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Substrate Processing Apparatus And Substrate Processing Method App 20220208567 - Nakashima; Mikio ;   et al. | 2022-06-30 |
Cleaning apparatus and cleaning method of substrate processing apparatus Grant 11,295,965 - Yamada , et al. April 5, 2 | 2022-04-05 |
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Substrate processing apparatus having processing block including liquid processing unit, drying unit, and supply unit adjacent to the transport block Grant 11,139,181 - Inadomi , et al. October 5, 2 | 2021-10-05 |
Liquid processing method, substrate processing apparatus, and storage medium Grant 10,867,814 - Kawabuchi , et al. December 15, 2 | 2020-12-15 |
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Substrate Processing Apparatus And Substrate Processing Method App 20200168482 - Inadomi; Hiroaki ;   et al. | 2020-05-28 |
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Substrate Processing Apparatus App 20190103291 - Inadomi; Hiroaki ;   et al. | 2019-04-04 |
High-pressure container, substrate processing apparatus, and method for manufacturing high-pressure container Grant 10,207,349 - Mitsuoka , et al. Feb | 2019-02-19 |
Substrate Processing Apparatus App 20170287742 - Inadomi; Hiroaki ;   et al. | 2017-10-05 |
Substrate Processing Apparatus, Substrate Processing Method, And Storage Medium App 20170256398 - Inadomi; Hiroaki ;   et al. | 2017-09-07 |
Liquid Processing Method, Substrate Processing Apparatus, And Storage Medium App 20170236729 - Kawabuchi; Yosuke ;   et al. | 2017-08-17 |
Substrate Processing Apparatus And Substrate Processing Method App 20160336201 - INADOMI; Hiroaki | 2016-11-17 |
Processing apparatus Grant 9,496,158 - Nakashima , et al. November 15, 2 | 2016-11-15 |
Substrate processing apparatus and substrate processing method Grant 9,449,857 - Inadomi September 20, 2 | 2016-09-20 |
Substrate heating apparatus and method and coating and developing system Grant 8,814,563 - Hayashi , et al. August 26, 2 | 2014-08-26 |
High-pressure Container, Substrate Processing Apparatus, And Method For Manufacturing High-pressure Container App 20140145390 - Mitsuoka; Kazuyuki ;   et al. | 2014-05-29 |
Substrate Processing Apparatus And Substrate Processing Method App 20130327363 - Inadomi; Hiroaki | 2013-12-12 |
Ultrasonic cleaning apparatus, ultrasonic cleaning method, and storage medium storing computer program for executing ultrasonic cleaning method Grant 8,567,417 - Kamikawa , et al. October 29, 2 | 2013-10-29 |
Processing Apparatus App 20120266925 - Nakashima; Mikio ;   et al. | 2012-10-25 |
Apparatus and method for heating substrate and coating and developing system Grant 8,237,092 - Hayashi , et al. August 7, 2 | 2012-08-07 |
Apparatus and method for heating substrate and coating and developing system Grant 8,080,765 - Hayashi , et al. December 20, 2 | 2011-12-20 |
Ultrasonic Cleaning Apparatus, Ultrasonic Cleaning Method, And Storage Medium Storing Computer Program For Executing Ultrasonic Cleaning Method App 20110079240 - KAMIKAWA; Yuji ;   et al. | 2011-04-07 |
Apparatus And Method For Heating Substrate And Coating And Developing System App 20100330815 - Hayashi; Shinichi ;   et al. | 2010-12-30 |
Apparatus And Method For Heating Substrate And Coating And Developing System App 20100326351 - HAYASHI; Shinichi ;   et al. | 2010-12-30 |
Apparatus and method for heating substrate and coating and developing system Grant 7,812,285 - Hayashi , et al. October 12, 2 | 2010-10-12 |
Substrate Heating Apparatus And Method And Coating And Developing System App 20100255204 - HAYASHI; Shinichi ;   et al. | 2010-10-07 |
Substrate heating apparatus and method and coating and developing system Grant 7,780,438 - Hayashi , et al. August 24, 2 | 2010-08-24 |
Heating device and heating method Grant 7,758,340 - Akimoto , et al. July 20, 2 | 2010-07-20 |
Heating Device And Heating Method App 20070160947 - AKIMOTO; Masami ;   et al. | 2007-07-12 |
Substrate heating apparatus and method and coating and developing system App 20060252000 - Hayashi; Shinichi ;   et al. | 2006-11-09 |
Apparatus and method for heating substrate and coating and developing system App 20060234178 - Hayashi; Shinichi ;   et al. | 2006-10-19 |