Ionen Mikrofabrikations Systeme Gesellschaft mbH
Patent Applications and Registrations
Patent applications and USPTO patent grants for Ionen Mikrofabrikations Systeme Gesellschaft mbH.The latest application filed is for "ion-projection lithographic apparatus with means for aligning the mask image with the substrate".
- Ionen Mikrofabrikations Systeme Gesellschaft mbH - Vienna AT
| Patent | Date |
|---|---|
| Ion-projection lithographic apparatus with means for aligning the mask image with the substrate Grant 4,823,011 - Stengl , et al. April 18, 1 | 1989-04-18 |
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