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Pattern evaluation device Grant 10,854,420 - Isawa , et al. December 1, 2 | 2020-12-01 |
Image processor, method for generating pattern using self-organizing lithographic techniques and computer program Grant 10,732,512 - Sutani , et al. | 2020-08-04 |
Pattern Evaluation Device App 20200098543 - ISAWA; Miki ;   et al. | 2020-03-26 |
Pattern measurement device, and computer program for measuring pattern Grant 10,545,018 - Yamaguchi , et al. Ja | 2020-01-28 |
Image Processor, Method for Generating Pattern Using Self-Organizing Lithographic Techniques and Computer Program App 20180181009 - SUTANI; Takumichi ;   et al. | 2018-06-28 |
Method for pattern measurement, method for setting device parameters of charged particle radiation device, and charged particle radiation device Grant 9,831,062 - Suzuki , et al. November 28, 2 | 2017-11-28 |
Pattern measurement device and computer program for evaluating patterns based on centroids of the patterns Grant 9,804,107 - Sugiyama , et al. October 31, 2 | 2017-10-31 |
Charged particle beam device Grant 9,627,171 - Makino , et al. April 18, 2 | 2017-04-18 |
Pattern measurement device, evaluation method of polymer compounds used in self-assembly lithography, and computer program Grant 9,589,343 - Isawa , et al. March 7, 2 | 2017-03-07 |
Charged particle beam apparatus Grant 9,502,212 - Mizuhara , et al. November 22, 2 | 2016-11-22 |
Pattern Measurement Device, and Computer Program for Measuring Pattern App 20160320182 - YAMAGUCHI; Satoru ;   et al. | 2016-11-03 |
Pattern Measurement Device and Computer Program App 20160313266 - SUGIYAMA; Akiyuki ;   et al. | 2016-10-27 |
Scanning electron microscope Grant 9,472,376 - Yokosuka , et al. October 18, 2 | 2016-10-18 |
Method for Pattern Measurement, Method for Setting Device Parameters of Charged Particle Radiation Device, and Charged Particle Radiation Device App 20150357158 - SUZUKI; Makoto ;   et al. | 2015-12-10 |
Charged Particle Beam Device App 20150357153 - MAKINO; Hiroshi ;   et al. | 2015-12-10 |
Charged Particle Beam Apparatus App 20150348748 - MIZUHARA; Yuzuru ;   et al. | 2015-12-03 |
Image Processor, Method For Generating Pattern Using Self- Organizing Lithographic Techniques And Computer Program App 20150277237 - Sutani; Takumichi ;   et al. | 2015-10-01 |
Pattern Measurement Device, Evaluation Method of Polymer Compounds Used in Self-Assembly Lithography, and Computer Program App 20150243008 - Isawa; Miki ;   et al. | 2015-08-27 |
Pattern measuring apparatus and computer program Grant 9,000,365 - Mochizuki , et al. April 7, 2 | 2015-04-07 |
Scanning Electron Microscope App 20150008322 - Yokosuka; Toshiyuki ;   et al. | 2015-01-08 |
Charged particle beam apparatus Grant 8,648,300 - Isawa , et al. February 11, 2 | 2014-02-11 |
Charged Particle Beam Apparatus App 20140014836 - ISAWA; Miki ;   et al. | 2014-01-16 |
Pattern Measuring Apparatus And Computer Program App 20120037801 - Mochizuki; Yuzuru ;   et al. | 2012-02-16 |