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Imprint Apparatus, Imprint Method, And Article Manufacturing Method App 20160257060 - Ito; Hirohito ;   et al. | 2016-09-08 |
Command Data Generation Method, Positioning Apparatus, Lithography Apparatus, And Article Manufacturing Method App 20150378342 - Ito; Hirohito | 2015-12-31 |
Lithography Apparatus, And Method Of Manufacturing An Article App 20150303025 - Ito; Hirohito | 2015-10-22 |
Charged-particle beam exposure apparatus and method of manufacturing article Grant 8,981,321 - Ito March 17, 2 | 2015-03-17 |
Scanning apparatus, drawing apparatus, and method of manufacturing article Grant 8,829,461 - Ito , et al. September 9, 2 | 2014-09-09 |
Drawing Apparatus, And Method Of Manufacturing Article App 20140162191 - Ito; Hirohito | 2014-06-12 |
Charged-particle Beam Exposure Apparatus And Method Of Manufacturing Article App 20140070112 - ITO; Hirohito | 2014-03-13 |
Positioning apparatus, exposure apparatus, and device manufacturing method Grant 8,625,077 - Ito January 7, 2 | 2014-01-07 |
Charged-particle beam exposure apparatus and method of manufacturing article Grant 8,618,516 - Ito December 31, 2 | 2013-12-31 |
Imprint apparatus and method for producing article Grant 8,562,323 - Ito , et al. October 22, 2 | 2013-10-22 |
Scanning Apparatus, Drawing Apparatus, And Method Of Manufacturing Article App 20130137044 - Ito; Hirohito ;   et al. | 2013-05-30 |
Charged-particle Beam Exposure Apparatus And Method Of Manufacturing Article App 20120126136 - Ito; Hirohito | 2012-05-24 |
Positioning Apparatus, Exposure Apparatus, And Device Manufacturing Method App 20110164230 - Ito; Hirohito | 2011-07-07 |
Imprint Apparatus And Method For Producing Article App 20110159189 - Ito; Hirohito ;   et al. | 2011-06-30 |
Optical unit and exposure apparatus having the same Grant 7,771,065 - Sai , et al. August 10, 2 | 2010-08-10 |
Alignment apparatus Grant 7,738,232 - Ito June 15, 2 | 2010-06-15 |
Optical element driving apparatus Grant 7,710,626 - Ito May 4, 2 | 2010-05-04 |
Positioning Apparatus, Positioning Method, Exposure Apparatus, Device Manufacturing Method, And Methods Of Manufacturing Positioning Apparatus And Exposure Apparatus App 20090310145 - Sugiyama; Yusuke ;   et al. | 2009-12-17 |
Spark plug Grant 7,615,915 - Ito , et al. November 10, 2 | 2009-11-10 |
Fluid control mechanism Grant 7,530,795 - Ito May 12, 2 | 2009-05-12 |
Driving Apparatus And Exposure Apparatus Using The Same And Device Manufacturing Method App 20090033901 - Ito; Hirohito | 2009-02-05 |
Reflecting mirror and exposure apparatus using the same Grant 7,453,623 - Uchida , et al. November 18, 2 | 2008-11-18 |
Optical micromotor, micropump using same and microvalve using same Grant 7,444,817 - Ito November 4, 2 | 2008-11-04 |
Optical element holding apparatus, exposure apparatus and device manufacturing method Grant 7,443,619 - Sakino , et al. October 28, 2 | 2008-10-28 |
Spark plug Grant 7,352,121 - Ito , et al. April 1, 2 | 2008-04-01 |
Spark plug App 20070277764 - Ito; Hirohito ;   et al. | 2007-12-06 |
Optical Element Driving Apparatus App 20070280609 - Ito; Hirohito | 2007-12-06 |
Optical Element Holding Apparatus, Exposure Apparatus And Device Manufacturing Method App 20070076310 - Sakino; Shigeo ;   et al. | 2007-04-05 |
Reflecting mirror and exposure apparatus using the same App 20060245035 - Uchida; Shinji ;   et al. | 2006-11-02 |
Optical unit and exposure apparatus having the same App 20060232866 - Sai; Choshoku ;   et al. | 2006-10-19 |
Spark plug App 20050093416 - Ito, Hirohito ;   et al. | 2005-05-05 |
Alignment apparatus App 20050017831 - Ito, Hirohito | 2005-01-27 |
Fluid control mechanism App 20040257668 - Ito, Hirohito | 2004-12-23 |
Optical micromotor, micropump using same and microvalve using same App 20040251770 - Ito, Hirohito | 2004-12-16 |
Method for manufacturing spark plug and caulking metallic mold Grant 6,688,932 - Nasu , et al. February 10, 2 | 2004-02-10 |
Method for manufactoring spark plug and caulking metallic mold App 20020193033 - Nasu, Hiroaki ;   et al. | 2002-12-19 |
Positioning device, exposure device, and device manufacturing method Grant 6,359,679 - Ito , et al. March 19, 2 | 2002-03-19 |
Spark plug, insulator for spark plug and process for fabricating the insulator Grant 6,265,816 - Ito , et al. July 24, 2 | 2001-07-24 |
Insulator for spark plug and spark plug comprising same App 20010004184 - Ito, Hirohito ;   et al. | 2001-06-21 |
Positioning apparatus and exposure apparatus using the same Grant 6,028,376 - Osanai , et al. February 22, 2 | 2000-02-22 |
Stage feeding device Grant 5,939,852 - Akutsu , et al. August 17, 1 | 1999-08-17 |
Accelerometer Grant 4,658,647 - Shintani , et al. April 21, 1 | 1987-04-21 |