name:-0.12172102928162
name:-0.12796497344971
name:-0.028664827346802
INTEVAC, INC. Patent Filings

INTEVAC, INC.

Patent Applications and Registrations

Patent applications and USPTO patent grants for INTEVAC, INC..The latest application filed is for "system for forming nano-laminate optical coating".

Company Profile
35.134.117
  • INTEVAC, INC. - Santa Clara CA US
  • Intevac, Inc - Santa Clara CA
  • INTEVAC,INC. -
*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.
Trademarks
Patent Activity
PatentDate
System For Forming Nano-laminate Optical Coating
App 20220185726 - Bluck; Terry ;   et al.
2022-06-16
Ion implantation for modification of thin film coatings on glass
Grant 11,255,013 - Bluck , et al. February 22, 2
2022-02-22
System for forming nano-laminate optical coating
Grant 11,236,013 - Bluck , et al. February 1, 2
2022-02-01
Multi-colored dielectric coating
Grant 11,187,834 - Bluck , et al. November 30, 2
2021-11-30
Compact Proximity Focused Image Sensor
App 20210366972 - Costello; Kenneth ;   et al.
2021-11-25
Creation Of Distributed Voids In Thin Films
App 20210355579 - Bluck; Terry ;   et al.
2021-11-18
System With Dual-motion Substrate Carriers
App 20210087674 - Bluck; Terry
2021-03-25
Optical coating having nano-laminate for improved durability
Grant 10,955,589 - Bluck , et al. March 23, 2
2021-03-23
Multi-piece substrate holder and alignment mechanism
Grant 10,854,772 - Vu , et al. December 1, 2
2020-12-01
Method To Produce High Density Diamond Like Carbon Thin Films
App 20200354826 - Harkness, IV; Samuel D. ;   et al.
2020-11-12
Inline Vacuum Processing System With Substrate And Carrier Cooling
App 20200350188 - Bluck; Terry ;   et al.
2020-11-05
System architecture for combined static and pass-by processing
Grant 10,752,987 - Leahey , et al. A
2020-08-25
Thermally assisted negative electron affinity photocathode
Grant 10,692,683 - Costello , et al.
2020-06-23
Hybrid System Architecture For Thin Film Deposition
App 20200194289 - Bluck; Terry
2020-06-18
Wafer plate and mask arrangement for substrate fabrication
Grant 10,679,883 - Bluck , et al.
2020-06-09
Ion implant system having grid assembly
Grant 10,636,935 - Adibi , et al.
2020-04-28
System of height and alignment rollers for precise alignment of wafers for ion implantation
Grant 10,559,710 - Runstadler, Jr. , et al. Feb
2020-02-11
Multi-colored Dielectric Coating
App 20190383976 - Bluck; Terry ;   et al.
2019-12-19
Multi-colored Dielectric Coating And Uv Inkjet Printing
App 20190383977 - Bluck; Terry ;   et al.
2019-12-19
Patterned chuck for substrate processing
Grant 10,446,430 - Bluck , et al. Oc
2019-10-15
Adaptive XDR via reset and mean signal values
Grant 10,425,589 - Trieu , et al. Sept
2019-09-24
In line fan out system
Grant 10,418,260 - Bluck , et al. Sept
2019-09-17
Thermally Assisted Negative Electron Affinity Photocathode
App 20190080875 - Costello; Kenneth A. ;   et al.
2019-03-14
Biocular compact collimation apparatus
Grant 10,197,802 - Hoppe Fe
2019-02-05
Multi-piece Substrate Holder And Alignment Mechanism
App 20190027635 - Vu; Hoang Huy ;   et al.
2019-01-24
System For Accurate Alignment Of Wafers For Ion Implantation
App 20190027636 - Runstadler, JR.; William Eugene ;   et al.
2019-01-24
System For Forming Nano-laminate Optical Coating
App 20190025469 - Bluck; Terry ;   et al.
2019-01-24
Adaptive Xdr Via Reset And Mean Signal Values
App 20190020805 - Trieu; Simeon Su-Ming ;   et al.
2019-01-17
Optical Coating Having Nano-laminate For Improved Durability
App 20180348409 - Bluck; Terry ;   et al.
2018-12-06
System architecture for vacuum processing
Grant 10,115,617 - Bluck , et al. October 30, 2
2018-10-30
Sputtering system and method using direction-dependent scan speed or power
Grant 10,106,883 - Shah , et al. October 23, 2
2018-10-23
See Through Axial High Order Prism
App 20180252849 - Hoppe; Michael James
2018-09-06
System and method for bi-facial processing of substrates
Grant 10,062,600 - Bluck , et al. August 28, 2
2018-08-28
System Architecture For Combined Static And Pass-by Processing
App 20180171463 - Leahey; Patrick ;   et al.
2018-06-21
Large Area Energetic Ion Source
App 20180096823 - Bluck; Terry ;   et al.
2018-04-05
System architecture for combined static and pass-by processing
Grant 9,914,994 - Leahey , et al. March 13, 2
2018-03-13
In Line Fan Out System
App 20180061689 - Bluck; Terry ;   et al.
2018-03-01
Method to produce highly transparent hydrogenated carbon protective coating for transparent substrates
Grant 9,896,758 - Chen , et al. February 20, 2
2018-02-20
Narrow source for physical vapor deposition processing
Grant 9,892,890 - Bluck , et al. February 13, 2
2018-02-13
Biocular Compact Collimation Apparatus
App 20180031835 - Hoppe; Michael James
2018-02-01
Ion Implantation For Modification Of Thin Film Coatings On Glass
App 20180023190 - Bluck; Terry ;   et al.
2018-01-25
Substrate processing system and method
Grant 9,875,922 - Pederson , et al. January 23, 2
2018-01-23
Ion implantation for modification of thin film coatings on glass
Grant 9,850,570 - Bluck , et al. December 26, 2
2017-12-26
Ion Implant System Having Grid Assembly
App 20170345964 - Adibi; Babak ;   et al.
2017-11-30
Ultra-thin Corrosion Resistant Hard Overcoat For Hard Disk Media
App 20170243610 - Bluck; Terry
2017-08-24
Smudge, Scratch And Wear Resistant Glass Via Ion Implantation
App 20170242503 - Adibi; Babak ;   et al.
2017-08-24
Ion implant system having grid assembly
Grant 9,741,894 - Adibi , et al. August 22, 2
2017-08-22
Patterned Chuck For Substrate Processing
App 20170236740 - Bluck; Terry ;   et al.
2017-08-17
Image intensifier with indexed compliant anode assembly
Grant 9,734,977 - Costello , et al. August 15, 2
2017-08-15
Method To Produce Highly Transparent Hydrogenated Carbon Protective Coating For Transparent Substrates
App 20170152592 - Chen; David Fang Wei ;   et al.
2017-06-01
Elevator linear motor drive
Grant 9,633,880 - Scollay April 25, 2
2017-04-25
Method to produce highly transparent hydrogenated carbon protective coating for transparent substrates
Grant 9,605,340 - Chen , et al. March 28, 2
2017-03-28
Wafer Plate And Mask Arrangement For Substrate Fabrication
App 20170062258 - Bluck; Terry ;   et al.
2017-03-02
Grid for plasma ion implant
Grant 9,583,661 - Prabhakar , et al. February 28, 2
2017-02-28
System Architecture For Vacuum Processing
App 20170025300 - Bluck; Terry ;   et al.
2017-01-26
Image Intensifier With Indexed Compliant Anode Assembly
App 20170018391 - Costello; Kenneth ;   et al.
2017-01-19
Ion Implantation For Modification Of Thin Film Coatings On Glass
App 20170009337 - Bluck; Terry ;   et al.
2017-01-12
Implant masking and alignment system with rollers
Grant 9,543,114 - Adibi , et al. January 10, 2
2017-01-10
System architecture for vacuum processing
Grant 9,502,276 - Bluck , et al. November 22, 2
2016-11-22
Textured Ar With Protective Thin Film
App 20160332908 - Bluck; Terry ;   et al.
2016-11-17
Solar Cells Having Graded Doped Regions And Methods Of Making Solar Cells Having Graded Doped Regions
App 20160322523 - Hieslmair; Henry ;   et al.
2016-11-03
Linear Scanning Sputtering System And Method
App 20160268110 - Brown; David Ward ;   et al.
2016-09-15
Substrate Processing System And Method
App 20160233122 - Pederson; Terry ;   et al.
2016-08-11
Grid For Plasma Ion Implant
App 20160204295 - Prabhakar; Vinay ;   et al.
2016-07-14
Ion Implant System Having Grid Assembly
App 20160181465 - Adibi; Babak ;   et al.
2016-06-23
Method For Sputtering System And Using Counterweight
App 20160177438 - Shah; Vinay ;   et al.
2016-06-23
Sputtering System And Method For Highly Magnetic Materials
App 20160133445 - Brown; David Ward ;   et al.
2016-05-12
Substrate processing system and method
Grant 9,324,598 - Pederson , et al. April 26, 2
2016-04-26
Grid for plasma ion implant
Grant 9,318,332 - Prabhakar , et al. April 19, 2
2016-04-19
Ion implant system having grid assembly
Grant 9,303,314 - Adibi , et al. April 5, 2
2016-04-05
Implant Masking And Alignment
App 20160042913 - Adibi; Babak ;   et al.
2016-02-11
Coating For Glass With Improved Scratch/wear Resistance And Oleophobic Properties
App 20160023941 - Brown; David Ward ;   et al.
2016-01-28
System and method for dual-sided sputter etch of substrates
Grant 9,165,587 - Barnes , et al. October 20, 2
2015-10-20
Processing tool with combined sputter and evaporation deposition sources
Grant 9,157,145 - Eristoff , et al. October 13, 2
2015-10-13
Sputtering System And Method For Highly Magnetic Materials
App 20150235824 - Brown; David Ward ;   et al.
2015-08-20
System And Method For Bi-facial Processing Of Substrates
App 20150170947 - Bluck; Terry ;   et al.
2015-06-18
Inductive/capacitive hybrid plasma source and system with such chamber
Grant 9,034,143 - Cho , et al. May 19, 2
2015-05-19
Ion implant system having grid assembly
Grant 8,997,688 - Adibi , et al. April 7, 2
2015-04-07
High throughput load lock for solar wafers
Grant 8,998,553 - Shah , et al. April 7, 2
2015-04-07
System and method for substrate transport
Grant 8,992,153 - Scollay , et al. March 31, 2
2015-03-31
Ion Implant System Having Grid Assembly
App 20150072461 - Adibi; Babak ;   et al.
2015-03-12
Backside-thinned image sensor using Al.sub.2 O.sub.3 surface passivation
Grant 8,975,668 - Costello , et al. March 10, 2
2015-03-10
Elevator Linear Motor Drive
App 20140377040 - Scollay; Stuart
2014-12-25
Sputtering System And Method Using Counterweight
App 20140332376 - Shah; Vinay ;   et al.
2014-11-13
Application specific implant system and method for use in solar cell fabrications
Grant 8,871,619 - Adibi , et al. October 28, 2
2014-10-28
Sputtering System And Method Using Direction-dependent Scan Speed Or Power
App 20140311893 - Shah; Vinay ;   et al.
2014-10-23
Elevator linear motor drive
Grant 8,834,088 - Scollay September 16, 2
2014-09-16
System and method for processing substrates with detachable mask
Grant 8,795,466 - Barnes , et al. August 5, 2
2014-08-05
System and method for dual-sided sputter etch of substrates
Grant 8,784,622 - Barnes , et al. July 22, 2
2014-07-22
Solar Cells Having Graded Doped Regions And Methods Of Making Solar Cells Having Graded Doped Regions
App 20140166087 - Hieslmair; Henry ;   et al.
2014-06-19
Grid For Plasma Ion Implant
App 20140170795 - Prabhakar; Vinay ;   et al.
2014-06-19
Plasma grid implant system for use in solar cell fabrications
Grant 8,749,053 - Adibi , et al. June 10, 2
2014-06-10
Process for optimization of island to trench ratio in patterned media
Grant 8,715,515 - Nguyen , et al. May 6, 2
2014-05-06
Method And Apparatus To Produce High Density Overcoats
App 20140102888 - Harkness, IV; Samuel D. ;   et al.
2014-04-17
Method and apparatus for precision surface modification in nano-imprint lithography
Grant 8,697,189 - Xu , et al. April 15, 2
2014-04-15
Method for ion implant using grid assembly
Grant 8,697,552 - Adibi , et al. April 15, 2
2014-04-15
Solar cell fabrication with faceting and ion implantation
Grant 8,697,553 - Adibi , et al. April 15, 2
2014-04-15
Collimator bonding structure and method
Grant 8,698,925 - Costello , et al. April 15, 2
2014-04-15
Method and apparatus for masking solar cell substrates for deposition
Grant 8,677,929 - Berger , et al. March 25, 2
2014-03-25
Method To Produce Highly Transparent Hydrogenated Carbon Protective Coating For Transparent Substrates
App 20140008214 - Chen; David Fang Wei ;   et al.
2014-01-09
Narrow Source For Physical Vapor Deposition Processing
App 20130284594 - Bluck; Terry ;   et al.
2013-10-31
System Architecture For Vacuum Processing
App 20130287526 - Bluck; Terry ;   et al.
2013-10-31
Dual-mask Arrangement For Solar Cell Fabrication
App 20130276978 - Bluck; Terry ;   et al.
2013-10-24
System Architecture For Combined Static And Pass-by Processing
App 20130161183 - Leahey; Patrick ;   et al.
2013-06-27
High Throughput Load Lock For Solar Wafers
App 20130149075 - Shah; Vinay ;   et al.
2013-06-13
Substrate Processing System And Method
App 20130115764 - Pederson; Terry ;   et al.
2013-05-09
Linear Scanning Sputtering System And Method
App 20130112546 - Brown; David Ward ;   et al.
2013-05-09
BACKSIDE-THINNED IMAGE SENSOR USING Al2O3 SURFACE PASSIVATION
App 20130105928 - COSTELLO; Kenneth A. ;   et al.
2013-05-02
Solar Wafer Electrostatic Chuck
App 20130105087 - Cho; Young Kyu ;   et al.
2013-05-02
System Architecture For Plasma Processing Solar Wafers
App 20130109189 - Cho; Young Kyu ;   et al.
2013-05-02
System And Method For Commercial Fabrication Of Patterned Media
App 20130098761 - Fairbairn; Kevin P. ;   et al.
2013-04-25
Low energy portable low-light camera with wavelength cutoff
Grant 8,421,012 - Aebi April 16, 2
2013-04-16
Inductive/capacitive Hybrid Plasma Source And System With Such Chamber
App 20130087531 - Cho; Young Kyu ;   et al.
2013-04-11
Tools and methods for mounting transport rails in a substrate processing system
Grant 8,382,965 - Scollay February 26, 2
2013-02-26
Optical beam spectrometer with movable lens
Grant 8,373,856 - Carron , et al. February 12, 2
2013-02-12
Method for optimized removal of wafer from electrostatic chuck
Grant 8,363,378 - Bluck , et al. January 29, 2
2013-01-29
Processing thin wafers
Grant 8,354,001 - Bluck , et al. January 15, 2
2013-01-15
System and method for commercial fabrication of patterned media
Grant 8,349,196 - Fairbairn , et al. January 8, 2
2013-01-08
Processing thin wafers
Grant 8,206,551 - Bluck , et al. June 26, 2
2012-06-26
Dry Etching Method Of Surface Texture Formation On Silicon Wafer
App 20120138139 - CHO; Young Kyu
2012-06-07
Ion Implant System Having Grid Assembly
App 20120125259 - Adibi; Babak ;   et al.
2012-05-24
Method For Ion Implant Using Grid Assembly
App 20120129325 - Adibi; Babak ;   et al.
2012-05-24
System And Method For Commercial Fabrication Of Patterned Media
App 20120090992 - Fairbairn; Kevin P. ;   et al.
2012-04-19
Optical beam spectrometer with movable lens
Grant 8,125,637 - Carron , et al. February 28, 2
2012-02-28
Method of and apparatus utilizing carbon cord for evaporation of metals
Grant 8,114,339 - Wall , et al. February 14, 2
2012-02-14
Evaporative system for solar cell fabrication
Grant 8,087,380 - Bluck , et al. January 3, 2
2012-01-03
Collimator Bonding Structure And Method
App 20110261239 - COSTELLO; Kenneth A. ;   et al.
2011-10-27
Adjustable Shadow Mask Assembly For Use In Solar Cell Fabrications
App 20110192993 - Chun; Moon ;   et al.
2011-08-11
Apparatus And Methods For Transporting And Processing Substrates
App 20110158773 - BLUCK; Terry ;   et al.
2011-06-30
Evaporative System For Solar Cell Fabrication
App 20110104847 - BLUCK; Terry ;   et al.
2011-05-05
Apparatus and methods for transporting and processing substrates
Grant 7,901,539 - Bluck , et al. March 8, 2
2011-03-08
Electrostatic Chuck
App 20100326602 - BLUCK; Terry ;   et al.
2010-12-30
Process For Optimization Of Island To Trench Ratio In Patterned Media
App 20100237042 - Nguyen; Houng T. ;   et al.
2010-09-23
Method For Optimized Removal Of Wafer From Electrostatic Chuck
App 20100208409 - Bluck; Terry ;   et al.
2010-08-19
Method And Apparatus For Precision Surface Modification In Nano-imprint Lithography
App 20100098862 - XU; Ren ;   et al.
2010-04-22
System And Method For Processing Substrates With Detachable Mask
App 20100003768 - BARNES; Michael S. ;   et al.
2010-01-07
System And Method For Substrate Transport
App 20090324369 - SCOLLAY; Stuart ;   et al.
2009-12-31
Tools And Methods For Mounting Transport Rails In A Substrate Processing System
App 20090279990 - Scollay; Stuart
2009-11-12
Processing thin wafers
Grant 7,611,322 - Bluck , et al. November 3, 2
2009-11-03
Semiconductor die attachment for high vacuum tubes
Grant 7,607,560 - Costello October 27, 2
2009-10-27
Semiconductor die attachment for high vacuum tubes
Grant 7,608,533 - Costello , et al. October 27, 2
2009-10-27
Processing Thin Wafers
App 20090252582 - BLUCK; Terry ;   et al.
2009-10-08
Apparatus And Methods For Transporting And Processing Substrates
App 20090191030 - Bluck; Terry ;   et al.
2009-07-30
System And Method For Dual-sided Sputter Etch Of Substrates
App 20090145881 - Barnes; Michael S. ;   et al.
2009-06-11
System And Method For Dual-sided Sputter Etch Of Substrates
App 20090145752 - Barnes; Michael S. ;   et al.
2009-06-11
System And Method For Commercial Fabrication Of Patterned Media
App 20090145879 - Fairbairn; Kevin P. ;   et al.
2009-06-11
Elevator Linear Motor Drive
App 20090123256 - Scollay; Stuart
2009-05-14
Photocathode structure and operation
Grant 7,531,826 - Costello , et al. May 12, 2
2009-05-12
Electrostatic Chuck Apparatus
App 20090086400 - Samir; Tugrul ;   et al.
2009-04-02
Electrostatic Chuck Apparatus
App 20090086401 - Samir; Tugrul ;   et al.
2009-04-02
Apparatus And Methods For Transporting And Processing Substrates
App 20090078374 - Bluck; Terry ;   et al.
2009-03-26
Backside imaging through a doped layer
Grant 7,479,686 - Costello , et al. January 20, 2
2009-01-20
Hybrid Etch Chamber With Decoupled Plasma Controls
App 20090004873 - Yang; Jang Gyoo ;   et al.
2009-01-01
Magnetically Coupled Valve Actuator
App 20080191155 - Scollay; Stuart
2008-08-14
Apparatus and methods for transporting and processing substrates
App 20080066678 - Bluck; Terry ;   et al.
2008-03-20
Photocathode structure and operation
App 20070034987 - Costello; Kenneth A. ;   et al.
2007-02-15
Wafer fab
App 20060102078 - Fairbairn; Kevin P. ;   et al.
2006-05-18
Processing thin wafers
App 20060102285 - Bluck; Terry ;   et al.
2006-05-18
Backside thinning of image array devices
Grant 7,042,060 - Costello , et al. May 9, 2
2006-05-09
Semiconductor die attachment for high vacuum tubes
Grant 7,012,328 - Costello , et al. March 14, 2
2006-03-14
Backside thinning of image array devices
Grant 7,005,637 - Costello , et al. February 28, 2
2006-02-28
Capacitance sensing for substrate cooling
Grant 7,000,418 - Rogers , et al. February 21, 2
2006-02-21
Backthinned CMOS sensor with low fixed pattern noise
Grant 6,969,839 - Costello November 29, 2
2005-11-29
Semiconductor die attachment for high vacuum tubes
App 20050258212 - Costello, Kenneth A.
2005-11-24
Semiconductor die attachment for high vacuum tubes
App 20050253242 - Costello, Kenneth A. ;   et al.
2005-11-17
Capacitance sensing for substrate cooling
App 20050252227 - Rogers, James H. ;   et al.
2005-11-17
Wavelength extension for backthinned silicon image arrays
Grant 6,943,425 - Costello September 13, 2
2005-09-13
Wavelength Extension For Backthinned Silicon Image Arrays
App 20050161703 - Costello, Kenneth A.
2005-07-28
Disk coating system
Grant 6,919,001 - Fairbairn , et al. July 19, 2
2005-07-19
Unitary vacuum tube incorporating high voltage isolation
Grant 6,837,766 - Costello January 4, 2
2005-01-04
Backside thinning of image array devices
App 20040180462 - Costello, Kenneth A. ;   et al.
2004-09-16
Backside Thinning Of Image Array Devices
App 20040169248 - Costello, Kenneth A. ;   et al.
2004-09-02
Backthinned CMOS sensor with low fixed pattern noise
App 20040149888 - Costello, Kenneth A.
2004-08-05
Electron bombarded passive pixel sensor imaging
Grant 6,657,178 - Aebi December 2, 2
2003-12-02
Method and apparatus for multi-target sputtering
Grant 6,635,154 - Johnson , et al. October 21, 2
2003-10-21
Substrate processing system
Grant 6,517,691 - Bluck , et al. February 11, 2
2003-02-11
Unitary vacuum tube incorporating high voltage isolation
Grant 6,507,147 - Costello January 14, 2
2003-01-14
Electron bombarded active pixel sensor camera incorporating gain control
Grant 6,307,586 - Costello October 23, 2
2001-10-23
Electron bombarded active pixel sensor
Grant 6,285,018 - Aebi , et al. September 4, 2
2001-09-04
Methods and apparatus for processing insulating substrates
Grant 6,228,429 - Bluck , et al. May 8, 2
2001-05-08
Hard disk vapor lube
Grant 6,183,831 - Hughes , et al. February 6, 2
2001-02-06
Sputter coating system and method using substrate electrode
Grant 5,891,311 - Lewis , et al. April 6, 1
1999-04-06
Methods and apparatus for linear scan magnetron sputtering
Grant 5,873,989 - Hughes , et al. February 23, 1
1999-02-23
Methods and apparatus for sputtering with rotating magnet sputter sources
Grant 5,830,327 - Kolenkow November 3, 1
1998-11-03
Substrate handling and processing system for flat panel displays
Grant 5,738,767 - Coad , et al. April 14, 1
1998-04-14
Heterojunction electron transfer device
Grant 5,576,559 - Davis November 19, 1
1996-11-19
Hybrid photomultiplier tube with ion deflector
Grant 5,475,227 - LaRue December 12, 1
1995-12-12
Substrate handling and processing system
Grant 5,425,611 - Hughes , et al. June 20, 1
1995-06-20
Method for fabrication of a microchannel electron multiplier
Grant 5,378,955 - Scott, Jr. , et al. January 3, 1
1995-01-03
Hybrid photomultiplier tube with high sensitivity
Grant 5,374,826 - LaRue , et al. December 20, 1
1994-12-20
Surveillance system having a microchannel image intensifier tube
Grant 5,373,320 - Johnson , et al. December 13, 1
1994-12-13
Microchannel image intensifier tube with novel sealing feature
Grant 5,369,267 - Johnson , et al. November 29, 1
1994-11-29
Microchannel plate with coated output electrode to reduce spurious discharges
Grant 5,359,187 - Weiss October 25, 1
1994-10-25
Focused electron-bombarded detector
Grant 5,326,978 - Aebi , et al. July 5, 1
1994-07-05
System for substrate cooling in an evacuated environment
Grant 5,287,914 - Hughes * February 22, 1
1994-02-22
Feedback limited microchannel plate
Grant 5,268,612 - Aebi , et al. December 7, 1
1993-12-07
MBE effusion source with asymmetrical heaters
Grant 5,253,266 - Knodle, III , et al. October 12, 1
1993-10-12
Substrate handling and processing system
Grant 5,215,420 - Hughes , et al. June 1, 1
1993-06-01
System for substrate cooling in an evacuated environment
Grant 5,181,556 - Hughes January 26, 1
1993-01-26
Company Registrations

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