Patent | Date |
---|
Method for manufacturing silicon carbide epitaxial substrate Grant 11,373,868 - Itoh June 28, 2 | 2022-06-28 |
Method For Manufacturing Silicon Carbide Epitaxial Substrate App 20220044934 - ITOH; Hironori | 2022-02-10 |
Silicon Carbide Epitaxial Substrate And Method For Manufacturing Silicon Carbide Semiconductor Device App 20210320005 - KANBARA; Kenji ;   et al. | 2021-10-14 |
Silicon carbide epitaxial substrate having grooves extending along main surface and method of manufacturing silicon carbide semiconductor device Grant 11,004,941 - Wada , et al. May 11, 2 | 2021-05-11 |
Silicon carbide epitaxial substrate and method of manufacturing silicon carbide semiconductor device Grant 10,865,501 - Hori , et al. December 15, 2 | 2020-12-15 |
Silicon carbide epitaxial substrate and method for manufacturing silicon carbide semiconductor device Grant 10,825,903 - Wada , et al. November 3, 2 | 2020-11-03 |
Silicon carbide epitaxial substrate and method for manufacturing silicon carbide semiconductor device Grant 10,811,500 - Itoh , et al. October 20, 2 | 2020-10-20 |
Silicon carbide epitaxial substrate having grooves extending along main surface and method of manufacturing silicon carbide semiconductor device Grant 10,770,550 - Wada , et al. Sep | 2020-09-08 |
Method for manufacturing silicon carbide epitaxial substrate, method for manufacturing silicon carbide semiconductor device, and apparatus for manufacturing silicon carbide epitaxial substrate Grant 10,697,086 - Wada , et al. | 2020-06-30 |
Epitaxial wafer and method for manufacturing same Grant 10,612,160 - Nishiguchi , et al. | 2020-04-07 |
Silicon Carbide Epitaxial Substrate And Method Of Manufacturing Silicon Carbide Semiconductor Device App 20200052074 - Wada; Keiji ;   et al. | 2020-02-13 |
Silicon Carbide Epitaxial Substrate And Method For Manufacturing Silicon Carbide Semiconductor Device App 20200013858 - ITOH; Hironori ;   et al. | 2020-01-09 |
Silicon carbide epitaxial substrate having a silicon carbide layer and method of manufacturing silicon carbide semiconductor device Grant 10,490,634 - Wada , et al. Nov | 2019-11-26 |
Silicon Carbide Epitaxial Substrate And Method For Manufacturing Silicon Carbide Semiconductor Device App 20190355820 - WADA; Keiji ;   et al. | 2019-11-21 |
Epitaxial wafer and method for manufacturing same Grant 10472736 - | 2019-11-12 |
Silicon carbide epitaxial substrate and method for manufacturing silicon carbide semiconductor device Grant 10,396,163 - Wada , et al. A | 2019-08-27 |
Silicon Carbide Epitaxial Substrate And Method For Manufacturing Silicon Carbide Semiconductor Device App 20190019868 - Wada; Keiji ;   et al. | 2019-01-17 |
Silicon Carbide Epitaxial Substrate And Method For Manufacturing Silicon Carbide Semiconductor Device App 20190013198 - Itoh; Hironori ;   et al. | 2019-01-10 |
Silicon carbide epitaxial substrate and method of manufacturing silicon carbide semiconductor device Grant 10,121,865 - Hori , et al. November 6, 2 | 2018-11-06 |
Silicon Carbide Epitaxial Substrate And Method Of Manufacturing Silicon Carbide Semiconductor Device App 20180277635 - Wada; Keiji ;   et al. | 2018-09-27 |
Silicon Carbide Epitaxial Substrate And Method Of Manufacturing Silicon Carbide Semiconductor Device App 20180245238 - Hori; Tsutomu ;   et al. | 2018-08-30 |
Method For Manufacturing Silicon Carbide Epitaxial Substrate, Method For Manufacturing Silicon Carbide Semiconductor Device, And Apparatus For Manufacturing Silicon Carbide Epitaxial Substrate App 20180237942 - Wada; Keiji ;   et al. | 2018-08-23 |
Silicon Carbide Epitaxial Substrate App 20180233562 - NISHIGUCHI; Taro ;   et al. | 2018-08-16 |
Epitaxial Wafer And Method For Manufacturing Same App 20180209064 - Nishiguchi; Taro ;   et al. | 2018-07-26 |
Epitaxial wafer and method for manufacturing same Grant 9,957,641 - Nishiguchi , et al. May 1, 2 | 2018-05-01 |
Silicon Carbide Epitaxial Substrate And Method Of Manufacturing Silicon Carbide Semiconductor Device App 20170288025 - Hori; Tsutomu ;   et al. | 2017-10-05 |
Epitaxial Wafer And Method For Manufacturing Same App 20160326668 - Nishiguchi; Taro ;   et al. | 2016-11-10 |
Silicon Melt Contact Member, Process For Production Thereof, And Process For Production Of Crystalline Silicon App 20130298822 - Komatsu; Ryuichi ;   et al. | 2013-11-14 |
Process for producing nanoparticle or nanostructure with use of nanoporous material Grant 7,732,015 - Nomura , et al. June 8, 2 | 2010-06-08 |
Process For Producing Nanoparticle Or Nanostructure With Use Of Nanoporous Material App 20080085364 - Nomura; Shintaro ;   et al. | 2008-04-10 |
Portable electronic apparatus having the heat radiation device for circuit module Grant 5,731,952 - Ohgami , et al. March 24, 1 | 1998-03-24 |