Patent | Date |
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Device For Improving The Mobility Of Carriers In A Mosfet Channel On Silicon Carbide App 20210273056 - TORREGROSA; Frank ;   et al. | 2021-09-02 |
Support including an electrostatic substrate carrier Grant 11,053,582 - Torregrosa , et al. July 6, 2 | 2021-07-06 |
Method of controlling an implanter operating in plasma immersion Grant 10,923,325 - Torregrosa , et al. February 16, 2 | 2021-02-16 |
Method For Doping Silicon Sheets App 20190164761 - BECHEVET; Bernard ;   et al. | 2019-05-30 |
Method for producing a solar cell involving doping by ion implantation and depositing an outdiffusion barrier Grant 10,263,135 - Boescke , et al. | 2019-04-16 |
A Method Of Controlling An Implanter Operating In Plasma Immersion App 20180358207 - TORREGROSA; Frank ;   et al. | 2018-12-13 |
Electrostatic heating substrate holder which is polarised at high voltage Grant 9,922,856 - Torregrosa , et al. March 20, 2 | 2018-03-20 |
A Method Of Stabilizing A Substrate And A Machine For Performing The Method App 20180031319 - TORREGROSA; Frank ;   et al. | 2018-02-01 |
Electrostatic Heating Substrate Holder Which Is Polarised At High Voltage App 20170178943 - TORREGROSA; Frank ;   et al. | 2017-06-22 |
Method For Installing A Gas Diffusion Device App 20170051401 - TORREGROSA; Frank ;   et al. | 2017-02-23 |
Method of controlling an ion implanter in plasma immersion mode Grant 9,552,962 - Torregrosa , et al. January 24, 2 | 2017-01-24 |
Machine for implanting ions in plasma immersion mode for a low-pressure method Grant 9,534,287 - Torregrosa , et al. January 3, 2 | 2017-01-03 |
Ion implantation machine presenting increased productivity Grant 9,524,853 - Torregrosa , et al. December 20, 2 | 2016-12-20 |
Ion implanter provided with a plurality of plasma source bodies Grant 9,520,274 - Torregrosa , et al. December 13, 2 | 2016-12-13 |
Method For Producing A Solar Cell App 20160240724 - BOESCKE; Tim ;   et al. | 2016-08-18 |
Method For Producing A Contact Structure Of A Photovoltaic Cell And Photovoltaic Cell App 20160225921 - BOESCKE; Tim | 2016-08-04 |
Method For Doping Silicon Sheets App 20160204299 - BECHEVET; Bernard ;   et al. | 2016-07-14 |
An Ion Implantation Machine Presenting Increased Productivity App 20160071695 - TORREGROSA; Frank ;   et al. | 2016-03-10 |
Ion Implanter Provided With A Plurality Of Plasma Source Bodies App 20150325412 - TORREGROSA; Frank ;   et al. | 2015-11-12 |
Control module for an ion implanter Grant 9,035,269 - Torregrosa , et al. May 19, 2 | 2015-05-19 |
Control Module For An Ion Implanter App 20140353525 - Torregrosa; Frank ;   et al. | 2014-12-04 |
Dose measurement device for plasma-immersion ion implantation Grant 8,895,945 - Torregrosa , et al. November 25, 2 | 2014-11-25 |
A Support Including An Electrostatic Substrate Carrier App 20140326176 - Torregrosa; Frank ;   et al. | 2014-11-06 |
Method Of Controlling An Ion Implanter In Plasma Immersion Mode App 20140327358 - Torregrosa; Frank ;   et al. | 2014-11-06 |
Ion Implanter Power Supply Which Is Intended To Limit The Loading Effect App 20140110607 - Torregrosa; FRANK ;   et al. | 2014-04-24 |
Machine For Implanting Ions In Plasma Immersion Mode For A Low-pressure Method App 20140102370 - Torregrosa; Frank ;   et al. | 2014-04-17 |
Dose Measurement Device For Plasma-immersion Ion Implantation App 20130153779 - Torregrosa; Frank ;   et al. | 2013-06-20 |
Detector For Energetic Secondary Electrons App 20130134321 - Torregrosa; Frank ;   et al. | 2013-05-30 |