solder pastes and target/backing plate assemblies bonded thereby Grant 5,653,856 - Ivanov , et al. August 5, 1 | 1997-08-05 |
Methods of bonding targets to backing plate members using solder pastes and target/backing plate assemblies bonded thereby Grant 5,593,082 - Ivanov , et al. January 14, 1 | 1997-01-14 |
Methods and structural combinations providing for backing plate reuse in sputter target/backing plate assemblies Grant 5,522,535 - Ivanov , et al. June 4, 1 | 1996-06-04 |