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Liquid coating apparatus with temperature controlling manifold Grant 6,620,245 - Ishida , et al. September 16, 2 | 2003-09-16 |
Apparatus and method for coating treatment Grant 6,579,370 - Kimura , et al. June 17, 2 | 2003-06-17 |
Substrate processing apparatus App 20020011208 - Ishida, Seiki ;   et al. | 2002-01-31 |
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