Patent | Date |
---|
Substrate Liquid Processing Method, Substrate Liquid Processing Apparatus, And Computer-readable Recording Medium App 20220290302 - Iwai; Kazutoshi ;   et al. | 2022-09-15 |
Substrate Liquid Processing Apparatus And Substrate Liquid Processing Method App 20220074052 - Inatomi; Yuichiro ;   et al. | 2022-03-10 |
Plating method, plating apparatus and recording medium Grant 11,230,767 - Inatomi , et al. January 25, 2 | 2022-01-25 |
Substrate Liquid Processing Apparatus And Substrate Liquid Processing Method App 20210317581 - Niwa; Takafumi ;   et al. | 2021-10-14 |
Plating method, plating apparatus and recording medium Grant 11,028,483 - Inatomi , et al. June 8, 2 | 2021-06-08 |
Forming method of hard mask Grant 11,004,684 - Iwashita , et al. May 11, 2 | 2021-05-11 |
Plating Method, Plating Apparatus And Recording Medium App 20210115565 - Inatomi; Yuichiro ;   et al. | 2021-04-22 |
Substrate Liquid Processing Apparatus, Substrate Liquid Processing Method And Recording Medium App 20210002770 - Tanaka; Takashi ;   et al. | 2021-01-07 |
Plating Method And Recording Medium App 20200325581 - Iwai; Kazutoshi ;   et al. | 2020-10-15 |
Plating method, plating apparatus and recording medium Grant 10,784,111 - Inatomi , et al. Sept | 2020-09-22 |
Plating apparatus, plating method, and recording medium Grant 10,731,256 - Iwai , et al. | 2020-08-04 |
Plating Method, Plating Apparatus And Recording Medium App 20190271084 - Inatomi; Yuichiro ;   et al. | 2019-09-05 |
Plating Method, Plating Apparatus And Recording Medium App 20190267242 - Inatomi; Yuichiro ;   et al. | 2019-08-29 |
Plating Method, Plating Apparatus And Recording Medium App 20190256980 - Inatomi; Yuichiro ;   et al. | 2019-08-22 |
Adhesion layer forming method, adhesion layer forming system and recording medium Grant 10,354,915 - Hoshino , et al. July 16, 2 | 2019-07-16 |
Forming Method Of Hard Mask App 20190157083 - Iwashita; Mitsuaki ;   et al. | 2019-05-23 |
Forming method of hard mask, forming apparatus of hard mask and recording medium Grant 10,224,202 - Iwashita , et al. | 2019-03-05 |
Plating method, plated component, and plating system Grant 10,179,950 - Inatomi , et al. Ja | 2019-01-15 |
Plating method, plating system and storage medium Grant 10,030,308 - Tanaka , et al. July 24, 2 | 2018-07-24 |
Catalyst layer forming method, catalyst layer forming system and recording medium Grant 9,966,306 - Inatomi , et al. May 8, 2 | 2018-05-08 |
Plating method, plating apparatus, and storage medium Grant 9,922,835 - Inatomi , et al. March 20, 2 | 2018-03-20 |
Substrate processing apparatus Grant 9,847,239 - Inatomi December 19, 2 | 2017-12-19 |
Plating method, plating system and storage medium Grant 9,837,308 - Mizutani , et al. December 5, 2 | 2017-12-05 |
Plating Apparatus, Plating Method, And Recording Medium App 20170292192 - Iwai; Kazutoshi ;   et al. | 2017-10-12 |
Forming Method Of Hard Mask, Forming Apparatus Of Hard Mask And Recording Medium App 20170287713 - Iwashita; Mitsuaki ;   et al. | 2017-10-05 |
Plating apparatus, plating method and storage medium Grant 9,777,379 - Inatomi , et al. October 3, 2 | 2017-10-03 |
Catalyst layer forming method, catalyst layer forming system, and recording medium Grant 9,761,485 - Inatomi , et al. September 12, 2 | 2017-09-12 |
Plating Apparatus, Plating Method And Recording Medium App 20170121822 - Mizutani; Nobutaka ;   et al. | 2017-05-04 |
Plating apparatus, plating method, and storage medium Grant 9,552,994 - Inatomi , et al. January 24, 2 | 2017-01-24 |
Plating Method, Plated Component, And Plating System App 20160372367 - Inatomi; Yuichiro ;   et al. | 2016-12-22 |
Pre-treatment method for plating and storage medium Grant 9,523,153 - Tanaka , et al. December 20, 2 | 2016-12-20 |
Plating apparatus, plating method and storage medium Grant 9,505,019 - Inatomi , et al. November 29, 2 | 2016-11-29 |
Plating apparatus, plating method and storage medium Grant 9,487,865 - Inatomi , et al. November 8, 2 | 2016-11-08 |
Adhesion Layer Forming Method, Adhesion Layer Forming System And Recording Medium App 20160284592 - Hoshino; Tomohisa ;   et al. | 2016-09-29 |
Catalyst Layer Forming Method, Catalyst Layer Forming System And Recording Medium App 20160247683 - Inatomi; Yuichiro ;   et al. | 2016-08-25 |
Semiconductor Device, Plating Method, Plating System And Recording Medium App 20160247765 - Inatomi; Yuichiro ;   et al. | 2016-08-25 |
Plating Method, Plating Apparatus, And Storage Medium App 20160053378 - Inatomi; Yuichiro ;   et al. | 2016-02-25 |
Catalyst Layer Forming Method, Catalyst Layer Forming System, And Recording Medium App 20160013102 - Inatomi; Yuichiro ;   et al. | 2016-01-14 |
Pre-treatment Method Of Plating, Plating System, And Recording Medium App 20160013101 - Inatomi; Yuichiro ;   et al. | 2016-01-14 |
Plating Apparatus, Plating Method And Storage Medium App 20150232994 - Inatomi; Yuichiro ;   et al. | 2015-08-20 |
Pre-treatment Method For Plating And Storage Medium App 20150140209 - Tanaka; Takashi ;   et al. | 2015-05-21 |
Substrate processing method and substrate processing system Grant 9,016,231 - Inatomi April 28, 2 | 2015-04-28 |
Plating Apparatus, Plating Method, And Storage Medium App 20150099355 - Inatomi; Yuichiro ;   et al. | 2015-04-09 |
Plating Method, Plating System And Storage Medium App 20150079785 - Mizutani; Nobutaka ;   et al. | 2015-03-19 |
Plating Method, Plating System And Storage Medium App 20150030774 - Tanaka; Takashi ;   et al. | 2015-01-29 |
Plating Apparatus, Plating Method And Storage Medium App 20140356539 - Inatomi; Yuichiro ;   et al. | 2014-12-04 |
Resist coating and developing apparatus, resist coating and developing method, resist-film processing apparatus, and resist-film processing method Grant 8,848,161 - Inatomi September 30, 2 | 2014-09-30 |
Substrate Processing Apparatus App 20140216506 - Inatomi; Yuichiro | 2014-08-07 |
Substrate processing method, storage medium storing program for executing substrate processing method and substrate processing apparatus Grant 8,728,247 - Inatomi May 20, 2 | 2014-05-20 |
Plating Apparatus, Plating Method And Storage Medium App 20140134345 - Inatomi; Yuichiro ;   et al. | 2014-05-15 |
Plating Apparatus, Plating Method And Storage Medium App 20140120264 - Inatomi; Yuichiro ;   et al. | 2014-05-01 |
Developing treatment method Grant 8,691,497 - Inatomi , et al. April 8, 2 | 2014-04-08 |
Method for improving surface roughness of processed film of substrate and apparatus for processing substrate Grant 8,646,403 - Inatomi February 11, 2 | 2014-02-11 |
Substrate Processing Method And Substrate Processing System App 20130312659 - Inatomi; Yuichiro | 2013-11-28 |
Substrate processing method and substrate processing system Grant 8,563,230 - Inatomi October 22, 2 | 2013-10-22 |
Resist Coating And Developing Apparatus, Resist Coating And Developing Method, Resist-film Processing Apparatus, And Resist-film Processing Method App 20130188158 - INATOMI; Yuichiro | 2013-07-25 |
Resist coating and developing apparatus, resist coating and developing method, resist-film processing apparatus, and resist-film processing method Grant 8,420,304 - Inatomi April 16, 2 | 2013-04-16 |
Resist coating and developing apparatus and method Grant 8,411,246 - Inatomi April 2, 2 | 2013-04-02 |
Resist applying and developing method, resist film processing unit, and resist applying and developing apparatus comprising the unit Grant 8,343,714 - Shiraishi , et al. January 1, 2 | 2013-01-01 |
Developing Treatment Method App 20120183909 - Inatomi; Yuichiro ;   et al. | 2012-07-19 |
Substrate treatment method and substrate treatment apparatus Grant 7,989,156 - Inatomi August 2, 2 | 2011-08-02 |
Substrate Processing Method, Storage Medium Storing Program For Executing Substrate Processing Method And Substrate Processing Apparatus App 20110155181 - Inatomi; Yuichiro | 2011-06-30 |
Resist Coating And Developing Apparatus And Method App 20110065052 - INATOMI; Yuichiro | 2011-03-17 |
Method for improving surface roughness of processed film of substrate and apparatus for processing substrate Grant 7,875,420 - Inatomi January 25, 2 | 2011-01-25 |
Substrate Treatment Method And Substrate Treatment Apparatus App 20100316961 - INATOMI; Yuichiro | 2010-12-16 |
Substrate treatment method and substrate treatment apparatus Grant 7,819,076 - Inatomi October 26, 2 | 2010-10-26 |
Resist Applying And Developing Method, Resist Film Processing Unit, And Resist Applying And Developing Apparatus Comprising App 20100266969 - SHIRAISHI; Gousuke ;   et al. | 2010-10-21 |
Resist Coating And Developing Apparatus, Resist Coating And Developing Method, Resist-film Processing Apparatus, And Resist-film Processing Method App 20100261122 - INATOMI; Yuichiro | 2010-10-14 |
Substrate processing apparatus Grant 7,714,979 - Yamamoto , et al. May 11, 2 | 2010-05-11 |
Method For Improving Surface Roughness Of Processed Film Of Substrate And Apparatus For Processing Substrate App 20100020297 - INATOMI; Yuichiro | 2010-01-28 |
Substrate processing apparatus Grant 7,600,933 - Yamamoto , et al. October 13, 2 | 2009-10-13 |
Substrate Processing Method And Substrate Processing System App 20090152238 - INATOMI; Yuichiro | 2009-06-18 |
Substrate Processing Apparatus App 20090135384 - YAMAMOTO; Taro ;   et al. | 2009-05-28 |
Substrate Processing Apparatus App 20090128787 - Yamamoto; Taro ;   et al. | 2009-05-21 |
Substrate Processing Method, Substrate Processing System, And Storage Medium App 20080199617 - Inatomi; Yuichiro ;   et al. | 2008-08-21 |
Substrate Treatment Method and Substrate Treatment Apparatus App 20070238028 - Inatomi; Yuichiro | 2007-10-11 |
Method for improving surface roughness of processed film of substrate and apparatus for processing substrate App 20060237127 - Inatomi; Yuichiro | 2006-10-26 |