Inazuki; Yukio

Patent Applications and Registrations

Patent applications and USPTO patent grants for Inazuki; Yukio.The latest application filed is for "substrate with multilayer reflection film for euv mask blank, manufacturing method thereof, and euv mask blank".

Company Profile

23.94.103

Inazuki; Yukio - Joetsu JP
INAZUKI; Yukio - Joetsu-shi JP
Inazuki; Yukio - Niigata JP
Inazuki; Yukio - Jyoetsu JP
- Joetsu JP
Inazuki; Yukio - Niigata-ken JP
Inazuki; Yukio - Nakakubiki-gun JP
Inazuki; Yukio - Kubiki-mura JP
Inazuki; Yukio - Gunma-ken JP
Inazuki; Yukio - Sayama JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Method of manufacturing reflective mask blank, reflective mask blank, and method of manufacturing reflective mask Grant 11,415,874 - Terasawa , et al. August 16, 2	2022-08-16
Photomask blank and method for preparing photomask Grant 11,327,393 - Kosaka , et al. May 10, 2	2022-05-10
Substrate With Multilayer Reflection Film For Euv Mask Blank, Manufacturing Method Thereof, And Euv Mask Blank App 20220075255 - INAZUKI; Yukio ; et al.	2022-03-10
Substrate With Multilayer Reflection Film For Euv Mask Blank, Manufacturing Method Thereof, And Euv Mask Blank App 20220075254 - INAZUKI; Yukio ; et al.	2022-03-10
Substrate Defect Inspection Method And Substrate Defect Inspection Apparatus App 20220065797 - TERASAWA; Tsuneo ; et al.	2022-03-03
Substrate with Film for Reflective Mask Blank, and Reflective Mask Blank App 20210333702 - TERASAWA; Tsuneo ; et al.	2021-10-28
Reflective Mask Blank, Method Of Manufacturing Thereof, And Reflective Mask App 20210318607 - KOSAKA; Takuro ; et al.	2021-10-14
Photomask blank, method of manufacturing photomask, and photomask Grant 11,143,949 - Inazuki , et al. October 12, 2	2021-10-12
Photomask blank, and method of manufacturing photomask Grant 11,131,920 - Inazuki , et al. September 28, 2	2021-09-28
Method Of Manufacturing Reflective Mask Blank, And Reflective Mask Blank App 20210278759 - INAZUKI; Yukio ; et al.	2021-09-09
Halftone phase shift mask blank and halftone phase shift mask Grant 10,989,999 - Inazuki , et al. April 27, 2	2021-04-27
Method Of Manufacturing Reflective Mask Blank, Reflective Mask Blank, And Method Of Manufacturing Reflective Mask App 20210080819 - TERASAWA; Tsuneo ; et al.	2021-03-18
Halftone phase shift photomask blank, making method, and halftone phase shift photomask Grant 10,859,904 - Kosaka , et al. December 8, 2	2020-12-08
Method for preparing halftone phase shift mask blank, halftone phase shift mask blank, halftone phase shift mask, and thin film forming apparatus Grant 10,809,611 - Inazuki October 20, 2	2020-10-20
Photomask blank and method for producing photomask Grant 10,788,747 - Inazuki , et al. September 29, 2	2020-09-29
Photomask blank and photomask Grant 10,782,609 - Ozawa , et al. Sept	2020-09-22
Method for preparing photomask blank, photomask blank, method for preparing photomask, photomask, and metallic chromium target Grant 10,782,608 - Inazuki , et al. Sept	2020-09-22
Photomask Blank And Method For Preparing Photomask App 20200264502 - KOSAKA; Takuro ; et al.	2020-08-20
Halftone phase shift photomask blank Grant 10,747,098 - Inazuki , et al. A	2020-08-18
Halftone Phase Shift Photomask Blank, Making Method, And Halftone Phase Shift Photomask App 20200249561 - Kind Code	2020-08-06
Photomask blank Grant 10,712,654 - Fukaya , et al.	2020-07-14
Photomask Blank, And Method Of Manufacturing Photomask App 20200192215 - INAZUKI; Yukio ; et al.	2020-06-18
Photomask blank and method for preparing photomask Grant 10,678,125 - Kosaka , et al.	2020-06-09
Halftone phase shift photomask blank, making method, and halftone phase shift photomask Grant 10,670,957 - Kosaka , et al.	2020-06-02
Photomask blank, and preparation method thereof Grant 10,656,516 - Kosaka , et al.	2020-05-19
Photomask blank, method for manufacturing photomask, and mask pattern formation method Grant 10,585,345 - Irie , et al.	2020-03-10
Photomask blank, and preparation method thereof Grant 10,564,537 - Kosaka , et al. Feb	2020-02-18
Phase shift mask blank, phase shift mask, and blank preparing method Grant 10,545,401 - Inazuki , et al. Ja	2020-01-28
Halftone Phase Shift Mask Blank And Halftone Phase Shift Mask App 20200026181 - INAZUKI; Yukio ; et al.	2020-01-23
Method For Preparing Halftone Phase Shift Mask Blank, Halftone Phase Shift Mask Blank, Halftone Phase Shift Mask, And Thin Film App 20200026180 - INAZUKI; Yukio	2020-01-23
Photomask Blank, Method Of Manufacturing Photomask, And Photomask App 20190369482 - INAZUKI; Yukio ; et al.	2019-12-05
Mask blank and making method Grant 10,488,750 - Inazuki , et al. Nov	2019-11-26
Method for preparing halftone phase shift mask blank, halftone phase shift mask blank, halftone phase shift mask, and thin film forming apparatus Grant 10,466,582 - Inazuki No	2019-11-05
Halftone phase shift mask blank and halftone phase shift mask Grant 10,466,583 - Inazuki , et al. No	2019-11-05
Halftone phase shift photomask blank and making method Grant 10,459,333 - Kosaka , et al. Oc	2019-10-29
Halftone phase shift mask blank and halftone phase shift mask Grant 10,372,030 - Sasamoto , et al.	2019-08-06
Photomask Blank And Method For Producing Photomask App 20190146329 - INAZUKI; Yukio ; et al.	2019-05-16
Halftone Phase Shift Photomask Blank And Making Method App 20190064650 - KOSAKA; Takuro ; et al.	2019-02-28
Photomask Blank And Photomask App 20190004420 - OZAWA; Ryoken ; et al.	2019-01-03
Phase Shift Mask Blank, Phase Shift Mask, And Blank Preparing Method App 20180356720 - INAZUKI; Yukio ; et al.	2018-12-13
Halftone phase shift photomask blank and making method Grant 10,146,122 - Kosaka , et al. De	2018-12-04
Method of manufacturing photomask blank and photomask blank Grant 10,120,274 - Fukaya , et al. November 6, 2	2018-11-06
Photomask Blank, Method For Manufacturing Photomask, And Mask Pattern Formation Method App 20180267398 - IRIE; Shigeo ; et al.	2018-09-20
Phase shift mask blank, phase shift mask, and blank preparing method Grant 10,078,260 - Inazuki , et al. September 18, 2	2018-09-18
Halftone Phase Shift Photomask Blank App 20180259842 - INAZUKI; Yukio ; et al.	2018-09-13
Photomask Blank App 20180259843 - FUKAYA; Souichi ; et al.	2018-09-13
Method For Preparing Photomask Blank, Photomask Blank, Method For Preparing Photomask, Photomask, And Metallic Chromium Target App 20180224737 - INAZUKI; Yukio ; et al.	2018-08-09
Photomask Blank, And Preparation Method Thereof App 20180180986 - KOSAKA; Takuro ; et al.	2018-06-28
Photomask Blank, And Preparation Method Thereof App 20180180985 - KOSAKA; Takuro ; et al.	2018-06-28
Halftone Phase Shift Mask Blank And Halftone Phase Shift Mask App 20180088457 - INAZUKI; Yukio ; et al.	2018-03-29
Halftone Phase Shift Photomask Blank, Making Method, And Halftone Phase Shift Photomask App 20180088456 - KOSAKA; Takuro ; et al.	2018-03-29
Halftone phase shift mask blank, halftone phase shift mask, and pattern exposure method Grant 9,927,695 - Kosaka , et al. March 27, 2	2018-03-27
Method For Preparing Halftone Phase Shift Mask Blank, Halftone Phase Shift Mask Blank, Halftone Phase Shift Mask, And Thin Film Forming Apparatus App 20180059532 - INAZUKI; Yukio	2018-03-01
Photomask blank and method for preparing photomask Grant 9,880,459 - Sasamoto , et al. January 30, 2	2018-01-30
Photomask blank Grant 9,864,266 - Sasamoto , et al. January 9, 2	2018-01-09
Silicon target for sputtering film formation and method for forming silicon-containing thin film Grant 9,812,300 - Yoshikawa , et al. November 7, 2	2017-11-07
Designing of photomask blank and photomask blank Grant 9,798,229 - Sasamoto , et al. October 24, 2	2017-10-24
Method for preparing halftone phase shift photomask blank Grant 9,778,559 - Kosaka , et al. October 3, 2	2017-10-03
Photomask Blank And Method For Preparing Photomask App 20170255095 - KOSAKA; Takuro ; et al.	2017-09-07
Halftone Phase Shift Photomask Blank And Making Method App 20170212417 - KOSAKA; Takuro ; et al.	2017-07-27
Photomask blank and method for manufacturing photomask blank Grant 9,709,885 - Inazuki , et al. July 18, 2	2017-07-18
Photomask blank manufacturing method, photomask blank, photomask, and pattern transfer method Grant 9,689,066 - Yoshikawa , et al. June 27, 2	2017-06-27
Binary photomask blank, preparation thereof, and preparation of binary photomask Grant 9,651,858 - Inazuki , et al. May 16, 2	2017-05-16
Halftone phase shift photomask blank and making method Grant 9,645,485 - Kosaka , et al. May 9, 2	2017-05-09
Method Of Manufacturing Photomask Blank And Photomask Blank App 20170123306 - FUKAYA; Souichi ; et al.	2017-05-04
Substrate Cleaning Apparatus And Method For Cleaning Substrate For Substrate Related To Photomask App 20170110355 - NUMANAMI; Tsuneo ; et al.	2017-04-20
Photomask blank Grant 9,618,838 - Fukaya , et al. April 11, 2	2017-04-11
Photomask Blank App 20170068154 - Sasamoto; Kouhei ; et al.	2017-03-09
Method of manufacturing photomask blank and photomask blank Grant 9,581,892 - Fukaya , et al. February 28, 2	2017-02-28
Photomask Blank And Method For Preparing Photomask App 20170031237 - SASAMOTO; Kouhei ; et al.	2017-02-02
Photomask Blank And Method For Manufacturing Photomask Blank App 20170023855 - INAZUKI; Yukio ; et al.	2017-01-26
Photomask blank Grant 9,541,823 - Sasamoto , et al. January 10, 2	2017-01-10
Photomask blank, process for production of photomask, and chromium-containing material film Grant 9,488,907 - Yoshikawa , et al. November 8, 2	2016-11-08
Photomask blank and method for manufacturing photomask blank Grant 9,488,906 - Inazuki , et al. November 8, 2	2016-11-08
Halftone Phase Shift Mask Blank, Halftone Phase Shift Mask, And Pattern Exposure Method App 20160291456 - KOSAKA; Takuro ; et al.	2016-10-06
Phase Shift Mask Blank, Phase Shift Mask, And Blank Preparing Method App 20160291453 - INAZUKI; Yukio ; et al.	2016-10-06
Method For Preparing Halftone Phase Shift Photomask Blank App 20160291454 - KOSAKA; Takuro ; et al.	2016-10-06
Halftone Phase Shift Mask Blank And Halftone Phase Shift Mask App 20160291452 - SASAMOTO; Kouhei ; et al.	2016-10-06
Mask Blank And Making Method App 20160266485 - INAZUKI; Yukio ; et al.	2016-09-15
Method for manufacturing photomask blank Grant 9,400,422 - Yoshii , et al. July 26, 2	2016-07-26
Halftone phase shift photomask blank, halftone phase shift photomask and pattern exposure method Grant 9,366,951 - Inazuki , et al. June 14, 2	2016-06-14
Photomask Blank App 20160077424 - FUKAYA; Souichi ; et al.	2016-03-17
Halftone Phase Shift Photomask Blank And Making Method App 20160033858 - KOSAKA; Takuro ; et al.	2016-02-04
Designing Of Photomask Blank And Photomask Blank App 20160033859 - SASAMOTO; Kouhei ; et al.	2016-02-04
Binary Photomask Blank, Preparation Thereof, And Preparation Of Binary Photomask App 20160018729 - INAZUKI; Yukio ; et al.	2016-01-21
Photomask making method, photomask blank and dry etching method Grant 9,164,374 - Igarashi , et al. October 20, 2	2015-10-20
Photomask blank and method for manufacturing photomask Grant 9,091,931 - Kojima , et al. July 28, 2	2015-07-28
Photomask Blank, Process For Production Of Photomask, And Chromium-containing Material Film App 20150192849 - YOSHIKAWA; Hiroki ; et al.	2015-07-09
Photomask Blank App 20150160549 - SASAMOTO; Kouhei ; et al.	2015-06-11
Sputter Deposition Method, Sputtering System, Manufacture Of Photomask Blank, And Photomask Blank App 20150159264 - SASAMOTO; Kouhei ; et al.	2015-06-11
Halftone Phase Shift Photomask Blank, Halftone Phase Shift Photomask And Pattern Exposure Method App 20150125785 - INAZUKI; Yukio ; et al.	2015-05-07
Evaluation of etching conditions for pattern-forming film Grant 8,992,788 - Igarashi , et al. March 31, 2	2015-03-31
Method For Manufacturing Photomask Blank App 20150086909 - YOSHII; Takashi ; et al.	2015-03-26
Photomask Blank And Method For Manufacturing Photomask Blank App 20150086908 - INAZUKI; Yukio ; et al.	2015-03-26
Binary photomask blank and binary photomask making method Grant 8,980,503 - Yoshikawa , et al. March 17, 2	2015-03-17
Photomask blank, process for production of photomask, and chromium-containing material film Grant 8,968,972 - Yoshikawa , et al. March 3, 2	2015-03-03
Method Of Manufacturing Photomask Blank And Photomask Blank App 20150010853 - Fukaya; Souichi ; et al.	2015-01-08
Etching method and photomask blank processing method Grant 08920666 -	2014-12-30
Etching method and photomask blank processing method Grant 8,920,666 - Igarashi , et al. December 30, 2	2014-12-30
Silicon Target For Sputtering Film Formation And Method For Forming Silicon-containing Thin Film App 20140318948 - YOSHIKAWA; Hiroki ; et al.	2014-10-30
Photomask blank, photomask, and making method Grant 8,841,048 - Inazuki , et al. September 23, 2	2014-09-23
Light pattern exposure method, photomask, and photomask blank Grant 8,753,787 - Yoshikawa , et al. June 17, 2	2014-06-17
Light pattern exposure method, halftone phase shift mask, and halftone phase shift mask blank Grant 8,753,786 - Yoshikawa , et al. June 17, 2	2014-06-17
Sputtering Target Material, Silicon-containing Film Forming Method, And Photomask Blank App 20140110256 - KANEKO; Hideo ; et al.	2014-04-24
Photomask Blank Manufacturing Method, Photomask Blank, Photomask, And Pattern Transfer Method App 20130309599 - YOSHIKAWA; Hiroki ; et al.	2013-11-21
Photomask Blank, Process For Production Of Photomask, And Chromium-containing Material Film App 20130230796 - Yoshikawa; Hiroki ; et al.	2013-09-05
Photomask blank and making method, photomask, light pattern exposure method, and design method of transition metal/silicon base material film Grant 8,475,978 - Yoshikawa , et al. July 2, 2	2013-07-02
Light Pattern Exposure Method, Halftone Phase Shift Mask, And Halftone Phase Shift Mask Blank App 20130130159 - YOSHIKAWA; Hiroki ; et al.	2013-05-23
Evaluation Of Etching Conditions For Pattern-forming Film App 20130126471 - IGARASHI; Shinichi ; et al.	2013-05-23
Light Pattern Exposure Method, Photomask, And Photomask Blank App 20130130160 - YOSHIKAWA; Hiroki ; et al.	2013-05-23
Evaluation For Etch Mask Film App 20130132014 - IGARASHI; Shinichi ; et al.	2013-05-23
Method for inspecting and judging photomask blank or intermediate thereof Grant 8,417,018 - Inazuki , et al. April 9, 2	2013-04-09
Photomask Blank, Photomask, And Making Method App 20130059235 - INAZUKI; Yukio ; et al.	2013-03-07
Photomask Making Method, Photomask Blank And Dry Etching Method App 20130034806 - IGARASHI; Shinichi ; et al.	2013-02-07
Photomask making method Grant 8,309,277 - Igarashi , et al. November 13, 2	2012-11-13
Photomask making method, photomask blank and dry etching method Grant 8,304,146 - Igarashi , et al. November 6, 2	2012-11-06
Photomask Blank And Method For Manufacturing Photomask App 20120251930 - Kojima; Yosuke ; et al.	2012-10-04
Method for inspecting photomask blank or intermediate thereof, method for determining dosage of high-energy radiation, and method for manufacturing photomask blank Grant 8,168,351 - Inazuki , et al. May 1, 2	2012-05-01
Photomask blank and photomask Grant 8,148,036 - Inazuki , et al. April 3, 2	2012-04-03
Photomask Blank And Making Method, Photomask, Light Pattern Exposure Method, And Design Method Of Transition Metal/silicon Base Material Film App 20120064438 - YOSHIKAWA; Hiroki ; et al.	2012-03-15
Binary Photomask Blank And Binary Photomask Making Method App 20120034551 - Yoshikawa; Hiroki ; et al.	2012-02-09
Photomask blank and photomask Grant 8,012,654 - Yoshikawa , et al. September 6, 2	2011-09-06
Photomask blank and photomask Grant 8,007,964 - Yoshikawa , et al. August 30, 2	2011-08-30
Photomask blank and photomask Grant 8,003,284 - Yoshikawa , et al. August 23, 2	2011-08-23
Photomask blank and photomask making method Grant 7,989,124 - Yoshikawa , et al. August 2, 2	2011-08-02
Photomask Making Method App 20100316942 - IGARASHI; Shinichi ; et al.	2010-12-16
Etching Method And Photomask Blank Processing Method App 20100291478 - IGARASHI; Shinichi ; et al.	2010-11-18
Photomask Blank And Photomask App 20100261101 - Yoshikawa; Hiroki ; et al.	2010-10-14
Photomask Blank And Photomask App 20100261100 - YOSHIKAWA; Hiroki ; et al.	2010-10-14
Photomask Blank And Photomask Making Method App 20100261099 - Yoshikawa; Hiroki ; et al.	2010-10-14
Photomask Blank And Photomask App 20100248090 - INAZUKI; Yukio ; et al.	2010-09-30
Method For Inspecting Photomask Blank Or Intermediate Thereof, Method For Determining Dosage Of High-energy Radiation, And Method For Manufacturing Photomask Blank App 20100248091 - INAZUKI; Yukio ; et al.	2010-09-30
Method For Inspecting And Judging Photomask Blank Or Intermediate Thereof App 20100246932 - INAZUKI; Yukio ; et al.	2010-09-30
Photomask blank Grant 7,790,339 - Yoshikawa , et al. September 7, 2	2010-09-07
Photomask blank and photomask Grant 7,767,366 - Yoshikawa , et al. August 3, 2	2010-08-03
Photomask blank and photomask making method Grant 7,767,367 - Yoshikawa , et al. August 3, 2	2010-08-03
Photomask Making Method, Photomask Blank And Dry Etching Method App 20100176087 - Igarashi; Shinichi ; et al.	2010-07-15
Photomask blank, photomask, and method of manufacture Grant 7,736,824 - Yoshikawa , et al. June 15, 2	2010-06-15
Photomask Blank And Photomask App 20100143831 - Yoshikawa; Hiroki ; et al.	2010-06-10
Photomask blank and photomask Grant 7,691,546 - Yoshikawa , et al. April 6, 2	2010-04-06
Fabrication method of photomask-blank Grant 7,632,609 - Fukushima , et al. December 15, 2	2009-12-15
Photomask blank, photomask and fabrication method thereof Grant 7,625,676 - Yoshikawa , et al. December 1, 2	2009-12-01
Half-tone stacked film, photomask-blank, photomask and fabrication method thereof Grant 7,625,677 - Yoshikawa , et al. December 1, 2	2009-12-01
Phase-shift photomask-blank, phase-shift photomask and fabrication method thereof Grant 7,622,227 - Inazuki , et al. November 24, 2	2009-11-24
Photomask blank, photomask and method for producing those Grant 7,618,753 - Yoshikawa , et al. November 17, 2	2009-11-17
Film-depositing target and preparation of phase shift mask blank Grant 7,598,004 - Yoshikawa , et al. October 6, 2	2009-10-06
Halftone phase shift mask blank, halftone phase shift mask, and pattern transfer method Grant 7,556,892 - Okada , et al. July 7, 2	2009-07-07
Film-depositing Target And Preparation Of Phase Shift Mask Blank App 20090057143 - YOSHIKAWA; Hiroki ; et al.	2009-03-05
Halftone phase shift mask blank, halftone phase shift mask and their preparation Grant 7,419,749 - Inazuki , et al. September 2, 2	2008-09-02
Photomask Blank, Photomask, And Method Of Manufacture App 20080090159 - Yoshikawa; Hiroki ; et al.	2008-04-17
Phase shift mask blank, phase shift mask, and pattern transfer method Grant 7,351,505 - Yoshikawa , et al. April 1, 2	2008-04-01
Method of producing phase shift mask blank, method of producing phase shift mask, phase shift mask blank, and phase shift mask Grant 7,344,806 - Yoshikawa , et al. March 18, 2	2008-03-18
Photomask Blank and Photomask App 20080063950 - Yoshikawa; Hiroki ; et al.	2008-03-13
Photomask blank, photomask, and method of manufacture Grant 7,329,474 - Yoshikawa , et al. February 12, 2	2008-02-12
Photomask Blank, Photomask and Method for Producing Those App 20070259276 - Yoshikawa; Hiroki ; et al.	2007-11-08
Photomask blank App 20070248897 - Yoshikawa; Hiroki ; et al.	2007-10-25
Photomask blank and photomask making method App 20070212619 - YOSHIKAWA; Hiroki ; et al.	2007-09-13
Photomask blank and photomask App 20070212618 - Yoshikawa; Hiroki ; et al.	2007-09-13
Fabrication method of photomask-blank App 20070092807 - Fukushima; Noriyasu ; et al.	2007-04-26
Methods of manufacturing photomask blank and photomask Grant 7,195,846 - Kaneko , et al. March 27, 2	2007-03-27
Phase shift mask blank, phase shift mask, and method of manufacture Grant 7,179,567 - Inazuki , et al. February 20, 2	2007-02-20
Phase-shift photomask-blank, phase-shift photomask and fabrication method thereof App 20060257755 - Inazuki; Yukio ; et al.	2006-11-16
Half-tone stacked film, photomask-blank, photomask and fabrication method thereof App 20060177746 - Yoshikawa; Hiroki ; et al.	2006-08-10
Phase shift mask blank and method of manufacture Grant 7,037,625 - Kaneko , et al. May 2, 2	2006-05-02
Photomask blank, photomask and fabrication method thereof App 20060088774 - Yoshikawa; Hiroki ; et al.	2006-04-27
Halftone phase shift mask blank, halftone phase shift mask, and pattern transfer method App 20050244722 - Okada, Kimihiro ; et al.	2005-11-03
Film-depositing target and preparation of phase shift mask blank App 20050217988 - Yoshikawa, Hiroki ; et al.	2005-10-06
Halftone phase shift mask blank, halftone phase shift mask and their preparation App 20050186487 - Inazuki, Yukio ; et al.	2005-08-25
Phase shift mask blank, phase shift mask, and pattern transfer method App 20050112477 - Yoshikawa, Hiroki ; et al.	2005-05-26
Photomask blank, photomask, and method of manufacture App 20040197679 - Yoshikawa, Hiroki ; et al.	2004-10-07
Method of producing phase shift mask blank, method of producing phase shift mask, phase shift mask blank, and phase shift mask App 20040191646 - Yoshikawa, Hiroki ; et al.	2004-09-30
Methods of manufacturing photomask blank and photomask App 20040110073 - Kaneko, Hideo ; et al.	2004-06-10
Photomask blank, photomask and method of manufacture Grant 6,733,930 - Shinagawa , et al. May 11, 2	2004-05-11
Photomask blank and photomask Grant 6,727,027 - Tsukamoto , et al. April 27, 2	2004-04-27
Phase shift mask blank, phase shift mask, and method of manufacture App 20030235767 - Inazuki, Yukio ; et al.	2003-12-25
Phase shift mask blank, phase shift mask, and methods of manufacture Grant 6,641,958 - Inazuki , et al. November 4, 2	2003-11-04
Phase shift mask blank, phase shift mask, and method of manufacture App 20030025216 - Inazuki, Yukio ; et al.	2003-02-06
Phase shift mask blank and method of manufacture App 20030008219 - Kaneko, Hideo ; et al.	2003-01-09
Photomask blank, photomask and method of manufacture Grant 6,503,669 - Kaneko , et al. January 7, 2	2003-01-07
Photomask blank, photomask and method of manufacture App 20020136966 - Shinagawa, Tsutomu ; et al.	2002-09-26
Photomask blank and photomask App 20020115003 - Tsukamoto, Tetsushi ; et al.	2002-08-22
Phase shift mask blank, phase shift mask, and methods of manufacture App 20020039690 - Inazuki, Yukio ; et al.	2002-04-04
Phase shift mask blank, phase shift mask, and methods of manufacture App 20020025478 - Inazuki, Yukio ; et al.	2002-02-28
Photomask blank and photomask App 20010044054 - Kaneko, Hideo ; et al.	2001-11-22
Phase shift mask and method of manufacture App 20010028982 - Okazaki, Satoshi ; et al.	2001-10-11
Photomask blank, photomask and method of manufacture App 20010019801 - Kaneko, Hideo ; et al.	2001-09-06
Phase shift mask blank, phase shift mask, and method of manufacture App 20010007731 - Inazuki, Yukio ; et al.	2001-07-12
Method of fabricating an SOI wafer and SOI wafer fabricated thereby Grant 6,140,210 - Aga , et al. October 31, 2	2000-10-31
Vessel for making high-purity fine particles of active metals Grant 5,007,243 - Yamaguchi , et al. April 16, 1	1991-04-16

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