Ito; Etsuji
Patent Applications and Registrations
Patent applications and USPTO patent grants for Ito; Etsuji.The latest application filed is for "plasma processing apparatus".
- Ito; Etsuji - Miyagi JP
- Ito; Etsuji - Kurokawa-gun JP
- Ito; Etsuji - Nirasaki JP
- Ito, Etsuji - Nirasaki-shi JP
| Patent | Date |
|---|---|
| Power feed member and substrate processing apparatus Grant 10,943,766 - Ito , et al. March 9, 2 | 2021-03-09 |
| Plasma processing apparatus Grant 10,763,087 - Takahashi , et al. Sep | 2020-09-01 |
| Semiconductor manufacturing device and processing method Grant 10,699,935 - Himori , et al. | 2020-06-30 |
| Substrate processing method Grant 10,651,012 - Yokota , et al. | 2020-05-12 |
| Plasma Processing Apparatus App 20190096639 - TAKAHASHI; Shuichi ; et al. | 2019-03-28 |
| Power Feed Member And Substrate Processing Apparatus App 20180374679 - Ito; Shunichi ; et al. | 2018-12-27 |
| Transfer apparatus and plasma processing system Grant 10,147,633 - Himori , et al. De | 2018-12-04 |
| Plasma etching method Grant 9,978,566 - Yokota , et al. May 22, 2 | 2018-05-22 |
| Semiconductor Manufacturing Device And Processing Method App 20180114717 - HIMORI; Shinji ; et al. | 2018-04-26 |
| Semiconductor manufacturing device and processing method Grant 9,859,146 - Himori , et al. January 2, 2 | 2018-01-02 |
| Substrate Processing Method App 20170162367 - YOKOTA; Akihiro ; et al. | 2017-06-08 |
| Plasma Etching Method App 20170103877 - YOKOTA; Akihiro ; et al. | 2017-04-13 |
| Substrate processing apparatus Grant 9,390,943 - Nagaseki , et al. July 12, 2 | 2016-07-12 |
| Etching Method Of Multilayer Film App 20150072534 - Himori; Shinji ; et al. | 2015-03-12 |
| Substrate Processing Apparatus App 20140346040 - Yokota; Akihiro ; et al. | 2014-11-27 |
| Etching method of multilayer film Grant 8,895,454 - Himori , et al. November 25, 2 | 2014-11-25 |
| Semiconductor Manufacturing Device And Processing Method App 20140213055 - Himori; Shinji ; et al. | 2014-07-31 |
| Etching Method Of Multilayer Film App 20140206199 - Himori; Shinji ; et al. | 2014-07-24 |
| Substrate Processing Apparatus App 20130220547 - NAGASEKI; Kazuya ; et al. | 2013-08-29 |
| Transfer Apparatus And Plasma Processing System App 20130062016 - HIMORI; Shinji ; et al. | 2013-03-14 |
| Plasma processing apparatus Grant 7,368,876 - Hayami , et al. May 6, 2 | 2008-05-06 |
| Plasma processing apparatus App 20050011452 - Hayami, Toshihiro ; et al. | 2005-01-20 |
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