Imai; Motokatsu

Patent Applications and Registrations

Patent applications and USPTO patent grants for Imai; Motokatsu.The latest application filed is for "exposure method, substrate stage, exposure apparatus, and device manufacturing method".

Company Profile

0.12.11

Imai; Motokatsu - Yokohama JP
IMAI; Motokatsu - Yokohama-shi JP
Imai; Motokatsu - Yokohamashi JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Exposure method, substrate stage, exposure apparatus, and device manufacturing method Grant 9,846,371 - Owa , et al. December 19, 2	2017-12-19
Exposure Method, Substrate Stage, Exposure Apparatus, And Device Manufacturing Method App 20170329234 - OWA; Soichi ; et al.	2017-11-16
Exposure method, substrate stage, exposure apparatus, and device manufacturing method Grant 9,268,237 - Owa , et al. February 23, 2	2016-02-23
Exposure Method, Substrate Stage, Exposure Apparatus, And Device Manufacturing Method App 20150301457 - OWA; Soichi ; et al.	2015-10-22
Exposure method, substrate stage, exposure apparatus, and device manufacturing method Grant 9,019,467 - Owa , et al. April 28, 2	2015-04-28
Exposure apparatus, exposure method, and device fabrication method Grant 8,797,506 - Imai , et al. August 5, 2	2014-08-05
Exposure Method, Substrate Stage, Exposure Apparatus, And Device Manufacturing Method App 20130141701 - OWA; Soichi ; et al.	2013-06-06
Exposure Method, Substrate Stage, Exposure Apparatus, And Device Manufacturing Method App 20130141703 - OWA; Soichi ; et al.	2013-06-06
Exposure method, substrate stage, exposure apparatus, and device manufacturing method Grant 8,384,880 - Owa , et al. February 26, 2	2013-02-26
Exposure Apparatus, Exposure Method, And Device Fabrication Method App 20120320350 - IMAI; Motokatsu ; et al.	2012-12-20
Exposure apparatus, exposure method, and device fabrication method Grant 8,272,544 - Imai , et al. September 25, 2	2012-09-25
Exposure method, substrate stage, exposure apparatus, and device manufacturing method Grant 8,208,117 - Owa , et al. June 26, 2	2012-06-26
Exposure apparatus, exposure method, and device fabrication method App 20110189613 - Imai; Motokatsu ; et al.	2011-08-04
Exposure apparatus, exposure method, and device fabrication method Grant 7,932,996 - Imai , et al. April 26, 2	2011-04-26
Exposure method, substrate stage, exposure apparatus, and device manufacturing method App 20090015816 - Owa; Soichi ; et al.	2009-01-15
Exposure method, substrate stage, exposure apparatus, and device manufacturing method App 20090015808 - Owa; Soichi ; et al.	2009-01-15
Exposure apparatus, exposure method, and device fabrication method App 20070002299 - Imai; Motokatsu ; et al.	2007-01-04
Exposure method, substrate stage, exposure apparatus, and device manufacturing method App 20060227312 - Owa; Soichi ; et al.	2006-10-12
Exposure method, substrate stage, exposure apparatus, and device manufacturing method App 20060139614 - Owa; Soichi ; et al.	2006-06-29
Multiple rotating absolute encoder capable of accurately latching absolute address data with data on number of rotations Grant 5,663,557 - Morita , et al. September 2, 1	1997-09-02
Absolute encoder using interpolation to obtain high resolution Grant 5,252,825 - Imai , et al. October 12, 1	1993-10-12

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