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Surface Emitting Laser And Optical Coherence Tomography Apparatus App 20160164254 - Inao; Yasuhisa | 2016-06-09 |
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Surface-emitting Laser And Surface-emitting Laser Array, Method Of Manufacturing A Surface-emitting Laser And Method Of Manufacturing A Surface-emitting Laser Array, And Optical Apparatus Including A Surface-emitting Laser Array App 20130044780 - Inao; Yasuhisa ;   et al. | 2013-02-21 |
Surface-emitting laser and surface-emitting laser array, method of manufacturing a surface-emitting laser and method of manufacturing a surface-emitting laser array, and optical apparatus including a surface-emitting laser array Grant 8,377,727 - Inao , et al. February 19, 2 | 2013-02-19 |
Semiconductor Optical Integrated Device And Optical Coherence Tomographic Imaging Apparatus Provided With The Semiconductor Optical Integrated Device App 20120327422 - Inao; Yasuhisa ;   et al. | 2012-12-27 |
Surface-emitting Laser And Surface-emitting Laser Array, Method Of Manufacturing A Surface-emitting Laser And Method Of Manufacturing A Surface-emitting Laser Array, And Optical Apparatus Including A Surface-emitting Laser Array App 20120114005 - Inao; Yasuhisa ;   et al. | 2012-05-10 |
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Surface emitting laser manufacturing method, surface emitting laser array manufacturing method, surface emitting laser, surface emitting laser array, and optical apparatus including surface emitting laser array Grant 7,863,061 - Ikuta , et al. January 4, 2 | 2011-01-04 |
Optical Filter App 20100220377 - Yamada; Tomohiro ;   et al. | 2010-09-02 |
Device and method for controlling close contact of near-field exposure mask, and near-field exposure mask for the same Grant 7,777,864 - Nakasato , et al. August 17, 2 | 2010-08-17 |
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Sensor device and testing method utilizing localized plasmon resonance Grant 7,733,491 - Kuroda , et al. June 8, 2 | 2010-06-08 |
Photosensitive silane coupling agent, method of modifying surface, method of forming pattern, and method of fabricating device Grant 7,704,672 - Ito , et al. April 27, 2 | 2010-04-27 |
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Surface Emitting Laser Manufacturing Method, Surface Emitting Laser Array Manufacturing Method, Surface Emitting Laser, Surface Emitting Laser Array, And Optical Apparatus Including Surface Emitting Laser Array App 20100029027 - Ikuta; Mitsuhiro ;   et al. | 2010-02-04 |
Near-field Exposure Apparatus And Near-field Exposure Method App 20090311631 - Inao; Yasuhisa ;   et al. | 2009-12-17 |
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Photosensitive silane coupling agent, method of forming pattern, and method of fabricating device Grant 7,547,503 - Ito , et al. June 16, 2 | 2009-06-16 |
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Chemical sensor Grant 7,399,445 - Kuroda , et al. July 15, 2 | 2008-07-15 |
Photomask for uniform intensity exposure to an optical near-field Grant 7,374,844 - Mizutani , et al. May 20, 2 | 2008-05-20 |
Near-field Exposure Method And Device Manufacturing Method Using The Same App 20080107998 - Inao; Yasuhisa ;   et al. | 2008-05-08 |
Method of detecting tightly adhering state, tight adhesion control method and method of and apparatus for near field exposure Grant 7,317,197 - Inao , et al. January 8, 2 | 2008-01-08 |
Near-field Exposure Method App 20070287100 - MIZUTANI; Natsuhiko ;   et al. | 2007-12-13 |
Photoresist, photolithography method using the same, and method for producing photoresist Grant 7,303,859 - Yamaguchi , et al. December 4, 2 | 2007-12-04 |
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Method and apparatus for detecting relative positional deviation between two objects Grant 7,262,851 - Kuroda , et al. August 28, 2 | 2007-08-28 |
Exposure apparatus, exposure method, and exposure mask App 20070146680 - Inao; Yasuhisa ;   et al. | 2007-06-28 |
Exposure method, exposure mask, and exposure apparatus App 20070065734 - Inao; Yasuhisa ;   et al. | 2007-03-22 |
Method for making a pattern using near-field light exposure through a photomask Grant 7,144,685 - Mizutani , et al. December 5, 2 | 2006-12-05 |
Near-field exposure method Grant 7,144,682 - Inao , et al. December 5, 2 | 2006-12-05 |
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Photomask for near-field exposure and exposure apparatus including the photomask for making a pattern Grant 7,050,144 - Mizutani , et al. May 23, 2 | 2006-05-23 |
Organic thin film, method of producing the same, and field effect transistor using the same App 20060044500 - Nakagawa; Taira ;   et al. | 2006-03-02 |
Near-field light exposure mask with avoidance of overlap of near-field light, method for manufacturing the same, exposure apparatus and method using near-field light exposure mask, and method for manufacturing device Grant 7,001,696 - Inao , et al. February 21, 2 | 2006-02-21 |
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Method and apparatus for detecting relative positional deviation between two objects App 20060007440 - Kuroda; Ryo ;   et al. | 2006-01-12 |
Exposure mask, method of designing and manufacturing the same, exposure method and apparatus, pattern forming method, and device manufacturing method App 20060003233 - Yamaguchi; Takako ;   et al. | 2006-01-05 |
Photomask and near-field exposure method App 20060003236 - Mizutani; Natsuhiko ;   et al. | 2006-01-05 |
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Method of detecting attracting force between substrates, and near-field exposure method and apparatus App 20050057752 - Inao, Yasuhisa ;   et al. | 2005-03-17 |
Photoresist, photolithography method using the same, and method for producing photoresist App 20050053859 - Yamaguchi, Takako ;   et al. | 2005-03-10 |
Photoresist, photolithography method using the same, and method for producing photoresist Grant 6,849,391 - Yamaguchi , et al. February 1, 2 | 2005-02-01 |
Photomask for exposure to optical near-field, method of controlling optical near-field intensity distribution using the same, pattern preparing method and pattern preparing apparatus App 20040227917 - Mizutani, Natsuhiko ;   et al. | 2004-11-18 |
Method of detecting tightly adhering state, tight adhesion control method and method of and apparatus for near field exposure App 20040223142 - Inao, Yasuhisa ;   et al. | 2004-11-11 |
Near field light probe, near field optical microscope, near field light lithography apparatus, and near field light storage apparatus that have the near field light probe Grant 6,785,445 - Kuroda , et al. August 31, 2 | 2004-08-31 |
Mask, exposure apparatus, and exposure method App 20040137338 - Inao, Yasuhisa ;   et al. | 2004-07-15 |
Exposure method, exposure mask, and exposure apparatus App 20040121245 - Inao, Yasuhisa ;   et al. | 2004-06-24 |
Exposure method and exposure apparatus using near-field light and exposure mask Grant 6,720,115 - Inao , et al. April 13, 2 | 2004-04-13 |
Exposure method and apparatus using near field light Grant 6,721,040 - Saito , et al. April 13, 2 | 2004-04-13 |
Near-field light exposure mask with avoidance of overlap of near-field light, method for manufacturing the same, exposure apparatus and method using near-field light exposure mask, and method for manufacturing device App 20030232257 - Inao, Yasuhisa ;   et al. | 2003-12-18 |
Photomask for nearfield exposure, method for making pattern using the photomask, and apparatus for making pattern including the photomask App 20030211403 - Mizutani, Natsuhiko ;   et al. | 2003-11-13 |
Light modulation apparatus and optical switch, movement detecting device and distance measuring device, alignment device and semiconductor aligner, and processes thereof Grant 6,628,392 - Kuroda , et al. September 30, 2 | 2003-09-30 |
Chemical sensor App 20030132392 - Kuroda, Ryo ;   et al. | 2003-07-17 |
Light Modulation Apparatus And Optical Switch, Movement Detecting Device And Distance Measuring Device, Alignment Device And Semiconductor Aligner, And Processes Thereof App 20030128361 - Kuroda`, Ryo ;   et al. | 2003-07-10 |
Photoresist, photolithography method using the same, and method for producing photoresist App 20030003393 - Yamaguchi, Takako ;   et al. | 2003-01-02 |
Near field light probe, near field optical microscope, near field light lithography apparatus, and near field light storage apparatus that have the near field light probe App 20020154859 - Kuroda, Ryo ;   et al. | 2002-10-24 |
Exposure method and apparatus using near field light App 20020105628 - Saito, Kenji ;   et al. | 2002-08-08 |
Exposure method and exposure apparatus using near-field light and exposure mask App 20010036581 - Inao, Yasuhisa ;   et al. | 2001-11-01 |