Patent | Date |
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Method of forming chalcogenide thin film Grant 8,772,077 - Lee , et al. July 8, 2 | 2014-07-08 |
Cleaning Method Of Apparatus For Depositing Carbon Containing Film App 20110114114 - You; Dong-Ho ;   et al. | 2011-05-19 |
Solar Cell And Method Of Fabricating The Same App 20110083735 - Park; Sang-Joon ;   et al. | 2011-04-14 |
Method Of Forming Chalcogenide Thin Film App 20110027976 - Lee; Ki-Hoon ;   et al. | 2011-02-03 |
Method of depositing chalcogenide film for phase-change memory Grant 7,803,656 - Jung , et al. September 28, 2 | 2010-09-28 |
Method of depositing thin film Grant 7,785,664 - Seo , et al. August 31, 2 | 2010-08-31 |
Apparatus, Method For Depositing Thin Film On Wafer And Method For Gap-filling Trench Using The Same App 20100190341 - Park; Sang-Jun ;   et al. | 2010-07-29 |
In-situ thin-film deposition method Grant 7,638,437 - Seo , et al. December 29, 2 | 2009-12-29 |
Chemical vapor deposition method Grant 7,410,676 - Kim , et al. August 12, 2 | 2008-08-12 |
Method of Depositing Thin Film App 20080044567 - Seo; Tae Wook ;   et al. | 2008-02-21 |
Apparatus For Semiconductor Processing App 20080000422 - PARK; Sang-Jun ;   et al. | 2008-01-03 |
Deposition method of TiN thin film having a multi-layer structure Grant 7,253,101 - Park , et al. August 7, 2 | 2007-08-07 |
Heater For Depositing Thin Film App 20070151517 - BAIK; Choon Kum ;   et al. | 2007-07-05 |
Method of depositing thin film using hafnium compound Grant 7,163,719 - Park , et al. January 16, 2 | 2007-01-16 |
Thin film deposition reactor Grant 6,884,297 - Park , et al. April 26, 2 | 2005-04-26 |
Reactor for depositing thin film on wafer Grant 6,852,168 - Park February 8, 2 | 2005-02-08 |
Atomic layer deposition (ALD) thin film deposition equipment having cleaning apparatus and cleaning method Grant 6,796,316 - Park September 28, 2 | 2004-09-28 |
Thin film deposition apparatus for semiconductor Grant 6,740,166 - Choi May 25, 2 | 2004-05-25 |
Apparatus and method for depositing thin film on wafer using atomic layer deposition Grant 6,579,372 - Park June 17, 2 | 2003-06-17 |
Apparatus and method for depositing thin film on wafer using atomic layer deposition Grant 6,573,184 - Park June 3, 2 | 2003-06-03 |
Apparatus for depositing thin films on semiconductor wafer by continuous gas injection Grant 6,231,672 - Choi , et al. May 15, 2 | 2001-05-15 |
Apparatus for depositing thin films on semiconductor wafers Grant 6,183,563 - Choi , et al. February 6, 2 | 2001-02-06 |