IU; Dongming
Patent Applications and Registrations
Patent applications and USPTO patent grants for IU; Dongming.The latest application filed is for "methods, systems, and apparatus for optically monitoring individual lamps".
- IU; Dongming - Union City CA
- IU; DONGMING - Sunnyvale CA
| Patent | Date |
|---|---|
| Methods, Systems, And Apparatus For Optically Monitoring Individual Lamps App 20220301904 - HU; Ji-Dih ; et al. | 2022-09-22 |
| Methods And Apparatus For Measuring Edge Ring Temperature App 20220246453 - HU; JI-DIH ; et al. | 2022-08-04 |
| Plasma-enhanced anneal chamber for wafer outgassing Grant 11,348,769 - Hawrylchak , et al. May 31, 2 | 2022-05-31 |
| Methods and apparatus for measuring edge ring temperature Grant 11,342,209 - Hu , et al. May 24, 2 | 2022-05-24 |
| System And Method For Managing Substrate Outgassing App 20210280391 - SPULLER; Matthew ; et al. | 2021-09-09 |
| Methods And Apparatus For Measuring Edge Ring Temperature App 20210175101 - HU; JI-DIH ; et al. | 2021-06-10 |
| Thermal processing chamber with low temperature control Grant 10,948,353 - Hawrylchak , et al. March 16, 2 | 2021-03-16 |
| Plasma-enhanced Anneal Chamber For Wafer Outgassing App 20200402780 - HAWRYLCHAK; Lara ; et al. | 2020-12-24 |
| Plasma-enhanced anneal chamber for wafer outgassing Grant 10,770,272 - Hawrylchak , et al. Sep | 2020-09-08 |
| Semiconductor processing chamber Grant 10,741,428 - Hunter , et al. A | 2020-08-11 |
| Thermal Processing Chamber With Low Temperature Control App 20200149968 - HAWRYLCHAK; Lara ; et al. | 2020-05-14 |
| Plasma outlet liner Grant D877,784 - Iu , et al. | 2020-03-10 |
| Thermal cooling member with low temperature control Grant 10,571,337 - Hawrylchak , et al. Feb | 2020-02-25 |
| Lamphead PCB with flexible standoffs Grant 10,405,375 - Ranish , et al. Sep | 2019-09-03 |
| Substrate processing system with lamphead having temperature management Grant 10,202,707 - Ranish , et al. Feb | 2019-02-12 |
| Thermal Processing Chamber With Low Temperature Control App 20180340832 - HAWRYLCHAK; Lara ; et al. | 2018-11-29 |
| Thermal Chamber With Improved Thermal Uniformity App 20180337075 - IU; Dongming ; et al. | 2018-11-22 |
| Retention and insulation features for lamp Grant 10,026,630 - Iu , et al. July 17, 2 | 2018-07-17 |
| Patterned heater pedestal Grant D807,481 - Iu , et al. January 9, 2 | 2018-01-09 |
| Quartz Upper And Lower Domes App 20180005856 - CHANG; Anzhong ; et al. | 2018-01-04 |
| Vacuum Chuck Pressure Control System App 20170294333 - IU; Dongming ; et al. | 2017-10-12 |
| Plasma-enhanced Anneal Chamber For Wafer Outgassing App 20170294292 - HAWRYLCHAK; Lara ; et al. | 2017-10-12 |
| Semiconductor Processing Chamber App 20170294325 - HUNTER; Aaron Muir ; et al. | 2017-10-12 |
| Quartz upper and lower domes Grant 9,768,043 - Chang , et al. September 19, 2 | 2017-09-19 |
| Plasma outlet liner Grant D796,562 - Iu September 5, 2 | 2017-09-05 |
| Retention And Insulation Features For Lamp App 20150348809 - IU; Dongming ; et al. | 2015-12-03 |
| Lamphead Pcb With Flexible Standoffs App 20140255013 - RANISH; Joseph M. ; et al. | 2014-09-11 |
| Quartz Upper And Lower Domes App 20140199056 - CHANG; Anzhong ; et al. | 2014-07-17 |
| Substrate Processing System With Lamphead Having Temperature Management App 20130298832 - RANISH; JOSEPH M. ; et al. | 2013-11-14 |
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