Itoh; Hirohito
Patent Applications and Registrations
Patent applications and USPTO patent grants for Itoh; Hirohito.The latest application filed is for "stage device for an exposure apparatus and semiconductor device manufacturing method wich uses said stage device".
- Itoh; Hirohito - Machida JP
- Itoh, Hirohito - Tokyo JP
- Itoh; Hirohito - Akishima JP
| Patent | Date |
|---|---|
| Stage device for an exposure apparatus and semiconductor device manufacturing method which uses said stage device Grant 6,504,160 - Itoh , et al. January 7, 2 | 2003-01-07 |
| Stage device for an exposure apparatus and semiconductor device manufacturing method wich uses said stage device App 20010045526 - Itoh, Hirohito ; et al. | 2001-11-29 |
| Stage device for an exposure apparatus and semiconductor device manufacturing method which uses said stage device Grant 6,072,183 - Itoh , et al. June 6, 2 | 2000-06-06 |
| Stage device for an exposure apparatus and semiconductor device manufacturing method which uses said stage device Grant 5,260,580 - Itoh , et al. November 9, 1 | 1993-11-09 |
| Accelerometer Grant 4,854,169 - Sakuma , et al. August 8, 1 | 1989-08-08 |
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