Patent | Date |
---|
Mirror device, mirror array, optical switch, mirror device manufacturing method, and mirror substrate manufacturing method Grant 8,634,121 - Shimokawa , et al. January 21, 2 | 2014-01-21 |
Mirror device, mirror array, optical switch, mirror device manufacturing method, and mirror substrate manufacturing method Grant 8,582,189 - Shimokawa , et al. November 12, 2 | 2013-11-12 |
Mirror device, mirror array, optical switch, mirror device manufacturing method, and mirror substrate manufacturing method Grant 8,462,410 - Shimokawa , et al. June 11, 2 | 2013-06-11 |
Mirror Device, Mirror Array, Optical Switch, Mirror Device Manufacturing Method, And Mirror Substrate Manufacturing Method App 20120162735 - Uchiyama; Shingo ;   et al. | 2012-06-28 |
Mirror Device, Mirror Array, Optical Switch, Mirror Device Manufacturing Method, And Mirror Substrate Manufacturing Method App 20120162737 - Uchiyama; Shingo ;   et al. | 2012-06-28 |
Mirror Device, Mirror Array, Optical Switch, Mirror Device Manufacturing Method, And Mirror Substrate Manufacturing Method App 20120162736 - UCHIYAMA; Shingo ;   et al. | 2012-06-28 |
Mirror device, mirror array, optical switch, mirror device manufacturing method, and mirror substrate manufacturing method Grant 8,149,489 - Shimokawa , et al. April 3, 2 | 2012-04-03 |
Mirror device and mirror device manufacturing method incorporating a collision preventive structure Grant 7,978,388 - Uchiyama , et al. July 12, 2 | 2011-07-12 |
Mirror Device and Mirror Device Manufacturing Method App 20090244676 - Uchiyama; Shingo ;   et al. | 2009-10-01 |
Method of manufacturing a semiconductor device having MEMS Grant 7,482,196 - Urano , et al. January 27, 2 | 2009-01-27 |
Mirror Device, Mirror Array, Optical Switch, Mirror Device Manufacturing Method, and Mirror Substrate Manufacturing Method App 20080100899 - Shimokawa; Fusao ;   et al. | 2008-05-01 |
Method of manufacturing recognition sensor Grant 7,360,293 - Sato , et al. April 22, 2 | 2008-04-22 |
Semiconductor device having MEMS Grant 7,208,809 - Urano , et al. April 24, 2 | 2007-04-24 |
Micromachine and manufacturing method Grant 7,189,625 - Ishii , et al. March 13, 2 | 2007-03-13 |
Surface shape recognition sensor and method of manufacturing the same Grant 7,123,026 - Sato , et al. October 17, 2 | 2006-10-17 |
Semiconductor device having MEMS App 20060115920 - Urano; Masami ;   et al. | 2006-06-01 |
Micromachine and manufacturing method App 20060027839 - Ishii; Hiromu ;   et al. | 2006-02-09 |
Surface shape recognition sensor and method of manufacturing the same App 20050214960 - Sato, Norio ;   et al. | 2005-09-29 |
Optical switch device Grant 6,912,336 - Ishii , et al. June 28, 2 | 2005-06-28 |
Surface shape recognition sensor and method of manufacturing the same Grant 6,844,744 - Ishii , et al. January 18, 2 | 2005-01-18 |
Micromachine manufacturing method Grant 6,743,653 - Tanabe , et al. June 1, 2 | 2004-06-01 |
Micromachine manufacturing method App 20040072386 - Tanabe, Yasuyuki ;   et al. | 2004-04-15 |
Semiconductor device having MEMS App 20040063325 - Urano, Masami ;   et al. | 2004-04-01 |
Micromachine and manufacturing method therefor App 20030227035 - Ishii, Hiromu ;   et al. | 2003-12-11 |
Surface shape recognition sensor and method of manufacturing the same App 20030173982 - Ishii, Hiromu ;   et al. | 2003-09-18 |
Optical switch device App 20030174934 - Ishii, Hiromu ;   et al. | 2003-09-18 |
Surface shape recognition sensor and method of manufacturing the same App 20020121909 - Sato, Norio ;   et al. | 2002-09-05 |
Pattern forming method App 20010027019 - Ishii, Hiromu ;   et al. | 2001-10-04 |
Semiconductor substrate treatment method Grant 5,723,383 - Kosugi , et al. March 3, 1 | 1998-03-03 |