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Patent applications and USPTO patent grants for Isa; Kazuhiro.The latest application filed is for "method for selective oxidation, device for selective oxidation, and computer-readable memory medium".
Patent | Date |
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Plasma processing apparatus Grant 8,882,962 - Yamashita , et al. November 11, 2 | 2014-11-11 |
Method For Selective Oxidation, Device For Selective Oxidation, And Computer-readable Memory Medium App 20120094505 - Nakamura; Hideo ;   et al. | 2012-04-19 |
Plasma Processing Apparatus App 20110174441 - YAMASHITA; Jun ;   et al. | 2011-07-21 |
Method for cleaning treatment chamber in substrate treating apparatus and method for detecting endpoint of cleaning Grant 7,887,637 - Ozaki , et al. February 15, 2 | 2011-02-15 |
Plasma Oxidizing Method, Plasma Processing Apparatus, And Storage Medium App 20100029093 - Shiozawa; Toshihiko ;   et al. | 2010-02-04 |
Method for cleaning treatment chamber iIn substrate treating apparatus and method for detecting endpoint of cleaning App 20070163617 - Ozaki; Shigenori ;   et al. | 2007-07-19 |
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