INABA; Shogo

Patent Applications and Registrations

Patent applications and USPTO patent grants for INABA; Shogo.The latest application filed is for "substrate processing apparatus, substrate processing method, and storage medium".

Company Profile

6.42.47

INABA; Shogo - Koshi City JP
Inaba; Shogo - Koshi JP
Inaba; Shogo - Shiojiri JP
INABA; Shogo - Shiojiri-shi JP
Inaba; Shogo - Kumamoto JP
Inaba; Shogo - Suwa N/A JP
Inaba; Shogo - Suwa-Gun JP
INABA; Shogo - Fujimi-machi JP
Inaba; Shogo - Shirojiri JP
Inaba; Shogo - Suwa-shi JP
Inaba; Shogo - Nagano-ken JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Substrate Processing Apparatus, Substrate Processing Method, And Storage Medium App 20220074053 - INABA; Shogo ; et al.	2022-03-10
Coating treatment method, computer storage medium and coating treatment apparatus Grant 11,065,639 - Inaba , et al. July 20, 2	2021-07-20
Physical quantity sensor, inertia measurement device, vehicle positioning device, portable electronic apparatus, electronic apparatus, and vehicle Grant 10,761,109 - Inaba , et al. Sep	2020-09-01
Structure Forming Method And Device App 20200247666 - Kind Code	2020-08-06
Coating Film Forming Method And Coating Film Forming Apparatus App 20200234979 - INABA; Shogo	2020-07-23
Coating Treatment Method, Computer Storage Medium And Coating Treatment Apparatus App 20200147637 - INABA; Shogo ; et al.	2020-05-14
Development processing apparatus, development processing method, and storage medium Grant 10,359,702 - Shimoaoki , et al. July 23, 2	2019-07-23
Development Processing Apparatus, Development Processing Method, And Storage Medium App 20190146344 - Shimoaoki; Takeshi ; et al.	2019-05-16
Physical Quantity Sensor, Inertia Measurement Device, Vehicle Positioning Device, Portable Electronic Apparatus, Electronic Apparatus, And Vehicle App 20190101566 - INABA; Shogo ; et al.	2019-04-04
Mems Structure, Electronic Apparatus, And Moving Object App 20150340968 - INABA; Shogo ; et al.	2015-11-26
Mems Structure, Electronic Apparatus, And Moving Object App 20150315011 - INABA; Shogo ; et al.	2015-11-05
Sensor, electronic apparatus, robot, and mobile object Grant 9,176,013 - Inaba , et al. November 3, 2	2015-11-03
Vibrator, oscillator, electronic apparatus, moving object, and method of manufacturing vibrator Grant 9,154,109 - Inaba , et al. October 6, 2	2015-10-06
Vibrator, Oscillator, Electronic Device, Moving Object, And Method Of Manufacturing Vibrator App 20140312734 - INABA; Shogo ; et al.	2014-10-23
Electronic device covered by multiple layers and method for manufacturing electronic device Grant 8,796,845 - Kanemoto , et al. August 5, 2	2014-08-05
Vibrator, Oscillator, Electronic Apparatus, Moving Object, And Method Of Manufacturing Vibrator App 20140184018 - Inaba; Shogo ; et al.	2014-07-03
MEMS vibrator and oscillator Grant 8,760,234 - Inaba June 24, 2	2014-06-24
Vibrator, Manufacturing Method Of Vibrator, Electronic Apparatus, And Moving Object App 20140145551 - Inaba; Shogo ; et al.	2014-05-29
Sensor, Electronic Apparatus, Robot, And Mobile Object App 20140102217 - Inaba; Shogo ; et al.	2014-04-17
Vibrator, Manufacturing Method Of Vibrator, Electronic Apparatus, And Mobile Unit App 20140103778 - INABA; Shogo ; et al.	2014-04-17
Functional device with functional structure of a microelectromechanical system disposed in a cavity of a substrate, and manufacturing method thereof Grant 8,592,925 - Inaba November 26, 2	2013-11-26
MEMS device and fabrication method thereof Grant 8,552,512 - Inaba , et al. October 8, 2	2013-10-08
MEMS device Grant 8,525,277 - Inaba September 3, 2	2013-09-03
MEMS device and oscillator Grant 8,432,232 - Inaba April 30, 2	2013-04-30
Electronic device and method for manufacturing thereof Grant 8,410,561 - Sato , et al. April 2, 2	2013-04-02
MEMS device having a movable electrode Grant 8,395,227 - Watanabe , et al. March 12, 2	2013-03-12
Mems Vibrator And Oscillator App 20130027146 - INABA; Shogo	2013-01-31
Resonator including a microelectromechanical system structure with first and second structures of silicon layers Grant 8,362,577 - Inaba , et al. January 29, 2	2013-01-29
MEMS oscillator and method of manufacturing thereof Grant 8,305,152 - Watanabe , et al. November 6, 2	2012-11-06
Oscillator App 20120256692 - YAJIMA; Aritsugu ; et al.	2012-10-11
Micro-electro-mechanical-system (MEMS) resonator and manufacturing method thereof Grant 8,198,957 - Inaba , et al. June 12, 2	2012-06-12
Electronic Device, Resonator, Oscillator And Method For Manufacturing Electronic Device App 20120127683 - INABA; Shogo ; et al.	2012-05-24
Electronic Device And Method For Manufacturing Electronic Device App 20120104593 - KANEMOTO; Yoko ; et al.	2012-05-03
Mems Device Having A Movable Electrode App 20120104519 - WATANABE; Toru ; et al.	2012-05-03
Electronic device, resonator, oscillator and method for manufacturing electronic device Grant 8,129,804 - Inaba , et al. March 6, 2	2012-03-06
MEMS device having a movable electrode Grant 8,115,266 - Watanabe , et al. February 14, 2	2012-02-14
Micro-electro-mechanical-system (mems) Resonator And Manufacturing Method Thereof App 20120025922 - INABA; Shogo ; et al.	2012-02-02
Functional Device And Manufacturing Method Thereof App 20120012950 - Inaba; Shogo	2012-01-19
Method Of Manufacturing Mems Device App 20110306153 - KIHARA; Ryuji ; et al.	2011-12-15
Electronic Device, Resonator, Oscillator and Method for Manufacturing Electronic Device App 20110303457 - INABA; Shogo ; et al.	2011-12-15
Micro-electro-mechanical-system (MEMS) resonator and manufacturing method thereof Grant 8,063,721 - Inaba , et al. November 22, 2	2011-11-22
Mems Device Having A Movable Electrode App 20110254110 - WATANABE; Toru ; et al.	2011-10-20
Mems Device App 20110241136 - INABA; Shogo	2011-10-06
Method of manufacturing MEMS device Grant 8,026,120 - Kihara , et al. September 27, 2	2011-09-27
Mems Device And Oscillator App 20110221536 - INABA; Shogo	2011-09-15
Micro-electro-mechanical-system (MEMS) resonator and manufacturing method thereof Grant 8,018,302 - Inaba , et al. September 13, 2	2011-09-13
Electronic device, resonator, oscillator and method for manufacturing electronic device Grant 7,994,594 - Inaba , et al. August 9, 2	2011-08-09
MEMS device having a movable electrode Grant 7,989,905 - Watanabe , et al. August 2, 2	2011-08-02
Mems Oscillator And Method Of Manufacturing Thereof App 20110148537 - WATANABE; Toru ; et al.	2011-06-23
MEMS switch and manufacturing method thereof Grant 7,956,709 - Watanabe , et al. June 7, 2	2011-06-07
Mems Resonator and Manufacturing Method of the Same App 20110121908 - Inaba; Shogo ; et al.	2011-05-26
Mems Device Having A Movable Electrode App 20110095383 - WATANABE; Toru ; et al.	2011-04-28
Electronic Device and Method For Manufacturing Thereof App 20110089521 - SATO; Akira ; et al.	2011-04-21
MEMS resonator and manufacturing method of the same Grant 7,892,875 - Inaba , et al. February 22, 2	2011-02-22
Mems Device And Fabrication Method Thereof App 20110031564 - INABA; Shogo ; et al.	2011-02-10
MEMS device having a movable electrode Grant 7,884,431 - Watanabe , et al. February 8, 2	2011-02-08
Electronic device and method for manufacturing thereof Grant 7,880,245 - Sato , et al. February 1, 2	2011-02-01
MEMS device and fabrication method thereof Grant 7,838,952 - Inaba , et al. November 23, 2	2010-11-23
Method Of Manufacturing Mems Device App 20100178717 - KIHARA; Ryuji ; et al.	2010-07-15
Mems Device Having A Movable Electrode App 20100148284 - WATANABE; Toru ; et al.	2010-06-17
Electronic Device and Method for Manufacturing Thereof App 20100140734 - SATO; Akira ; et al.	2010-06-10
Mems Resonator And Manufacturing Method Of The Same App 20100109815 - INABA; Shogo ; et al.	2010-05-06
Electronic device and method for manufacturing thereof Grant 7,709,912 - Sato , et al. May 4, 2	2010-05-04
Micro-Electro-Mechanical-System (MEMS) Resonator and Manufacturing Method Thereof App 20100090786 - INABA; SHOGO ; et al.	2010-04-15
MEMS device having a movable electrode Grant 7,696,587 - Watanabe , et al. April 13, 2	2010-04-13
MEMS resonator and manufacturing method of the same Grant 7,671,430 - Inaba , et al. March 2, 2	2010-03-02
Micro-electro-mechanical-system (MEMS) resonator and manufacturing method thereof Grant 7,656,252 - Inaba , et al. February 2, 2	2010-02-02
Micro-electro-mechanical-system (mems) Resonator And Manufacturing Method Thereof App 20090302707 - INABA; Shogo ; et al.	2009-12-10
Functional Device And Manufacturing Method Thereof App 20090179287 - Inaba; Shogo	2009-07-16
Electronic Device, Resonator, Oscillator And Method For Manufacturing Electronic Device App 20080224241 - INABA; Shogo ; et al.	2008-09-18
Mems Resonator And Manufacturing Method Of The Same App 20080142912 - INABA; Shogo ; et al.	2008-06-19
Electronic Device and Method for Manufacturing Thereof App 20080105951 - SATO; Akira ; et al.	2008-05-08
Mems Device And Fabrication Method Thereof App 20080093684 - INABA; Shogo ; et al.	2008-04-24
Mems Device App 20080093685 - Watanabe; Toru ; et al.	2008-04-24
Mems Switch And Manufacturing Method Thereof App 20080035458 - WATANABE; Toru ; et al.	2008-02-14
Micro-electro-mechanical-system (mems) Resonator And Manufacturing Method Thereof App 20070109074 - Inaba; Shogo ; et al.	2007-05-17
MEMS device and manufacturing method of MEMS device App 20060180882 - Sato; Akira ; et al.	2006-08-17
Semiconductor devices and manufacturing methods thereof Grant 6,897,481 - Inaba May 24, 2	2005-05-24
Semiconductor devices and manufacturing methods thereof App 20020187604 - Inaba, Shogo	2002-12-12