loadpatents
Patent applications and USPTO patent grants for Ito; Kiyohito.The latest application filed is for "treatment method".
Patent | Date |
---|---|
Processing method and substrate processing apparatus Grant 11,380,545 - Yoshimura , et al. July 5, 2 | 2022-07-05 |
Treatment Method App 20210313187 - ITO; Kiyohito ;   et al. | 2021-10-07 |
Etching method Grant 10,950,458 - Hama , et al. March 16, 2 | 2021-03-16 |
Substrate processing method and substrate processing apparatus Grant 10,886,138 - Yang , et al. January 5, 2 | 2021-01-05 |
Processing Method And Substrate Processing Apparatus App 20200144051 - YOSHIMURA; Shota ;   et al. | 2020-05-07 |
Substrate Processing Method And Substrate Processing Apparatus App 20190355588 - Yang; Timothy Tianshyun ;   et al. | 2019-11-21 |
Etching Method App 20190214269 - Hama; Yasutaka ;   et al. | 2019-07-11 |
Partial etch memorization via flash addition Grant 9,576,812 - Franke , et al. February 21, 2 | 2017-02-21 |
Partial Etch Memorization Via Flash Addition App 20160293435 - Franke; Elliott ;   et al. | 2016-10-06 |
Material processing to achieve sub-10nm patterning Grant 9,443,731 - O'Meara , et al. September 13, 2 | 2016-09-13 |
Material Processing To Achieve Sub-10nm Patterning App 20160247680 - O'Meara; David L. ;   et al. | 2016-08-25 |
Mitigation of asymmetrical profile in self aligned patterning etch Grant 9,257,280 - Ko , et al. February 9, 2 | 2016-02-09 |
Mitigation Of Asymmetrical Profile In Self Aligned Patterning Etch App 20140357084 - KO; Akiteru ;   et al. | 2014-12-04 |
Plasma Etching Method And Plasma Etching Apparatus App 20140284308 - MATSUYAMA; Shoichiro ;   et al. | 2014-09-25 |
Substrate processing method Grant 8,232,207 - Ogasawara , et al. July 31, 2 | 2012-07-31 |
Substrate Processing Method App 20100167549 - OGASAWARA; Kosuke ;   et al. | 2010-07-01 |
Plasma processing method App 20040222190 - Horiguchi, Katsumi ;   et al. | 2004-11-11 |
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