Patent | Date |
---|
Method and apparatus for observing inside structures, and specimen holder Grant 8,134,131 - Terada , et al. March 13, 2 | 2012-03-13 |
Element mapping unit, scanning transmission electron microscope, and element mapping method Grant 7,928,376 - Kaji , et al. April 19, 2 | 2011-04-19 |
Charged particle beam equipment Grant 7,923,701 - Inada , et al. April 12, 2 | 2011-04-12 |
Method and Apparatus for Observing Inside Structures, and Specimen Holder App 20090302234 - Terada; Shohei ;   et al. | 2009-12-10 |
Charged particle beam equipment App 20090242794 - Inada; Hiromi ;   et al. | 2009-10-01 |
Method and apparatus for observing inside structures, and specimen holder Grant 7,476,872 - Terada , et al. January 13, 2 | 2009-01-13 |
Method and apparatus for observing inside structures, and specimen holder Grant 7,462,830 - Terada , et al. December 9, 2 | 2008-12-09 |
Charged particle beam equipment Grant 7,375,330 - Inada , et al. May 20, 2 | 2008-05-20 |
Charged particle system and a method for measuring image magnification Grant 7,372,047 - Sato , et al. May 13, 2 | 2008-05-13 |
Method And Apparatus For Observing Inside Structures, And Specimen Holder App 20070252091 - Terada; Shohei ;   et al. | 2007-11-01 |
Energy spectrum measuring apparatus, electron energy loss spectrometer, electron microscope provided therewith, and electron energy loss spectrum measuring method Grant 7,250,601 - Kaji , et al. July 31, 2 | 2007-07-31 |
Micro manipulator Grant 7,146,872 - Morita , et al. December 12, 2 | 2006-12-12 |
Charged particle beam equipment App 20060219908 - Inada; Hiromi ;   et al. | 2006-10-05 |
Energy spectrum measuring apparatus, electron energy loss spectrometer, electron microscope provided therewith, and electron energy loss spectrum measuring method App 20060163479 - Kaji; Kazutoshi ;   et al. | 2006-07-27 |
Energy spectrum measuring apparatus, electron energy loss spectrometer, electron microscope provided therewith, and electron energy loss spectrum measuring method Grant 7,067,805 - Kajl , et al. June 27, 2 | 2006-06-27 |
Element mapping unit, scanning transmission electron microscope, and element mapping method App 20060011836 - Kaji; Kazutoshi ;   et al. | 2006-01-19 |
Charged particle system and a method for measuring image magnification App 20050189501 - Sato, Mitsugu ;   et al. | 2005-09-01 |
Ultimate analyzer, scanning transmission electron microscope and ultimate analysis method Grant 6,933,501 - Kaji , et al. August 23, 2 | 2005-08-23 |
Electron microscope Grant 6,930,306 - Kaji , et al. August 16, 2 | 2005-08-16 |
Method and apparatus for observing inside structures, and specimen holder App 20050061971 - Terada, Shohei ;   et al. | 2005-03-24 |
Method and apparatus for observing element distribution Grant 6,855,927 - Taniguchi , et al. February 15, 2 | 2005-02-15 |
Method and apparatus for scanning transmission electron microscopy Grant 6,822,233 - Nakamura , et al. November 23, 2 | 2004-11-23 |
Electron microscope App 20040188613 - Kaji, Kazutoshi ;   et al. | 2004-09-30 |
Energy spectrum measuring apparatus, electron energy loss spectrometer, electron microscope provided therewith, and electron energy loss spectrum measuring method App 20040183011 - Kaji, Kazutoshi ;   et al. | 2004-09-23 |
Ultimate analyzer, scanning transmission electron microscope and ultimate analysis method Grant 6,794,648 - Kaji , et al. September 21, 2 | 2004-09-21 |
Ultimate analyzer, scanning transmission electron microscope and ultimate analysis method App 20040169143 - Kaji, Kazutoshi ;   et al. | 2004-09-02 |
Energy spectrum measuring apparatus, electron energy loss spectrometer, electron microscope provided therewith, and electron energy loss spectrum measuring method Grant 6,703,613 - Kaji , et al. March 9, 2 | 2004-03-09 |
Method and apparatus for observing element distribution App 20040000641 - Taniguchi, Yoshifumi ;   et al. | 2004-01-01 |
Method and apparatus for scanning transmission electron microscopy App 20030127595 - Nakamura, Kuniyasu ;   et al. | 2003-07-10 |
Inspection of circuit patterns for defects and analysis of defects using a charged particle beam Grant 6,566,654 - Funatsu , et al. May 20, 2 | 2003-05-20 |
Ultimate analyzer, scanning transmission electron microscope and ultimate analysis method App 20030085350 - Kaji, Kazutoshi ;   et al. | 2003-05-08 |
Ultimate analyzer, scanning transmission electron microscope and ultimate analysis method App 20030085356 - Kaji, Kazutoshi ;   et al. | 2003-05-08 |
Micro manipulator App 20030056364 - Morita, Kazuhiro ;   et al. | 2003-03-27 |
Method and apparatus for scanning transmission electron microscopy Grant 6,531,697 - Nakamura , et al. March 11, 2 | 2003-03-11 |
Energy spectrum measuring apparatus, electron energy loss spectrometer, electron microscope provided therewith, and electron energy loss spectrum measuring method App 20020096632 - Kaji, Kazutoshi ;   et al. | 2002-07-25 |
Analysis Electron Microscope App 20010045515 - SATO, YUJI ;   et al. | 2001-11-29 |
Energy filter and electron microscope equipped with the energy filter Grant 6,150,657 - Kimoto , et al. November 21, 2 | 2000-11-21 |
Electron microscope Grant 6,051,834 - Kakibayashi , et al. April 18, 2 | 2000-04-18 |
Electron microscope Grant 5,866,905 - Kakibayashi , et al. February 2, 1 | 1999-02-02 |
Electron microscope Grant 5,552,602 - Kakibayashi , et al. September 3, 1 | 1996-09-03 |
Electron microscope specimen holder Grant 5,367,171 - Aoyama , et al. November 22, 1 | 1994-11-22 |
Focusing apparatus used in a transmission electron microscope Grant 4,698,503 - Nomura , et al. October 6, 1 | 1987-10-06 |
Focusing device for a television electron microscope Grant 4,680,469 - Nomura , et al. July 14, 1 | 1987-07-14 |
Image distortion-free, image rotation-free electron microscope Grant 4,494,000 - Shii , et al. January 15, 1 | 1985-01-15 |
Electron beam control device for electron microscopes Grant 4,451,737 - Isakozawa May 29, 1 | 1984-05-29 |