INADA; Hiroichi
Patent Applications and Registrations
Patent applications and USPTO patent grants for INADA; Hiroichi.The latest application filed is for "solution treatment apparatus and cleaning method".
Company Profile
5.29.22
- INADA; Hiroichi - Koshi City JP
- Inada; Hiroichi - Kumamoto JP
- Inada; Hiroichi - Koshi JP
- INADA; Hiroichi - Koshi-shi JP
- Inada; Hiroichi - Koshi-Machi JP
- Inada, Hiroichi - Kumamoto-Ken JP
- Inada; Hiroichi - Kikuchi-gun JP
Patent Activity
| Patent | Date |
|---|---|
| Solution Treatment Apparatus And Cleaning Method App 20220113643 - SHIBASAKI; Kenta ; et al. | 2022-04-14 |
| Nozzle Standby Device, Liquid Processing Apparatus And Operation Method Of Liquid Processing Apparatus App 20220084844 - Shimmura; Satoshi ; et al. | 2022-03-17 |
| Substrate Processing Apparatus App 20210039131 - Shimmura; Satoshi ; et al. | 2021-02-11 |
| Chemical liquid discharge mechanism, liquid processing apparatus, chemical liquid discharge method, and storage medium Grant 10,755,952 - Sasagawa , et al. A | 2020-08-25 |
| Liquid processing apparatus, liquid processing method, and storage medium Grant 10,643,872 - Abe , et al. | 2020-05-05 |
| Liquid processing method and storage medium Grant 10,168,618 - Sasagawa , et al. J | 2019-01-01 |
| Chemical Liquid Discharge Mechanism, Liquid Processing Apparatus, Chemical Liquid Discharge Method, And Storage Medium App 20180350633 - Sasagawa; Norihiko ; et al. | 2018-12-06 |
| Chemical liquid discharge mechanism, liquid processing apparatus, chemical liquid discharge method, and storage medium Grant 10,074,548 - Sasagawa , et al. September 11, 2 | 2018-09-11 |
| Liquid Processing Apparatus, Liquid Processing Method, And Storage Medium App 20170358464 - Abe; Masahiro ; et al. | 2017-12-14 |
| Liquid Processing Method And Storage Medium App 20160054653 - Sasagawa; Norihiko ; et al. | 2016-02-25 |
| Chemical Liquid Discharge Mechanism, Liquid Processing Apparatus, Chemical Liquid Discharge Method, And Storage Medium App 20160008840 - Sasagawa; Norihiko ; et al. | 2016-01-14 |
| Liquid processing apparatus, liquid processing method and storage medium Grant 9,195,138 - Sasagawa , et al. November 24, 2 | 2015-11-24 |
| Coating method Grant 8,808,798 - Kitano , et al. August 19, 2 | 2014-08-19 |
| Coating film forming apparatus, use of coating film forming apparatus, and recording medium Grant 8,758,855 - Ogata , et al. June 24, 2 | 2014-06-24 |
| Coating method Grant 8,551,563 - Kitano , et al. October 8, 2 | 2013-10-08 |
| Coating Method App 20120301612 - KITANO; Takahiro ; et al. | 2012-11-29 |
| Apparatus and method of forming an applied film Grant 8,287,954 - Yoshihara , et al. October 16, 2 | 2012-10-16 |
| Coating apparatus and method Grant 8,256,370 - Kitano , et al. September 4, 2 | 2012-09-04 |
| Coating Apparatus And Method App 20120213925 - Kitano; Takahiro ; et al. | 2012-08-23 |
| Coating apparatus and method Grant 8,225,737 - Kitano , et al. July 24, 2 | 2012-07-24 |
| Coating Film Forming Apparatus, Use Of Coating Film Forming Apparatus, And Recording Medium App 20120183693 - Ogata; Nobuhiro ; et al. | 2012-07-19 |
| Coating film forming apparatus, use of coating film forming apparatus, and recording medium Grant 8,186,298 - Ogata , et al. May 29, 2 | 2012-05-29 |
| Liquid Processing Apparatus, Liquid Processing Method And Storage Medium App 20120052190 - Sasagawa; Norihiko ; et al. | 2012-03-01 |
| Apparatus And Method Of Forming An Applied Film App 20110008538 - Yoshihara; Kousuke ; et al. | 2011-01-13 |
| Apparatus and method of forming an applied film Grant 7,802,536 - Yoshihara , et al. September 28, 2 | 2010-09-28 |
| Coating Apparatus And Method App 20090285984 - KITANO; Takahiro ; et al. | 2009-11-19 |
| Coating Apparatus And Method App 20090285991 - Kitano; Takahiro ; et al. | 2009-11-19 |
| Coating Film Forming Apparatus, Use Of Coating Film Forming Apparatus, And Recording Medium App 20080280054 - OGATA; Nobuhiro ; et al. | 2008-11-13 |
| Substrate treatment apparatus Grant 7,344,600 - Inada , et al. March 18, 2 | 2008-03-18 |
| Apparatus and method of forming an applied film App 20070071890 - Yoshihara; Kousuke ; et al. | 2007-03-29 |
| Coating unit and coating method Grant 6,982,102 - Inada , et al. January 3, 2 | 2006-01-03 |
| Processing system Grant 6,919,913 - Inada , et al. July 19, 2 | 2005-07-19 |
| Substrate treatment apparatus App 20050145168 - Inada, Hiroichi ; et al. | 2005-07-07 |
| Coating unit and coating method App 20040175497 - Inada, Hiroichi ; et al. | 2004-09-09 |
| Coating unit and coating method Grant 6,752,872 - Inada , et al. June 22, 2 | 2004-06-22 |
| Film forming method and film forming apparatus Grant 6,730,599 - Inada , et al. May 4, 2 | 2004-05-04 |
| Treatment solution supply apparatus and treatment solution supply method Grant 6,616,762 - Inada , et al. September 9, 2 | 2003-09-09 |
| Film forming method and film forming apparatus App 20030099776 - Inada, Hiroichi ; et al. | 2003-05-29 |
| Film forming method and film forming apparatus Grant 6,541,376 - Inada , et al. April 1, 2 | 2003-04-01 |
| Developing process and developing unit Grant 6,419,408 - Inada July 16, 2 | 2002-07-16 |
| Treatment solution supply apparatus and treatment solution supply method App 20020043214 - Inada, Hiroichi ; et al. | 2002-04-18 |
| Coating unit and coating method App 20020041935 - Inada, Hiroichi ; et al. | 2002-04-11 |
| Film forming method and film forming apparatus App 20020022377 - Inada, Hiroichi ; et al. | 2002-02-21 |
| Method of forming coating film and apparatus therefor Grant 6,063,190 - Hasebe , et al. May 16, 2 | 2000-05-16 |
| Solvent and resist spin coating apparatus Grant 5,942,035 - Hasebe , et al. August 24, 1 | 1999-08-24 |
| Method of forming coating film and apparatus therefor Grant 5,658,615 - Hasebe , et al. August 19, 1 | 1997-08-19 |
| Apparatus and method for developing resist coated on a substrate Grant 5,625,433 - Inada , et al. April 29, 1 | 1997-04-29 |
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