Patent | Date |
---|
Substrate treating apparatus and substrate treating method Grant 11,152,233 - Inagaki , et al. October 19, 2 | 2021-10-19 |
Substrate treating apparatus Grant 11,101,156 - Kuwahara , et al. August 24, 2 | 2021-08-24 |
Substrate treating apparatus Grant 10,784,125 - Inagaki Sept | 2020-09-22 |
Treating liquid vaporizing apparatus Grant 10,651,056 - Tanaka , et al. | 2020-05-12 |
Substrate Treating Apparatus And Substrate Treating Method App 20200098602 - INAGAKI; Yukihiko ;   et al. | 2020-03-26 |
Substrate Treating Apparatus App 20200098607 - KUWAHARA; Joji ;   et al. | 2020-03-26 |
Substrate treating apparatus Grant 10,573,546 - Inagaki Feb | 2020-02-25 |
Substrate Treating Apparatus App 20190295863 - INAGAKI; Yukihiko | 2019-09-26 |
Substrate Treating Apparatus App 20190279886 - TSUJI; Tatsuhisa ;   et al. | 2019-09-12 |
Peripheral portion processing device and peripheral portion processing method Grant 10,286,648 - Inagaki | 2019-05-14 |
Substrate treating apparatus Grant 10,269,598 - Inagaki | 2019-04-23 |
Substrate processing apparatus and substrate processing method Grant 10,201,824 - Inagaki Feb | 2019-02-12 |
Substrate processing apparatus and substrate processing method Grant 10,112,205 - Inagaki October 30, 2 | 2018-10-30 |
Substrate processing apparatus and substrate processing method Grant 10,047,441 - Harumoto , et al. August 14, 2 | 2018-08-14 |
Substrate Treating Apparatus App 20180207652 - INAGAKI; Yukihiko | 2018-07-26 |
Substrate processing apparatus and substrate processing method Grant 9,993,840 - Inagaki June 12, 2 | 2018-06-12 |
Substrate treating apparatus Grant 9,956,565 - Inagaki May 1, 2 | 2018-05-01 |
Peripheral Portion Processing Device And Peripheral Portion Processing Method App 20180056646 - INAGAKI; Yukihiko | 2018-03-01 |
Substrate Processing Apparatus And Substrate Processing Method App 20180044795 - HARUMOTO; Masahiko ;   et al. | 2018-02-15 |
Thermal Processing Device, Substrate Processing Apparatus And Thermal Processing Method App 20180021806 - INAGAKI; Yukihiko | 2018-01-25 |
Substrate processing apparatus and substrate processing method Grant 9,828,676 - Harumoto , et al. November 28, 2 | 2017-11-28 |
Substrate processing apparatus, storage device, and method of transporting substrate storing container Grant 9,728,434 - Inagaki , et al. August 8, 2 | 2017-08-08 |
Treating Liquid Vaporizing Apparatus And Substrate Treating Apparatus App 20170221731 - TANAKA; Atsushi ;   et al. | 2017-08-03 |
Substrate Treating Apparatus App 20170140962 - INAGAKI; Yukihiko | 2017-05-18 |
Substrate Processing Apparatus And Substrate Processing Method App 20170106389 - INAGAKI; Yukihiko | 2017-04-20 |
Substrate Processing Apparatus And Substrate Processing Method App 20170050211 - INAGAKI; Yukihiko | 2017-02-23 |
Substrate Treating Apparatus App 20170053817 - INAGAKI; Yukihiko | 2017-02-23 |
Substrate processing apparatus and substrate processing method Grant 9,566,598 - Inagaki February 14, 2 | 2017-02-14 |
Coating method and coating apparatus Grant 9,553,007 - Inagaki , et al. January 24, 2 | 2017-01-24 |
Substrate Processing Apparatus And Substrate Processing Method App 20160310979 - INAGAKI; Yukihiko | 2016-10-27 |
Substrate Processing Apparatus And Substrate Processing Method App 20160289839 - HARUMOTO; Masahiko ;   et al. | 2016-10-06 |
Substrate processing apparatus and substrate processing method Grant 9,375,748 - Harumoto , et al. June 28, 2 | 2016-06-28 |
Coating method and coating apparatus Grant 9,343,339 - Inagaki , et al. May 17, 2 | 2016-05-17 |
Exposure device, substrate processing apparatus, method for exposing substrate and substrate processing method Grant 9,152,054 - Nishimura , et al. October 6, 2 | 2015-10-06 |
Substrate Processing Apparatus, Storage Device, And Method Of Transporting Substrate Storing Container App 20140341681 - INAGAKI; Yukihiko ;   et al. | 2014-11-20 |
Substrate processing apparatus, storage device, and method of transporting substrate storing container Grant 8,827,621 - Inagaki , et al. September 9, 2 | 2014-09-09 |
Substrate Processing Apparatus And Substrate Processing Method App 20140161983 - INAGAKI; Yukihiko | 2014-06-12 |
Substrate Processing Apparatus And Substrate Processing Method App 20140022521 - HARUMOTO; Masahiko ;   et al. | 2014-01-23 |
Exposure Device, Substrate Processing Apparatus, Method For Exposing Substrate And Substrate Processing Method App 20130258299 - NISHIMURA; Kazuhiro ;   et al. | 2013-10-03 |
Substrate processing apparatus, substrate processing system and inspection/periphery exposure apparatus Grant 8,477,301 - Kashiyama , et al. July 2, 2 | 2013-07-02 |
Coating Method And Coating Apparatus App 20130089668 - INAGAKI; Yukihiko ;   et al. | 2013-04-11 |
Coating Method And Coating Apparatus App 20130089664 - INAGAKI; Yukihiko ;   et al. | 2013-04-11 |
Substrate Processing Apparatus, Storage Device, And Method Of Transporting Substrate Storing Container App 20110222994 - INAGAKI; Yukihiko ;   et al. | 2011-09-15 |
Substrate Processing Apparatus, Substrate Processing System And Inspection/periphery Exposure Apparatus App 20110063588 - KASHIYAMA; Masahito ;   et al. | 2011-03-17 |
Substrate Edge Exposure Apparatus App 20070267582 - Inagaki; Yukihiko | 2007-11-22 |
Substrate processing apparatus and substrate processing method App 20060024446 - Sugimoto; Kenji ;   et al. | 2006-02-02 |
Substrate treating apparatus Grant 6,893,171 - Fukutomi , et al. May 17, 2 | 2005-05-17 |
Substrate treating apparatus Grant 6,814,507 - Inagaki November 9, 2 | 2004-11-09 |
Substrate processing apparatus Grant 6,752,543 - Fukutomi , et al. June 22, 2 | 2004-06-22 |
Substrate processing apparatus App 20030217695 - Fukutomi, Yoshiteru ;   et al. | 2003-11-27 |
Substrate treating apparatus App 20030213431 - Fukutomi, Yoshiteru ;   et al. | 2003-11-20 |
Substrate treating apparatus App 20030185561 - Inagaki, Yukihiko | 2003-10-02 |
Substrate processing apparatus App 20020152958 - Shigemori, Kazuhito ;   et al. | 2002-10-24 |
Cylindrical inner surface scanner and imaging control method in cylindrical inner surface scanner Grant 5,592,324 - Inagaki , et al. January 7, 1 | 1997-01-07 |
Light beam scanning system Grant 5,200,849 - Inagaki , et al. April 6, 1 | 1993-04-06 |
Method of and apparatus for recording a halftone dot color image on a color photosensitive material Grant 4,942,460 - Inagaki , et al. July 17, 1 | 1990-07-17 |