loadpatents
Patent applications and USPTO patent grants for Isomura; Ikunao.The latest application filed is for "pattern inspection apparatus and pattern inspection method".
Patent | Date |
---|---|
Reference image generation method and pattern inspection method Grant 11,443,419 - Yasui , et al. September 13, 2 | 2022-09-13 |
Inspection apparatus and method for detecting false defects Grant 10,578,560 - Akiyama , et al. | 2020-03-03 |
Pattern inspection apparatus and pattern inspection method Grant 10,290,094 - Isomura | 2019-05-14 |
Mask inspection apparatus, mask evaluation method and mask evaluation system Grant 10,026,011 - Tsuchiya , et al. July 17, 2 | 2018-07-17 |
Pattern Inspection Apparatus And Pattern Inspection Method App 20170352140 - ISOMURA; Ikunao | 2017-12-07 |
Measuring apparatus Grant 9,811,896 - Isomura , et al. November 7, 2 | 2017-11-07 |
Inspection method and inspection apparatus Grant 9,767,547 - Takeda , et al. September 19, 2 | 2017-09-19 |
Pattern inspection apparatus and pattern inspection method Grant 9,728,373 - Kikuiri , et al. August 8, 2 | 2017-08-08 |
Measuring apparatus that generates positional deviation distribution of a pattern on a target object Grant 9,659,361 - Isomura , et al. May 23, 2 | 2017-05-23 |
Mask inspection apparatus and mask inspection method Grant 9,626,755 - Tsuchiya , et al. April 18, 2 | 2017-04-18 |
Pattern inspection method and pattern inspection apparatus Grant 9,535,015 - Isomura January 3, 2 | 2017-01-03 |
Mask Inspection Apparatus And Mask Inspection Method App 20160042505 - TSUCHIYA; Hideo ;   et al. | 2016-02-11 |
Inspection system and method Grant 9,235,883 - Inoue , et al. January 12, 2 | 2016-01-12 |
Inspection method and inspection apparatus Grant 9,230,317 - Yasui , et al. January 5, 2 | 2016-01-05 |
Mask Inspection Apparatus, Mask Evaluation Method And Mask Evaluation System App 20150379707 - TSUCHIYA; Hideo ;   et al. | 2015-12-31 |
Measuring Apparatus App 20150125067 - ISOMURA; Ikunao ;   et al. | 2015-05-07 |
Measuring Apparatus App 20150125066 - ISOMURA; Ikunao ;   et al. | 2015-05-07 |
Inspection Method And Inspection Apparatus App 20140307945 - YASUI; Yoshitaka ;   et al. | 2014-10-16 |
Inspection system and method Grant 8,861,832 - Inoue , et al. October 14, 2 | 2014-10-14 |
Inspection Method And Inspection Apparatus App 20140294283 - TAKEDA; Masaya ;   et al. | 2014-10-02 |
Pattern Inspection Method And Pattern Inspection Apparatus App 20140241611 - ISOMURA; Ikunao | 2014-08-28 |
Inspection System And Method App 20130250095 - INOUE; Takafumi ;   et al. | 2013-09-26 |
Inspection System And Method App 20130216120 - INOUE; Takafumi ;   et al. | 2013-08-22 |
Pattern inspection apparatus and pattern inspection method Grant 8,442,320 - Isomura , et al. May 14, 2 | 2013-05-14 |
Inspection Apparatus And Method App 20120307043 - AKIYAMA; Hiroteru ;   et al. | 2012-12-06 |
Ultrafine lithography pattern inspection using multi-stage TDI image sensors with false image removability Grant 8,254,663 - Kataoka , et al. August 28, 2 | 2012-08-28 |
Pattern Inspection Apparatus App 20120081538 - Ogawa; Riki ;   et al. | 2012-04-05 |
Pattern Inspection Apparatus And Pattern Inspection Method App 20110229009 - ISOMURA; Ikunao ;   et al. | 2011-09-22 |
Mask-defect inspecting apparatus with movable focusing lens Grant 7,760,349 - Sekine , et al. July 20, 2 | 2010-07-20 |
Photomask inspection apparatus comparing optical proximity correction patterns to minimum and maximum limits Grant 7,664,308 - Isomura February 16, 2 | 2010-02-16 |
Die-to-database photomask defect detection using region data to modify inspection thresholds Grant 7,639,863 - Isomura December 29, 2 | 2009-12-29 |
Die-to-die photomask defect detection using region data to modify inspection thresholds Grant 7,630,535 - Isomura December 8, 2 | 2009-12-08 |
Ultrafine Lithography Pattern Inspection Using Multi-stage Tdi Image Sensors With False Image Removability App 20090238446 - Kataoka; Akira ;   et al. | 2009-09-24 |
Pattern inspecting method Grant 7,590,277 - Oaki , et al. September 15, 2 | 2009-09-15 |
Pattern inspection apparatus Grant 7,551,767 - Tsuchiya , et al. June 23, 2 | 2009-06-23 |
Mask defect inspection apparatus Grant 7,551,273 - Sekine , et al. June 23, 2 | 2009-06-23 |
Pattern inspection apparatus Grant 7,526,119 - Isomura , et al. April 28, 2 | 2009-04-28 |
Pattern inspection method Grant 7,522,276 - Tojo , et al. April 21, 2 | 2009-04-21 |
Pattern inspection apparatus Grant 7,421,109 - Tsuchiya , et al. September 2, 2 | 2008-09-02 |
Mask defect inspection apparatus App 20080204723 - Sekine; Akihiko ;   et al. | 2008-08-28 |
Pattern inspection apparatus Grant 7,415,149 - Tsuchiya , et al. August 19, 2 | 2008-08-19 |
Pattern Inspection Apparatus App 20080166054 - Tsuchiya; Hideo ;   et al. | 2008-07-10 |
Pattern Inspection Method App 20080151230 - Tojo; Toru ;   et al. | 2008-06-26 |
Mask defect inspection apparatus Grant 7,379,176 - Sekine , et al. May 27, 2 | 2008-05-27 |
Pattern inspection apparatus Grant 7,372,560 - Tojo , et al. May 13, 2 | 2008-05-13 |
Defect inspection apparatus and defect inspection method Grant 7,359,546 - Sugihara , et al. April 15, 2 | 2008-04-15 |
Pattern Inspection Apparatus App 20070127806 - Tsuchiya; Hideo ;   et al. | 2007-06-07 |
Pattern Inspection Apparatus, Pattern Inspection Method And Program App 20070071307 - ISOMURA; Ikunao | 2007-03-29 |
Pattern inspection apparatus, pattern inspection method, and program-recorded readable recording medium App 20070047798 - Isomura; Ikunao | 2007-03-01 |
Pattern inspection apparatus, pattern inspection method, and program-recorded readable recording medium App 20070047799 - Isomura; Ikunao | 2007-03-01 |
Pattern inspecting method App 20060018530 - Oaki; Junji ;   et al. | 2006-01-26 |
Defect inspection apparatus and defect inspection method App 20050232477 - Sugihara, Shinji ;   et al. | 2005-10-20 |
Mask-defect inspecting apparatus App 20050213084 - Sekine, Akihiko ;   et al. | 2005-09-29 |
Mask defect inspection apparatus App 20050213083 - Sekine, Akihiko ;   et al. | 2005-09-29 |
Pattern inspection apparatus App 20040252296 - Tojo, Toru ;   et al. | 2004-12-16 |
Pattern inspection apparatus App 20040126003 - Isomura, Ikunao ;   et al. | 2004-07-01 |
Pattern inspection apparatus App 20040105578 - Tsuchiya, Hideo ;   et al. | 2004-06-03 |
Pattern data generating apparatus and method for inspecting defects in fine patterns in a photomask or semiconductor wafer Grant 6,285,783 - Isomura , et al. September 4, 2 | 2001-09-04 |
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