Inaba; Mitsuhiko

Patent Applications and Registrations

Patent applications and USPTO patent grants for Inaba; Mitsuhiko.The latest application filed is for "substrate cleaning device and substrate cleaning method".

Company Profile

8.6.10

Inaba; Mitsuhiko - Tokyo JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Cleaning device, substrate processing apparatus, maintenance method of cleaning device, and computer-readable recording medium including maintenance program of cleaning device Grant 11,380,561 - Isokawa , et al. July 5, 2	2022-07-05
Substrate Cleaning Device And Substrate Cleaning Method App 20220020610 - Xu; Haiyang ; et al.	2022-01-20
Substrate cleaning device and substrate cleaning method Grant 11,164,757 - Xu , et al. November 2, 2	2021-11-02
Substrate Processing Apparatus And Method For Removing Substrate From Table Of Substrate Processing Apparatus App 20210210374 - Xu; Haiyang ; et al.	2021-07-08
Cleaning Device, Substrate Processing Apparatus, Maintenance Method Of Cleaning Device, And Computer-readable Recording Medium Including Maintenance Program Of Cleaning Device App 20210175099 - Isokawa; Hidetatsu ; et al.	2021-06-10
Substrate processing apparatus and method for removing substrate from table of substrate processing apparatus Grant 10,991,615 - Xu , et al. April 27, 2	2021-04-27
Substrate Processing Device App 20200388510 - MAEDA; Koji ; et al.	2020-12-10
Substrate transport system, substrate processing apparatus, hand position adjustment method Grant 10,818,531 - Yamaguchi , et al. October 27, 2	2020-10-27
Substrate processing apparatus Grant 10,688,622 - Aono , et al.	2020-06-23
Cleaning apparatus and substrate processing apparatus Grant 10,573,509 - Maeda , et al. Feb	2020-02-25
Substrate Cleaning Device And Substrate Cleaning Method App 20200013640 - Xu; Haiyang ; et al.	2020-01-09
Teaching Apparatus And Teaching Method For Substrate Transfer System App 20190378740 - Isokawa; Hidetatsu ; et al.	2019-12-12
Substrate Transport System, Substrate Processing Apparatus, Hand Position Adjustment Method App 20190164796 - YAMAGUCHI; Kuniaki ; et al.	2019-05-30
Substrate Processing Apparatus And Method For Removing Substrate From Table Of Substrate Processing Apparatus App 20190057894 - XU; Haiyang ; et al.	2019-02-21
Substrate Processing Apparatus App 20180001440 - AONO; Hiroshi ; et al.	2018-01-04
Cleaning Apparatus And Substrate Processing Apparatus App 20170372893 - Maeda; Koji ; et al.	2017-12-28

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