Patent | Date |
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Plasma Processing Apparatus App 20200378005 - MATSUURA; Hiroyuki ;   et al. | 2020-12-03 |
Substrate processing apparatus Grant 10,570,512 - Iwao , et al. Feb | 2020-02-25 |
Placing bed structure, treating apparatus using the structure, and method for using the apparatus Grant 10,388,557 - Kawamura , et al. A | 2019-08-20 |
Shower plate sintered integrally with gas release hole member and method for manufacturing the same Grant 9,767,994 - Okesaku , et al. September 19, 2 | 2017-09-19 |
Plasma processing apparatus Grant 9,767,993 - Ishibashi , et al. September 19, 2 | 2017-09-19 |
Substrate Processing Apparatus App 20170253972 - ISHIBASHI; Kiyotaka ;   et al. | 2017-09-07 |
Plasma processing device Grant 9,670,584 - Ishibashi June 6, 2 | 2017-06-06 |
Antenna, dielectric window, plasma processing apparatus and plasma processing method Grant 9,595,425 - Matsumoto , et al. March 14, 2 | 2017-03-14 |
Plasma processing apparatus, plasma processing method and high frequency generator Grant 9,418,822 - Kaneko , et al. August 16, 2 | 2016-08-16 |
Substrate Processing Method App 20160093474 - Ishibashi; Kiyotaka ;   et al. | 2016-03-31 |
Placing Bed Structure, Treating Apparatus Using The Structure, And Method For Using The Apparatus App 20160020135 - KAWAMURA; Kohei ;   et al. | 2016-01-21 |
Plasma processing apparatus and substrate processing method Grant 9,237,638 - Ishibashi , et al. January 12, 2 | 2016-01-12 |
Placing bed structure, treating apparatus using the structure, and method for using the apparatus Grant 9,177,846 - Kawamura , et al. November 3, 2 | 2015-11-03 |
Substrate Processing Apparatus App 20150232993 - IWAO; Toshihiko ;   et al. | 2015-08-20 |
Plasma processing apparatus Grant 9,111,726 - Moyama , et al. August 18, 2 | 2015-08-18 |
Substrate Processing Apparatus App 20150197853 - ISHIBASHI; Kiyotaka ;   et al. | 2015-07-16 |
Shower Plate Sintered Integrally With Gas Release Hole Member And Method For Manufacturing The Same App 20150069674 - OKESAKU; Masahiro ;   et al. | 2015-03-12 |
Top plate of microwave plasma processing apparatus, plasma processing apparatus and plasma processing method Grant 8,967,080 - Tian , et al. March 3, 2 | 2015-03-03 |
Manufacturing method of top plate of plasma processing apparatus Grant 8,925,351 - Tian , et al. January 6, 2 | 2015-01-06 |
Shower plate sintered integrally with gas release hole member and method for manufacturing the same Grant 8,915,999 - Okesaku , et al. December 23, 2 | 2014-12-23 |
Plasma Processing Apparatus App 20140262034 - Ishibashi; Kiyotaka ;   et al. | 2014-09-18 |
Plasma Processing Apparatus, Plasma Processing Method And High Frequency Generator App 20140225504 - Kaneko; Kazushi ;   et al. | 2014-08-14 |
Plasma Processing Device App 20140102367 - Ishibashi; Kiyotaka | 2014-04-17 |
Manufacturing Method Of Top Plate Of Plasma Processing Apparatus App 20130292047 - Tian; Caizhong ;   et al. | 2013-11-07 |
Shower Plate, Manufacturing Method Of The Shower Plate, And Plasma Processing Apparatus Using The Shower Plate App 20130112337 - Okesaku; Masahiro ;   et al. | 2013-05-09 |
Method of cleaning plasma-treating apparatus, plasma-treating apparatus where the cleaning method is practiced, and memory medium memorizing program executing the cleaning method Grant 8,419,859 - Fukiage , et al. April 16, 2 | 2013-04-16 |
Ceiling Plate And Plasma Process Apparatus App 20130081763 - TIAN; Caizhong ;   et al. | 2013-04-04 |
Plasma processing unit Grant 8,387,560 - Tian , et al. March 5, 2 | 2013-03-05 |
Shower plate, method for manufacturing the shower plate, plasma processing apparatus using the shower plate, plasma processing method and electronic device manufacturing method Grant 8,372,200 - Okesaku , et al. February 12, 2 | 2013-02-12 |
Antenna, Dielectric Window, Plasma Processing Apparatus And Plasma Processing Method App 20130008607 - MATSUMOTO; Naoki ;   et al. | 2013-01-10 |
Ceiling plate and plasma process apparatus Grant 8,343,308 - Tian , et al. January 1, 2 | 2013-01-01 |
Plasma Processing Apparatus App 20120267048 - Moyama; Kazuki ;   et al. | 2012-10-25 |
Plasma processing apparatus and method for adjusting plasma density distribution Grant 8,273,210 - Tian , et al. September 25, 2 | 2012-09-25 |
Plasma processing apparatus and plasma processing method Grant 8,267,040 - Ishibashi , et al. September 18, 2 | 2012-09-18 |
Plasma processing apparatus and plasma processing method Grant 8,267,042 - Ishibashi September 18, 2 | 2012-09-18 |
Plasma Processing Apparatus And Substrate Processing Method App 20120160809 - Ishibashi; Kiyotaka ;   et al. | 2012-06-28 |
Plasma Processing Apparatus And Cooling Device For Plasma Processing Apparatus App 20120118505 - Ishibashi; Kiyotaka | 2012-05-17 |
Sealing structure of plasma processing apparatus, sealing method, and plasma processing apparatus including the sealing structure Grant 8,069,704 - Ishibashi , et al. December 6, 2 | 2011-12-06 |
Plasma processing apparatus Grant 7,940,009 - Ishibashi , et al. May 10, 2 | 2011-05-10 |
Plasma processing equipment Grant 7,930,992 - Nozawa , et al. April 26, 2 | 2011-04-26 |
Top Plate Of Microwave Plasma Processing Apparatus, Plasma Processing Apparatus And Plasma Processing Method App 20110000780 - Tian; Caizhong ;   et al. | 2011-01-06 |
Top Plate And Plasma Process Apparatus Employing The Same App 20100288439 - Ishibashi; Kiyotaka ;   et al. | 2010-11-18 |
Plasma processing device Grant 7,828,927 - Ishibashi , et al. November 9, 2 | 2010-11-09 |
Placing Bed Structure, Treating Apparatus Using The Structure, And Method For Using The Apparatus App 20100264115 - Kawamura; Kohei ;   et al. | 2010-10-21 |
Plasma Processing Apparatus And Method For Adjusting Plasma Density Distribution App 20100252412 - Tian; Caizhong ;   et al. | 2010-10-07 |
Shower Plate, Method for Manufacturing the Shower Plate, Plasma Processing Apparatus using the Shower Plate, Plasma Processing Method and Electronic Device Manufacturing Method App 20100230387 - Okesaku; Masahiro ;   et al. | 2010-09-16 |
Plasma processing device Grant 7,779,783 - Ishibashi , et al. August 24, 2 | 2010-08-24 |
Method Of Cleaning Plasma-treating Apparatus, Plasma-treating Apparatus Where The Cleaning Method Is Practiced, And Memory Medium Memorizing Program Executing The Cleaning Method App 20100175713 - Fukiage; Noriaki ;   et al. | 2010-07-15 |
Shower Plate Sintered Integrally With Gas Release Hole Member And Method For Manufacturing The Same App 20100178775 - Okesaku; Masahiro ;   et al. | 2010-07-15 |
Ceiling Plate And Plasma Process Apparatus App 20100032094 - Tian; Caizhong ;   et al. | 2010-02-11 |
Shower Plate And Manufacturing Method Thereof, And Plasma Processing Apparatus, Plasma Processing Method And Electronic Device Manufacturing Method Using The Shower Plate App 20090311869 - Okesaku; Masahiro ;   et al. | 2009-12-17 |
Plasma Processing Apparatus And Plasma Processing Method App 20090291563 - ISHIBASHI; Kiyotaka | 2009-11-26 |
Shower Plate, And Plasma Processing Apparatus, Plasma Processing Method And Electronic Device Manufacturing Method Using The Shower Plate App 20090286405 - Okesaku; Masahiro ;   et al. | 2009-11-19 |
Substrate Processing Apparatus App 20090266711 - ISHIBASHI; Kiyotaka ;   et al. | 2009-10-29 |
Sealing Structure Of Plasma Processing Apparatus, Sealing Method, And Plasma Processing Apparatus Including The Sealing Structure App 20090255324 - Ishibashi; Kiyotaka ;   et al. | 2009-10-15 |
Method For Manufacturing Shower Plate, Shower Plate Manufactured Using The Method, And Plasma Processing Apparatus Including The Shower Plate App 20090229753 - OHMI; Tadahiro ;   et al. | 2009-09-17 |
Plasma Processing Apparatus App 20090194238 - Ishibashi; Kiyotaka ;   et al. | 2009-08-06 |
Plasma processing equipment App 20090194236 - Ono; Kouichi ;   et al. | 2009-08-06 |
Temperature Control Device And Processing Apparatus Using The Same App 20090183677 - Tian; Caizhong ;   et al. | 2009-07-23 |
Plasma Processing Apparatus App 20090074632 - Ishibashi; Kiyotaka ;   et al. | 2009-03-19 |
Plasma processing device Grant 7,469,654 - Ishibashi , et al. December 30, 2 | 2008-12-30 |
Plasma processing apparatus App 20080254220 - Tian; Caizhong ;   et al. | 2008-10-16 |
Microwave Plasma Processing Apparatus App 20080190560 - Tian; Caizhong ;   et al. | 2008-08-14 |
Plasma Processing Unit App 20080035058 - Tian; Caizhong ;   et al. | 2008-02-14 |
Plasma Processing Apparatus and Plasma Processing Method App 20070264441 - Ishibashi; Kiyotaka ;   et al. | 2007-11-15 |
Plasma processing equipment App 20070113788 - Nozawa; Toshihisa ;   et al. | 2007-05-24 |
Plasma processing apparatus and plasma processing method App 20060156984 - Nozawa; Toshihisa ;   et al. | 2006-07-20 |
Plasma processing device App 20060005769 - Ishibashi; Kiyotaka ;   et al. | 2006-01-12 |
Plasma processing unit App 20050188922 - Ishibashi, Kiyotaka ;   et al. | 2005-09-01 |
Plasma processing device App 20050172901 - Ishibashi, Kiyotaka ;   et al. | 2005-08-11 |
Plasma processing device App 20050139322 - Ishibashi, Kiyotaka ;   et al. | 2005-06-30 |
Ion beam analyzing apparatus Grant 5,350,920 - Fukuyama , et al. September 27, 1 | 1994-09-27 |
Charged particle accelerator Grant 5,280,252 - Inoue , et al. January 18, 1 | 1994-01-18 |
Converged ion beam apparatus Grant 5,063,294 - Kawata , et al. November 5, 1 | 1991-11-05 |
Plasma reactor for diamond synthesis Grant 4,940,015 - Kobashi , et al. July 10, 1 | 1990-07-10 |