Patent | Date |
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Coreless linear motor Grant 7,531,923 - Shikayama , et al. May 12, 2 | 2009-05-12 |
Coreless linear motor App 20060175907 - Shikayama; Toru ;   et al. | 2006-08-10 |
Exposure apparatus and exposure method Grant 7,034,922 - Irie April 25, 2 | 2006-04-25 |
Exposure method, exposure apparatus, and method of production of device Grant 7,001,674 - Irie February 21, 2 | 2006-02-21 |
Exposure apparatus and exposure method App 20050062949 - Irie, Nobuyuki | 2005-03-24 |
Exposure apparatus, microdevice, photomask, method of exposure, and method of production of device Grant 6,842,225 - Irie January 11, 2 | 2005-01-11 |
Linear motor Grant 6,800,968 - Shikayama , et al. October 5, 2 | 2004-10-05 |
Canned linear motor Grant 6,731,029 - Shikayama , et al. May 4, 2 | 2004-05-04 |
Exposure method and exposure apparatus App 20040070740 - Irie, Nobuyuki | 2004-04-15 |
Exposure method and exposure apparatus Grant 6,710,847 - Irie March 23, 2 | 2004-03-23 |
Exposure method, exposure apparatus, and method of production of device App 20030211410 - Irie, Nobuyuki | 2003-11-13 |
Exposure method of production of density filter Grant 6,607,863 - Irie August 19, 2 | 2003-08-19 |
Exposure apparatus, microdevice, photomask, and exposure method Grant 6,606,145 - Irie , et al. August 12, 2 | 2003-08-12 |
Exposure method and exposure apparatus App 20030138742 - Irie, Nobuyuki ;   et al. | 2003-07-24 |
Canned linear motor App 20030020340 - Shikayama, Toru ;   et al. | 2003-01-30 |
Method of exposure, photomask, method of production of photomask, microdevice, and method of production of microdevice Grant 6,337,162 - Irie January 8, 2 | 2002-01-08 |
Exposure method and exposure apparatus App 20010055733 - Irie, Nobuyuki ;   et al. | 2001-12-27 |
Exposure apparatus, microdevice, photomask, and exposure method App 20010019401 - Irie, Nobuyuki ;   et al. | 2001-09-06 |
Exposure method, method of production of density filter, and exposure apparatus App 20010018153 - Irie, Nobuyuki | 2001-08-30 |
Control system for hybrid vehicle Grant 6,262,491 - Kitajima , et al. July 17, 2 | 2001-07-17 |
Projection exposure apparatus having a filter arranged in its projection optical system and method for protecting circuit patterns Grant 6,118,516 - Irie , et al. September 12, 2 | 2000-09-12 |
Alignment method Grant 5,808,910 - Irie , et al. September 15, 1 | 1998-09-15 |
Alignment method and alignment apparatus with a statistic calculation using a plurality of weighted coordinate positions Grant 5,525,808 - Irie , et al. June 11, 1 | 1996-06-11 |