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Method for processing perfluorocarbon, and apparatus therefor Grant 8,231,851 - Irie , et al. July 31, 2 | 2012-07-31 |
Apparatus for processing perfluorocarbon Grant 7,641,867 - Irie , et al. January 5, 2 | 2010-01-05 |
Catalytic exhaust gas decomposition apparatus and exhaust gas decomposition method Grant 7,449,157 - Kanno , et al. November 11, 2 | 2008-11-11 |
Process for treating fluorine compound-containing gas Grant 7,347,980 - Kanno , et al. March 25, 2 | 2008-03-25 |
Method and apparatus for disposing of fluorine-containing compound by decomposition Grant 7,294,315 - Kanno , et al. November 13, 2 | 2007-11-13 |
Process and apparatus for the decomposition of fluorine compounds Grant 7,261,868 - Kanno , et al. August 28, 2 | 2007-08-28 |
Apparatus for processing perfluorocarbon Grant 7,141,221 - Irie , et al. November 28, 2 | 2006-11-28 |
Method and apparatus for treating perfluorocompounds Grant 7,128,882 - Tamata , et al. October 31, 2 | 2006-10-31 |
Apparatus for processing perfluorocarbon App 20060239869 - Irie; Kazuyoshi ;   et al. | 2006-10-26 |
Process for treating fluorine compound-containing gas App 20060120938 - Kanno; Shuichi ;   et al. | 2006-06-08 |
Process for treating fluorine compound-containing gas App 20060093547 - Kanno; Shuichi ;   et al. | 2006-05-04 |
Catalytic exhaust gas decomposition apparatus and exhaust gas decomposition method Grant 7,033,550 - Kanno , et al. April 25, 2 | 2006-04-25 |
Catalytic exhaust gas decomposition apparatus and exhaust gas decomposition method App 20060062705 - Kanno; Shuichi ;   et al. | 2006-03-23 |
Process for treating fluorine compound-containing gas Grant 6,942,841 - Kanno , et al. September 13, 2 | 2005-09-13 |
Process and apparatus for the decomposition of fluorine compounds App 20050089461 - Kanno, Shuichi ;   et al. | 2005-04-28 |
Process for treating fluorine compound-containing gas Grant 6,855,305 - Kanno , et al. February 15, 2 | 2005-02-15 |
Catalytic exhaust gas decomposition apparatus and exhaust gas decomposition method App 20040208802 - Kanno, Shuichi ;   et al. | 2004-10-21 |
Process for treating fluorine compound-containing gas App 20040067185 - Kanno, Shuichi ;   et al. | 2004-04-08 |
Process for treating fluorine compound-containing gas App 20040067186 - Kanno, Shuichi ;   et al. | 2004-04-08 |
Process for treating fluorine compound-containing gas App 20040047786 - Kanno, Shuichi ;   et al. | 2004-03-11 |
Process for treating fluorine compound-containing gas App 20040047784 - Kanno, Shuichi ;   et al. | 2004-03-11 |
Method for processing perfluorocarbon, and apparatus therefor App 20030049190 - Irie, Kazuyoshi ;   et al. | 2003-03-13 |
Method and apparatus for treating perfluorocompounds App 20020131912 - Tamata, Shin ;   et al. | 2002-09-19 |
Method and apparatus for treating perfluorocompounds App 20020131913 - Tamata, Shin ;   et al. | 2002-09-19 |
Apparatus for processing perfluorocarbon App 20010031228 - Irie, Kazuyoshi ;   et al. | 2001-10-18 |
Process For Treating Flourine Compound-containing Gas App 20010001652 - KANNO, SHUICHI ;   et al. | 2001-05-24 |