Ishigo; Kazutaka

Patent Applications and Registrations

Patent applications and USPTO patent grants for Ishigo; Kazutaka.The latest application filed is for "pattern accuracy detecting apparatus and processing system".

Company Profile

0.13.14

Ishigo; Kazutaka - Yokkaichi Mie JP
Ishigo; Kazutaka - Mie N/A JP
Ishigo; Kazutaka - Mie-ken JP
Ishigo; Kazutaka - Yokohama JP
ISHIGO; Kazutaka - Yokkaichi-shi JP
Ishigo; Kazutaka - Kanagawa-ken JP
Ishigo; Kazutaka - Yokohama-shi JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Pattern accuracy detecting apparatus and processing system Grant 9,941,177 - Kasa , et al. April 10, 2	2018-04-10
Pattern Accuracy Detecting Apparatus And Processing System App 20170271214 - KASA; Kentaro ; et al.	2017-09-21
Overlay/alignment measurement method and overlay/alignment measurement apparatus Grant 9,250,542 - Ishigo February 2, 2	2016-02-02
Exposure apparatus, exposure control system, and exposure method Grant 9,158,212 - Ishigo October 13, 2	2015-10-13
Exposure System And Exposure Method App 20140285787 - YONEDA; Eiji ; et al.	2014-09-25
Mask and method for fabricating semiconductor device Grant 8,790,851 - Okamoto , et al. July 29, 2	2014-07-29
Mask And Method For Fabricating Semiconductor Device App 20130252429 - OKAMOTO; Yosuke ; et al.	2013-09-26
Exposure Apparatus, Exposure Control System, And Exposure Method App 20130222777 - ISHIGO; Kazutaka	2013-08-29
Mark arrangement inspecting method, mask data, and manufacturing method of semiconductor device Grant 8,364,437 - Morinaga , et al. January 29, 2	2013-01-29
Overlay/alignment Measurement Method And Overlay/alignment Measurement Apparatus App 20120069337 - ISHIGO; Kazutaka	2012-03-22
Pattern monitor mark and monitoring method suitable for micropattern Grant 8,072,601 - Fukuhara , et al. December 6, 2	2011-12-06
Pattern forming method, pattern designing method, and mask set Grant 8,034,515 - Ishigo October 11, 2	2011-10-11
Semiconductor device and method of fabricating the same Grant 7,973,419 - Kudo , et al. July 5, 2	2011-07-05
Photomask, photomask superimposition correcting method, and manufacturing method of semiconductor device Grant 7,906,258 - Komine , et al. March 15, 2	2011-03-15
Pattern Forming Method, Pattern Designing Method, And Mask Set App 20100291477 - ISHIGO; Kazutaka	2010-11-18
Mark Arrangement Inspecting Method, Mask Data, And Manufacturing Method Of Semiconductor Device App 20100211352 - MORINAGA; Hiroyuki ; et al.	2010-08-19
Manufacturing Method Of Semiconductor Device App 20090246709 - NAKASUGI; Tetsuro ; et al.	2009-10-01
Pattern Forming Method Used In Semiconductor Device Manufacturing And Method Of Manufacturing Semiconductor Device App 20080248431 - Seino; Yuriko ; et al.	2008-10-09
Photomask, Photomask Superimposition Correcting Method, And Manufacturing Method Of Semiconductor Device App 20080225254 - KOMINE; Nobuhiro ; et al.	2008-09-18
Pattern Monitor Mark and Monitoring Method Suitable for Micropattern App 20080206898 - FUKUHARA; Kazuya ; et al.	2008-08-28
Semiconductor device and method of fabricating the same App 20070090549 - Kudo; Tomoyasu ; et al.	2007-04-26

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