Patent | Date |
---|
Method for cleaning substrate and substrate processing apparatus Grant 11,264,233 - Otsubo , et al. March 1, 2 | 2022-03-01 |
Substrate processing method, substrate processing apparatus, and composite processing apparatus Grant 11,185,895 - Tanabe , et al. November 30, 2 | 2021-11-30 |
Freeze cleaning apparatus Grant 10,882,082 - Sakurai , et al. January 5, 2 | 2021-01-05 |
Method For Cleaning Substrate And Cleaning Device App 20200321212 - Inukai; Minako ;   et al. | 2020-10-08 |
Method For Cleaning Substrate And Substrate Processing Apparatus App 20200279731 - Otsubo; Kyo ;   et al. | 2020-09-03 |
Method for cleaning substrate and substrate processing apparatus Grant 10,692,715 - Otsubo , et al. | 2020-06-23 |
Freeze Cleaning Apparatus App 20200156121 - SAKURAI; Hideaki ;   et al. | 2020-05-21 |
Substrate Processing Method, Substrate Processing Apparatus, And Composite Processing Apparatus App 20200078834 - TANABE; Mana ;   et al. | 2020-03-12 |
Substrate production method, substrate processing apparatus, and substrate production system Grant 10,486,203 - Sakurai , et al. Nov | 2019-11-26 |
Freeze Cleaning Apparatus App 20180272391 - SAKURAI; Hideaki ;   et al. | 2018-09-27 |
Method For Cleaning Substrate And Cleaning Device App 20180047565 - INUKAI; Minako ;   et al. | 2018-02-15 |
Method For Cleaning Substrate And Substrate Processing Apparatus App 20180047566 - OTSUBO; Kyo ;   et al. | 2018-02-15 |
Substrate Production Method, Substrate Processing Apparatus, And Substrate Production System App 20170274427 - SAKURAI; Hideaki ;   et al. | 2017-09-28 |
Method and device for cleaning semiconductor substrate Grant 8,961,696 - Tomita , et al. February 24, 2 | 2015-02-24 |
Cleaning apparatus for semiconductor wafer Grant 8,567,420 - Inukai , et al. October 29, 2 | 2013-10-29 |
Method And Device For Cleaning Semiconductor Substrate App 20130068257 - TOMITA; Hiroshi ;   et al. | 2013-03-21 |
Template cleaning method, system, and apparatus Grant 8,375,964 - Tomita , et al. February 19, 2 | 2013-02-19 |
Exhaust Gas Treatment Device And Method And Semiconductor Manufacturing System App 20120118334 - OKUCHI; Hisashi ;   et al. | 2012-05-17 |
Method of manufacturing semiconductor device Grant 8,114,755 - Mizushima , et al. February 14, 2 | 2012-02-14 |
Semiconductor Substrate Cleaning Method Using Bubble/chemical Mixed Cleaning Liquid App 20110088731 - TOMITA; Hiroshi ;   et al. | 2011-04-21 |
Cleaning Method For Semiconductor Wafer App 20110061684 - TOMITA; Hiroshi ;   et al. | 2011-03-17 |
Template Cleaning Method, System, And Apparatus App 20100132742 - TOMITA; Hiroshi ;   et al. | 2010-06-03 |
Cleaning Apparatus For Semiconductor Wafer And Cleaning Method For Semiconductor Wafer App 20090255558 - Inukai; Minako ;   et al. | 2009-10-15 |
Substrate Processing Apparatus And Substrate Processing Method App 20090250431 - INUKAI; Minako ;   et al. | 2009-10-08 |
Method Of Manufacturing Semiconductor Device App 20090011570 - Mizushima; Ichiro ;   et al. | 2009-01-08 |
Semiconductor Substrate Cleaning Method Using Bubble/chemical Mixed Cleaning Liquid App 20080308132 - Tomita; Hiroshi ;   et al. | 2008-12-18 |