Ito; Natsuko

Patent Applications and Registrations

Patent applications and USPTO patent grants for Ito; Natsuko.The latest application filed is for "particle-removing apparatus for a semiconductor device manufacturing apparatus and method of removing particles".

Company Profile

0.10.9

Ito; Natsuko - Tokyo JP
Ito; Natsuko - Kawasaki JP
Ito; Natsuko - Kanagawa JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Method of manufacturing semiconductor devices and semiconductor manufacturing apparatus Grant 8,202,394 - Moriya , et al. June 19, 2	2012-06-19
Object-processing apparatus controlling production of particles in electric field or magnetic field Grant 8,051,799 - Itagaki , et al. November 8, 2	2011-11-08
Plasma processing apparatus and method of suppressing abnormal discharge therein Grant 7,974,067 - Ito , et al. July 5, 2	2011-07-05
Particle-removing apparatus for a semiconductor device manufacturing apparatus and method of removing particles App 20080233756 - Ito; Natsuko ; et al.	2008-09-25
Object-processing Apparatus Controlling Production Of Particles In Electric Field Or Magnetic Field App 20080041306 - ITAGAKI; Yousuke ; et al.	2008-02-21
Plasma processing apparatus and method of suppressing abnormal discharge therein App 20070058322 - Ito; Natsuko ; et al.	2007-03-15
Particle-removing apparatus for a semiconductor device manufacturing apparatus and method of removing particles App 20060131272 - Ito; Natsuko ; et al.	2006-06-22
Particle-removing method for a semiconductor device manufacturing apparatus Grant 7,045,465 - Ito , et al. May 16, 2	2006-05-16
Apparatus for monitoring particles and method of doing the same Grant 7,006,682 - Moriya , et al. February 28, 2	2006-02-28
Apparatus and method for detecting an end point of a cleaning process Grant 6,737,666 - Ito , et al. May 18, 2	2004-05-18
Method of manufacturing semiconductor devices and semiconductor manufacturing apparatus App 20030003758 - Moriya, Tsuyoshi ; et al.	2003-01-02
Semiconductor fabrication device and method for preventing the attachment of extraneous particles App 20020036343 - Moriya, Tsuyoshi ; et al.	2002-03-28
Semiconductor device manufacturing apparatus and method for manufacturing a semiconductor device App 20020037652 - Moriya, Tsuyoshi ; et al.	2002-03-28
Particle-removing apparatus for a semiconductor device manufacturing apparatus and method of removing particles App 20020019141 - Ito, Natsuko ; et al.	2002-02-14
Method And Apparatus For Plasma Etching App 20010041449 - ITO, NATSUKO ; et al.	2001-11-15
Particle-removing apparatus for a semiconductor device manufacturing apparatus and method of removing particles Grant 6,184,489 - Ito , et al. February 6, 2	2001-02-06
System and method for detecting particles produced in a process chamber by scattering light Grant 6,115,120 - Moriya , et al. September 5, 2	2000-09-05
Particle monitor and particle-free recessing system with particle monitor Grant 5,870,189 - Uesugi , et al. February 9, 1	1999-02-09
Capacitance type acceleration sensor Grant 5,747,991 - Ito , et al. May 5, 1	1998-05-05

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