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Exposure Apparatus, Exposure Method, Method For Producing Device, And Optical Part App 20180364581 - NAGASAKA; Hiroyuki ;   et al. | 2018-12-20 |
Exposure apparatus, exposure method, method for producing device, and optical part Grant 10,088,760 - Nagasaka , et al. October 2, 2 | 2018-10-02 |
Optical system having optical thin film including amorphous silicon oxide-based binder Grant 9,915,761 - Ishizawa , et al. March 13, 2 | 2018-03-13 |
CaF.sub.2 translucent ceramics and manufacturing method of CaF.sub.2 translucent ceramics Grant 9,586,867 - Ishizawa March 7, 2 | 2017-03-07 |
Mgf2 Optical Thin Film Including Amorphous Silicon Oxide Binder, Optical Element Provided With The Same, And Method For Producing Mgf2 Optical Thin Film App 20150362633 - ISHIZAWA; Hitoshi ;   et al. | 2015-12-17 |
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Exposure Apparatus, Exposure Method, Method For Producing Device, And Optical Part App 20150286151 - NAGASAKA; Hiroyuki ;   et al. | 2015-10-08 |
Optical element and exposure apparatus Grant 9,046,796 - Shirai , et al. June 2, 2 | 2015-06-02 |
Exposure apparatus, exposure method, method for producing device, and optical part Grant 9,019,469 - Nagasaka , et al. April 28, 2 | 2015-04-28 |
CaF2 TRANSLUCENT CERAMICS AND MANUFACTURING METHOD OF CaF2 TRANSLUCENT CERAMICS App 20140239228 - ISHIZAWA; Hitoshi | 2014-08-28 |
Optical Element And Exposure Apparatus App 20140043592 - SHIRAI; Takeshi ;   et al. | 2014-02-13 |
Exposure Apparatus, Exposure Method, Method For Producing Device, And Optical Part App 20140022523 - NAGASAKA; Hiroyuki ;   et al. | 2014-01-23 |
Ca--La--F based transparent ceramic, Ca--La--F based transparent ceramic, optical element, optical system, and ceramic-forming composition Grant 8,618,008 - Ishizawa December 31, 2 | 2013-12-31 |
Ca-La-F BASED TRANSPARENT CERAMIC, Ca-La-F BASED TRANSPARENT CERAMIC, OPTICAL ELEMENT, OPTICAL SYSTEM, AND CERAMIC-FORMING COMPOSITION App 20120257290 - ISHIZAWA; Hitoshi | 2012-10-11 |
Optical Element And Exposure Apparatus App 20120212716 - SHIRAI; Takeshi ;   et al. | 2012-08-23 |
Optical Element And Exposure Apparatus App 20120206705 - SHIRAI; Takeshi ;   et al. | 2012-08-16 |
Method for producing Ca-La-F based transparent ceramic, Ca-La-F based transparent ceramic, optical element, optical system, and ceramic-forming composition Grant 8,206,679 - Ishizawa June 26, 2 | 2012-06-26 |
Optical element and exposure apparatus Grant 8,189,170 - Shirai , et al. May 29, 2 | 2012-05-29 |
Optical element and exposure apparatus Grant 8,149,381 - Shirai , et al. April 3, 2 | 2012-04-03 |
Mgf2 Optical Thin Film Including Amorphous Silicon Oxide Binder, Optical Element Provided With The Same, And Method For Producing Mgf2 Optical Thin Film App 20120058261 - ISHIZAWA; HITOSHI ;   et al. | 2012-03-08 |
Optical multi-layer thin film, optical element, and method for producing the optical multi-layer thin film Grant 8,098,432 - Ishizawa , et al. January 17, 2 | 2012-01-17 |
Exposure apparatus, exposure method, method for producing device, and optical part Grant 8,054,447 - Nagasaka , et al. November 8, 2 | 2011-11-08 |
Optical element and exposure apparatus Grant 7,993,008 - Shirai , et al. August 9, 2 | 2011-08-09 |
Mgf2 Optical Thin Film Including Amorphous Silicon Oxide Binder, Optical Element Provided With The Same, And Method For Producing Mgf2 Optical Thin Film App 20110122497 - Ishizawa; Hitoshi ;   et al. | 2011-05-26 |
Fluorescent Film, Method Of Forming Fluorescent Film, Multilayer Dielectric Film, Optical Element, Optical System, Imaging Unit, Optical Property Measuring Apparatus, Method Of Measuring Optical Property, Exposure Apparatus, Exposure Method, And Method Of Manufacturing Device App 20110063592 - EZURA; Yoshinobu ;   et al. | 2011-03-17 |
Method for producing Ca-La-F based transparent ceramic, Ca-La-F based transparent ceramic, optical element, optical system, and ceramic-forming composition App 20100323878 - Ishizawa; Hitoshi | 2010-12-23 |
Optical element and exposure apparatus App 20100220305 - Shirai; Takeshi ;   et al. | 2010-09-02 |
Optical member and method for manufacturing the same Grant 7,760,447 - Ishizawa , et al. July 20, 2 | 2010-07-20 |
Optical element and exposure apparatus Grant 7,697,111 - Shirai , et al. April 13, 2 | 2010-04-13 |
Optical Member And Method For Manufacturing The Same App 20090284848 - ISHIZAWA; HITOSHI ;   et al. | 2009-11-19 |
Optical Multi-layer Thin Film, Optical Element, And Method For Producing The Optical Multi-layer Thin Film App 20090161219 - ISHIZAWA; Hitoshi ;   et al. | 2009-06-25 |
Optical element and exposure apparatus App 20090103070 - Shirai; Takeshi ;   et al. | 2009-04-23 |
Mgf2 Optical Thin Film Including Amorphous Silicon Oxide Binder, Optical Element Provided With the Same, and Method for Producing Mgf2 Optical Thin Film App 20080002259 - Ishizawa; Hitoshi ;   et al. | 2008-01-03 |
Exposure Apparatus, Exposure Method, Method for Producing Device, and Optical Part App 20070242242 - Nagasaka; Hiroyuki ;   et al. | 2007-10-18 |
Exposure apparatus, exposure method, method for producing device, and optical part App 20070115450 - Nagasaka; Hiroyuki ;   et al. | 2007-05-24 |
Optical element and exposure apparatus App 20060291060 - Shirai; Takeshi ;   et al. | 2006-12-28 |
Optical element and exposure apparatus App 20060203218 - Shirai; Takeshi ;   et al. | 2006-09-14 |
Method for forming optical thin film and optical element provided with optical thin film Grant 6,870,602 - Ishizawa , et al. March 22, 2 | 2005-03-22 |
Optical element with multilayer thin film and exposure apparatus with the element Grant 6,574,039 - Murata , et al. June 3, 2 | 2003-06-03 |
Method for forming optical thin film and optical element provided with optical thin film App 20020191168 - Ishizawa, Hitoshi ;   et al. | 2002-12-19 |
Receiving paper for melt-type heat transfer recording Grant 5,851,655 - Tokiyoshi , et al. December 22, 1 | 1998-12-22 |
Implant and method of making the same Grant 5,478,237 - Ishizawa December 26, 1 | 1995-12-26 |