Isao; Akihiko

Patent Applications and Registrations

Patent applications and USPTO patent grants for Isao; Akihiko.The latest application filed is for "phase shifter film and process for the same".

Company Profile

0.15.3

Isao; Akihiko - Saitama JP
Isao; Akihiko - Saitama-ken JP
Isao; Akihiko - Chichibu JP
Isao; Akihiko - Sakura JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Phase shifter film and process for the same Grant 7,282,308 - Kawada , et al. October 16, 2	2007-10-16
Phase shifter film and process for the same App 20070009810 - Kawada; Susumu ; et al.	2007-01-11
Phase shifter film and process for the same Grant 7,090,947 - Kawada , et al. August 15, 2	2006-08-15
Phase-shifting photomask blank, phase-shifting photomask, method for producing them and apparatus for manufacturing the blank Grant 6,689,515 - Yoshioka , et al. February 10, 2	2004-02-10
Phase-shift photo mask blank, phase-shift photo mask and method for fabricating semiconductor devices Grant 6,569,577 - Isao , et al. May 27, 2	2003-05-27
Phase shifter film and process for the same App 20020009653 - Kawada, Susumu ; et al.	2002-01-24
Phase-shifting photomask blank, phase-shifting photomask, method for producing them and apparatus for manufacturing the blank App 20010018154 - Yoshioka, Nobuyuki ; et al.	2001-08-30
Phase-shifting photomask blank, phase-shifting photomask, method for producing them and apparatus for manufacturing the blank Grant 6,228,541 - Isao , et al. May 8, 2	2001-05-08
Phase-shifting photomask blank and method of manufacturing the same as well as phase-shifting photomask Grant 5,952,128 - Isao , et al. September 14, 1	1999-09-14
Method of manufacturing phase-shifting photomask blank Grant 5,938,897 - Isao , et al. August 17, 1	1999-08-17
Phase shift mask and manufacturing method thereof and exposure method using phase shift mask Grant 5,830,607 - Isao , et al. November 3, 1	1998-11-03
Phase shift mask and manufacturing method thereof and exposure method using phase shift mask Grant 5,691,090 - Isao , et al. November 25, 1	1997-11-25
Phase shift mask and manufacturing method thereof and exposure method using phase shift mask Grant 5,674,647 - Isao , et al. October 7, 1	1997-10-07
Phase shift mask and manufacturing method thereof and exposure method using phase shift mask comprising a semitransparent region Grant 5,629,114 - Isao , et al. May 13, 1	1997-05-13
Phase-shifting photomask blank, phase-shifting photomask, and method of manufacturing them Grant 5,605,776 - Isao , et al. February 25, 1	1997-02-25
Phase shift mask and manufacturing method thereof Grant 5,482,799 - Isao , et al. January 9, 1	1996-01-09
Method for forming an inhomogeneous optical layer Grant 4,428,980 - Nakamura , et al. January 31, 1	1984-01-31
Apparatus for forming an inhomogeneous optical layer Grant 4,416,217 - Nakamura , et al. November 22, 1	1983-11-22

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