Patent | Date |
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Chemical mechanical polishing apparatus for polishing workpiece Grant 11,446,784 - Ishii , et al. September 20, 2 | 2022-09-20 |
Treatment device, plating apparatus including the same, conveying device, and treatment method Grant 11,396,714 - Ito , et al. July 26, 2 | 2022-07-26 |
Substrate processing apparatus and substrate processing method Grant 11,192,147 - Ishii , et al. December 7, 2 | 2021-12-07 |
Laminated Film App 20210138769 - SATO; Shino ;   et al. | 2021-05-13 |
Method and apparatus for polishing a substrate, and method for processing a substrate Grant 10,926,376 - Nakanishi , et al. February 23, 2 | 2021-02-23 |
Polishing method, polishing apparatus, and substrate processing system Grant 10,854,473 - Ishii , et al. December 1, 2 | 2020-12-01 |
Substrate processing apparatus and substrate processing method Grant 10,799,917 - Ishii , et al. October 13, 2 | 2020-10-13 |
Surface-modified Film For Automotive Interior/exterior Components App 20200298540 - SATO; Shino ;   et al. | 2020-09-24 |
Sealant for liquid crystal sealing, and liquid crystal display device Grant 10,739,647 - Mizusaki , et al. A | 2020-08-11 |
Laminated film Grant 10,696,865 - Ito , et al. June 30, 2 | 2020-06-30 |
Coating Agent, Coating Film, Laminate And Surface-protected Article App 20200095380 - KONDO; KYOKO ;   et al. | 2020-03-26 |
Coating agent, coating film, laminate and surface-protected article Grant 10,513,586 - Kondo , et al. Dec | 2019-12-24 |
Treatment Device, Plating Apparatus Including The Same, Conveying Device, And Treatment Method App 20190376203 - ITO; Kenya ;   et al. | 2019-12-12 |
Transfer film for in-mold molding, method for producing in-mold molded product, and molded product Grant 10,449,705 - Ito , et al. Oc | 2019-10-22 |
Substrate processing method and substrate processing apparatus Grant 10,403,505 - Ito , et al. Sep | 2019-09-03 |
Substrate Processing Apparatus And Substrate Processing Method App 20190262870 - Ishii; Yu ;   et al. | 2019-08-29 |
Chemical Mechanical Polishing Apparatus For Polishing Workpiece App 20190262968 - ISHII; Yu ;   et al. | 2019-08-29 |
Substrate Processing Apparatus And Substrate Processing Method App 20190262869 - Ishii; Yu ;   et al. | 2019-08-29 |
Substrate processing apparatus and substrate processing method Grant 10,328,465 - Ishii , et al. | 2019-06-25 |
Pad holder for polishing apparatus Grant D845,568 - Ishii , et al. | 2019-04-09 |
Method And Apparatus For Polishing A Substrate, And Method For Processing A Substrate App 20190054594 - NAKANISHI; Masayuki ;   et al. | 2019-02-21 |
Sealant For Liquid Crystal Sealing, And Liquid Crystal Display Device App 20180371302 - MIZUSAKI; MASANOBU ;   et al. | 2018-12-27 |
Polishing apparatus and polishing method Grant 10,155,294 - Seki , et al. Dec | 2018-12-18 |
Substrate peripheral portion measuring device, and substrate peripheral portion polishing apparatus Grant 10,134,614 - Tada , et al. November 20, 2 | 2018-11-20 |
Polishing Method, Polishing Apparatus, And Substrate Processing System App 20180254196 - ISHII; Yu ;   et al. | 2018-09-06 |
Silver powder and method for producing same Grant 10,022,799 - Okabe , et al. July 17, 2 | 2018-07-17 |
Abrasive film fabrication method and abrasive film Grant 10,016,875 - Ishii , et al. July 10, 2 | 2018-07-10 |
Polishing Apparatus And Polishing Method App 20180169822 - Seki; Masaya ;   et al. | 2018-06-21 |
Laminated Film App 20180094164 - ITO; Kenya ;   et al. | 2018-04-05 |
Coating Agent, Coating Film, Laminate And Surface-protected Article App 20180086882 - KONDO; Kyoko ;   et al. | 2018-03-29 |
Substrate Processing Method And Substrate Processing Apparatus App 20180076043 - ITO; Kenya ;   et al. | 2018-03-15 |
Polishing apparatus and polishing method Grant 9,914,196 - Seki , et al. March 13, 2 | 2018-03-13 |
Polishing pad and chemical mechanical polishing apparatus for polishing a workpiece, and method of polishing a workpiece using the chemical mechanical polishing apparatus Grant 9,821,429 - Ishii , et al. November 21, 2 | 2017-11-21 |
Method of polishing back surface of substrate and substrate processing apparatus Grant 9,808,903 - Ishii , et al. November 7, 2 | 2017-11-07 |
Substrate processing apparatus Grant 9,808,836 - Togawa , et al. November 7, 2 | 2017-11-07 |
Chemical Mechanical Polishing Apparatus For Polishing Workpiece App 20170312880 - ISHII; Yu ;   et al. | 2017-11-02 |
Weather-resistant multilayer film Grant 9,751,286 - Yoda , et al. September 5, 2 | 2017-09-05 |
Tape sticking apparatus and tape sticking method Grant 9,738,483 - Ito , et al. August 22, 2 | 2017-08-22 |
Substrate processing apparatus Grant 9,566,616 - Togawa , et al. February 14, 2 | 2017-02-14 |
Work holder for polishing apparatus Grant D777,546 - Ishii , et al. January 31, 2 | 2017-01-31 |
Polishing method Grant 9,492,910 - Ishii , et al. November 15, 2 | 2016-11-15 |
Abrasive Film Fabrication Method And Abrasive Film App 20160318155 - ISHII; Yu ;   et al. | 2016-11-03 |
Abrasive film fabrication method and abrasive film Grant 9,393,595 - Ishii , et al. July 19, 2 | 2016-07-19 |
Transfer film for in-mold molding and method for producing same Grant 9,375,867 - Ito , et al. June 28, 2 | 2016-06-28 |
Substrate Processing Apparatus App 20160172221 - TAKAHASHI; Tamami ;   et al. | 2016-06-16 |
Substrate processing apparatus Grant 9,287,158 - Takahashi , et al. March 15, 2 | 2016-03-15 |
Polishing Method App 20160052107 - ISHII; Yu ;   et al. | 2016-02-25 |
Transfer Film For In-mold Molding, Method For Producing In-mold Molded Body, And Molded Body App 20160046052 - ITO; KENYA ;   et al. | 2016-02-18 |
Substrate processing apparatus and substrate processing method Grant 9,248,545 - Seki , et al. February 2, 2 | 2016-02-02 |
Tape Sticking Apparatus And Tape Sticking Method App 20160023861 - ITO; Kenya ;   et al. | 2016-01-28 |
Polishing apparatus, polishing method and pressing member for pressing a polishing tool Grant 9,199,352 - Seki , et al. December 1, 2 | 2015-12-01 |
Polishing Apparatus And Polishing Method App 20150258653 - Seki; Masaya ;   et al. | 2015-09-17 |
Substrate Processing Apparatus And Substrate Processing Method App 20150104999 - SEKI; Masaya ;   et al. | 2015-04-16 |
Substrate Peripheral Portion Measuring Device, And Substrate Peripheral Portion Polishing Apparatus App 20150101752 - TADA; Mitsuo ;   et al. | 2015-04-16 |
Silver Powder And Method For Producing Same App 20150017465 - Okabe; Yoshihiro ;   et al. | 2015-01-15 |
Display apparatus, multi-display system, and method for manufacturing display apparatus Grant 8,926,161 - Moriwaki , et al. January 6, 2 | 2015-01-06 |
Substrate Processing Apparatus App 20150000055 - TOGAWA; Tetsuji ;   et al. | 2015-01-01 |
Substrate Processing Apparatus App 20150000056 - TOGAWA; Tetsuji ;   et al. | 2015-01-01 |
Curable resin composition and optical film Grant 8,840,992 - Iizuka , et al. September 23, 2 | 2014-09-23 |
Display Device And Multi-display Device App 20140233261 - Moriwaki; Hiroyuki ;   et al. | 2014-08-21 |
Method Of Polishing Back Surface Of Substrate And Substrate Processing Apparatus App 20140220866 - ISHII; Yu ;   et al. | 2014-08-07 |
Method for manufacturing semiconductor device Grant 8,748,289 - Nakanishi , et al. June 10, 2 | 2014-06-10 |
Weather-resistant Multilayer Film App 20140141223 - Yoda; Akiko ;   et al. | 2014-05-22 |
Transfer Film For In-mold Molding And Method For Producing Same App 20140113115 - Ito; Kenya ;   et al. | 2014-04-24 |
Display Apparatus, Multi-display System, And Method For Manufacturing Display Apparatus App 20140078778 - Moriwaki; Hiroyuki ;   et al. | 2014-03-20 |
Polishing apparatus and polishing method Grant 8,641,480 - Nakanishi , et al. February 4, 2 | 2014-02-04 |
Abrasive Film Fabrication Method And Abrasive Film App 20140030962 - ISHII; Yu ;   et al. | 2014-01-30 |
Polishing Pad And Chemical Mechanical Polishing Apparatus For Polishing A Workpiece, And Method Of Polishing A Workpiece Using The Chemical Mechanical Polishing Apparatus App 20140004772 - ISHII; Yu ;   et al. | 2014-01-02 |
Method For Manufacturing Semiconductor Device App 20130237033 - NAKANISHI; Masayuki ;   et al. | 2013-09-12 |
Substrate Processing Apparatus And Substrate Processing Method App 20130213437 - Ishii; Yu ;   et al. | 2013-08-22 |
Polishing apparatus and polishing method Grant 8,506,362 - Fukushima , et al. August 13, 2 | 2013-08-13 |
Polymer and surface-treating agent containing the polymer Grant 8,445,613 - Ito , et al. May 21, 2 | 2013-05-21 |
Method for manufacturing semiconductor device Grant 8,445,360 - Nakanishi , et al. May 21, 2 | 2013-05-21 |
Polishing apparatus Grant 8,393,935 - Kimura , et al. March 12, 2 | 2013-03-12 |
Polishing apparatus, polishing method, and processing apparatus Grant 8,047,896 - Takahashi , et al. November 1, 2 | 2011-11-01 |
Control method for magnetic disk device, magnetic disk device, and magnetic disk Grant 8,049,986 - Ito , et al. November 1, 2 | 2011-11-01 |
Polishing Method App 20110256811 - NAKANISHI; Masayuki ;   et al. | 2011-10-20 |
Device for polishing peripheral edge of semiconductor wafer Grant 8,029,333 - Takahashi , et al. October 4, 2 | 2011-10-04 |
Polishing Apparatus, Polishing Method And Pressing Member For Pressing A Polishing Tool App 20110237164 - SEKI; Masaya ;   et al. | 2011-09-29 |
Polishing Apparatus And Polishing Method App 20110217906 - NAKANISHI; Masayuki ;   et al. | 2011-09-08 |
Method For Manufacturing Semiconductor Device App 20110207294 - NAKANISHI; Masayuki ;   et al. | 2011-08-25 |
Curable Resin Composition And Optical Film App 20110189470 - Iizuka; Hiroyuki ;   et al. | 2011-08-04 |
Fluorine-containing polymer and resin composition Grant 7,989,560 - Oikawa , et al. August 2, 2 | 2011-08-02 |
Polishing apparatus and polishing method Grant 7,976,361 - Takahashi , et al. July 12, 2 | 2011-07-12 |
Polishing Apparatus App 20110165825 - Kimura; Norio ;   et al. | 2011-07-07 |
Polymer obtained by addition-polymerization initiated by a silicon compound Grant 7,964,692 - Yamahiro , et al. June 21, 2 | 2011-06-21 |
Fluorine-containing polymer and resin composition Grant 7,868,112 - Oikawa , et al. January 11, 2 | 2011-01-11 |
Polishing Apparatus App 20110003540 - Takahashi; Tamami ;   et al. | 2011-01-06 |
Silicon compounds Grant 7,863,396 - Yamahiro , et al. January 4, 2 | 2011-01-04 |
Polishing apparatus and substrate processing apparatus Grant 7,862,402 - Hongo , et al. January 4, 2 | 2011-01-04 |
Substrate Processing Method And Substrate Processing Apparatus App 20100255757 - SHIGETA; Atsushi ;   et al. | 2010-10-07 |
Substrate processing method and substrate processing apparatus Grant 7,767,472 - Shigeta , et al. August 3, 2 | 2010-08-03 |
Polishing Apparatus And Polishing Method App 20100178851 - NAKANISHI; Masayuki ;   et al. | 2010-07-15 |
Polishing apparatus and polishing method Grant 7,744,445 - Kubota , et al. June 29, 2 | 2010-06-29 |
Polishing Apparatus And Substrate Processing Apparatus App 20100136886 - Hongo; Akihisa ;   et al. | 2010-06-03 |
Polymer and Surface-Treating Agent Containing the Polymer App 20100137540 - Ito; Kenya ;   et al. | 2010-06-03 |
Fluorine-containing Polymer And Resin Composition App 20100093951 - Oikawa; Hisao ;   et al. | 2010-04-15 |
Control Method for Magnetic Disk Device, Magnetic Disk Device, and Magnetic Disk App 20100085657 - Ito; Kenya ;   et al. | 2010-04-08 |
Polishing apparatus and substrate processing apparatus Grant 7,682,225 - Hongo , et al. March 23, 2 | 2010-03-23 |
Fluorine-containing Polymer And Resin Composition App 20100063222 - Oikawa; Hisao ;   et al. | 2010-03-11 |
Production process for a silicon compound Grant 7,662,985 - Yamahiro , et al. February 16, 2 | 2010-02-16 |
Polishing Apparatus, Polishing Method, And Processing Apparatus App 20090325465 - Takahashi; Tamami ;   et al. | 2009-12-31 |
Substrate processing apparatus, substrate processing method, and substrate holding apparatus Grant 7,578,886 - Yamada , et al. August 25, 2 | 2009-08-25 |
Silicon compound and a production process for silicon compound Grant 7,563,917 - Yamahiro , et al. July 21, 2 | 2009-07-21 |
Production process for a silicon compound App 20090143606 - Yamahiro; Mikio ;   et al. | 2009-06-04 |
Polymer obtained by addition-polymerization initiated by a silicon compound App 20090137765 - Yamahiro; Mikio ;   et al. | 2009-05-28 |
Polishing apparatus and substrate processing apparatus App 20090117828 - Hongo; Akihisa ;   et al. | 2009-05-07 |
Substrate processing apparatus and substrate processing method App 20090090397 - Saito; Takayuki ;   et al. | 2009-04-09 |
Device For And Method Of Polishing Peripheral Edge Of Semiconductor Wafer App 20090093192 - Takahashi; Tamami ;   et al. | 2009-04-09 |
Varnish for forming liquid crystal alignment layer and liquid crystal display element using the same Grant 7,507,450 - Hattori , et al. March 24, 2 | 2009-03-24 |
Substrate Processing Apparatus App 20090017733 - Takahashi; Tamami ;   et al. | 2009-01-15 |
Polishing apparatus and polishing method App 20090017730 - Kubota; Takeo ;   et al. | 2009-01-15 |
Substrate processing apparatus and substrate processing method Grant 7,476,290 - Saito , et al. January 13, 2 | 2009-01-13 |
Polishing apparatus and polishing method App 20090004952 - Takahashi; Tamami ;   et al. | 2009-01-01 |
Substrate Peripheral Portion Measuring Device, and Substrate Peripheral Portion Polishing Apparatus App 20080274670 - Tada; Mitsuo ;   et al. | 2008-11-06 |
Substrate Processing Apparatus App 20080200100 - Takahashi; Tamami ;   et al. | 2008-08-21 |
Silicon compound Grant 7,399,819 - Yamahiro , et al. July 15, 2 | 2008-07-15 |
Optical waveguide using polymer composed of silsesquioxane derivative Grant 7,373,060 - Satake , et al. May 13, 2 | 2008-05-13 |
Apparatus for cleaning a substrate having metal interconnects App 20080017220 - Kodera; Masako ;   et al. | 2008-01-24 |
Substrate processing method and substrate processing apparatus App 20070287364 - Shigeta; Atsushi ;   et al. | 2007-12-13 |
Silsesquioxane derivative Grant 7,235,619 - Morimoto , et al. June 26, 2 | 2007-06-26 |
Silicon compound and a production process for silicon compound App 20070004932 - Yamahiro; Mikio ;   et al. | 2007-01-04 |
Silicon compounds App 20060287454 - Yamahiro; Mikio ;   et al. | 2006-12-21 |
Silicon compound and a production process for silicon compound Grant 7,129,370 - Yamahiro , et al. October 31, 2 | 2006-10-31 |
Substrate processing apparatus, substrate processing method, and substrate holding apparatus App 20060234503 - Yamada; Kaoru ;   et al. | 2006-10-19 |
Optical waveguide using polymer composed of silsesquioxane derivative App 20060204192 - Satake; Hideshi ;   et al. | 2006-09-14 |
Varnish for forming liquid crystal alignment layer and liquid crystal display element using the same App 20060204680 - Hattori; Takayuki ;   et al. | 2006-09-14 |
Organosilicon compound and polymer having a cage-type silicon skeleton App 20060194068 - Katoh; Takashi ;   et al. | 2006-08-31 |
Holding unit, processing apparatus and holding method of substrates Grant 7,055,535 - Kunisawa , et al. June 6, 2 | 2006-06-06 |
Silsesquioxane derivative having functional group Grant 7,053,167 - Ito , et al. May 30, 2 | 2006-05-30 |
Silsesquioxane derivative having functional group App 20060089504 - Ito; Kenya ;   et al. | 2006-04-27 |
Substrate processing method and substrate processing apparatus App 20060019417 - Shigeta; Atsushi ;   et al. | 2006-01-26 |
Substrate processing apparatus App 20050242064 - Saito, Takayuki ;   et al. | 2005-11-03 |
Silsesquioxane derivative App 20050215807 - Morimoto, Yoshitaka ;   et al. | 2005-09-29 |
Substrate processing apparatus Grant 6,932,884 - Saito , et al. August 23, 2 | 2005-08-23 |
Substrate processing apparatus and substrate processing method App 20050092351 - Saito, Takayuki ;   et al. | 2005-05-05 |
Production process for silicon compound and the same App 20050033077 - Yamahiro, Mikio ;   et al. | 2005-02-10 |
Substrate processing apparatus and substrate processing method App 20040226654 - Hongo, Akihisa ;   et al. | 2004-11-18 |
Substrate processing apparatus App 20040216841 - Ito, Kenya ;   et al. | 2004-11-04 |
Apparatus for cleaning a substrate having metal interconnects App 20040177655 - Kodera, Masako ;   et al. | 2004-09-16 |
Production process for silsesquioxane derivative having functional group and silsesquioxane derivative App 20040068074 - Yoshida, Kazuhiro ;   et al. | 2004-04-08 |
Magnetic recording medium and magnetic recording apparatus using the same Grant 6,716,516 - Futamoto , et al. April 6, 2 | 2004-04-06 |
Production process for silsesquioxane derivative and silsesquioxane derivative App 20040030084 - Morimoto, Yoshitaka ;   et al. | 2004-02-12 |
Holding unit, processing apparatus and holding method of substrates App 20040016452 - Kunisawa, Junji ;   et al. | 2004-01-29 |
Storage device for reliably maintaining data in a reproducible state for a long period of time Grant 6,683,738 - Ito January 27, 2 | 2004-01-27 |
Cleaning method and cleaner Grant 6,679,950 - Tomita , et al. January 20, 2 | 2004-01-20 |
Storage device for reliably maintaining data in a reproducible state for a long period of time App 20030156341 - Ito, Kenya | 2003-08-21 |
Magnetic recording medium and magnetic recording apparatus using the same Grant 6,607,849 - Futamoto , et al. August 19, 2 | 2003-08-19 |
Substrate holder and substrate transfer apparatus using the same Grant 6,578,891 - Suzuki , et al. June 17, 2 | 2003-06-17 |
Substrate processing apparatus App 20030041968 - Saito, Takayuki ;   et al. | 2003-03-06 |
Magnetic recording medium and magnetic recording apparatus using the same App 20030022025 - Futamoto, Masaaki ;   et al. | 2003-01-30 |
Storage device for reliably maintaining data in a reproducible state for a long period of time App 20020181132 - Ito, Kenya | 2002-12-05 |
Magnetic recording medium and magnetic recording apparatus using the same App 20020160233 - Futamoto, Masaaki ;   et al. | 2002-10-31 |
Magnetic recording medium and magnetic recording apparatus using the same Grant 6,447,936 - Futamoto , et al. September 10, 2 | 2002-09-10 |
Magnetic recording medium and magnetic recording apparatus using the same App 20020080520 - Futamoto, Masaaki ;   et al. | 2002-06-27 |
Magnetic recording medium and magnetic recording apparatus using the same App 20020055020 - Futamoto, Masaaki ;   et al. | 2002-05-09 |
Storage device for reliably maintaining data in a reproducible state for a long period of time App 20020030914 - Ito, Kenya | 2002-03-14 |
Cleaning method and cleaner App 20020005214 - Tomita, Hiroshi ;   et al. | 2002-01-17 |
Cleaning apparatus Grant 6,308,361 - Matsuda , et al. October 30, 2 | 2001-10-30 |
Magnetic Recording Medium And Magnetic Recording Apparatus Using The Same App 20010009730 - FUTAMOTO, MASAAKI ;   et al. | 2001-07-26 |
Storage device for reliably maintaining data in a reproducible state for a long period of time Grant 6,243,221 - Ito June 5, 2 | 2001-06-05 |
Perpendicular magnetic recording medium and magnetic storage apparatus using the same Grant 6,183,893 - Futamoto , et al. February 6, 2 | 2001-02-06 |
Cleaning apparatus and cleaning member rinsing apparatus Grant 6,141,812 - Matsuda , et al. November 7, 2 | 2000-11-07 |
Storage device for reliably maintaining data in a reproducible state for a long period of time Grant 6,084,729 - Ito July 4, 2 | 2000-07-04 |
Polishing apparatus Grant 6,036,582 - Aizawa , et al. March 14, 2 | 2000-03-14 |
Storage device for reliably maintaining data in a reproducible state for a long period of time Grant 5,923,485 - Ito July 13, 1 | 1999-07-13 |