loadpatents
Patent applications and USPTO patent grants for IMAI; Masayoshi.The latest application filed is for "cleaning apparatus for cleaning member, substrate cleaning apparatus and cleaning member assembly".
Patent | Date |
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Cleaning Apparatus For Cleaning Member, Substrate Cleaning Apparatus And Cleaning Member Assembly App 20210305069 - KAJIKAWA; Takayuki ;   et al. | 2021-09-30 |
Substrate cleaning apparatus, substrate cleaning method, and control method of substrate cleaning apparatus Grant 10,985,037 - Minoshima , et al. April 20, 2 | 2021-04-20 |
Method Of Cleaning A Substrate App 20200176281 - MAEDA; Koji ;   et al. | 2020-06-04 |
Substrate cleaning apparatus Grant 10,607,862 - Imai | 2020-03-31 |
Substrate processing apparatus and substrate processing method Grant 10,500,691 - Imai , et al. Dec | 2019-12-10 |
Substrate processing apparatus and pipe cleaning method for substrate processing apparatus Grant 10,438,818 - Kunisawa , et al. O | 2019-10-08 |
Wafer drying apparatus and wafer drying method Grant 10,229,841 - Imai , et al. | 2019-03-12 |
Substrate Cleaning Apparatus, Substrate Cleaning Method, And Control Method Of Substrate Cleaning Apparatus App 20180294171 - MINOSHIMA; Daisuke ;   et al. | 2018-10-11 |
Substrate Processing Apparatus And Substrate Processing Method App 20180056470 - IMAI; Masayoshi ;   et al. | 2018-03-01 |
Substrate Cleaning Apparatus App 20170263471 - IMAI; Masayoshi | 2017-09-14 |
Substrate cleaning apparatus Grant 9,666,455 - Imai May 30, 2 | 2017-05-30 |
Substrate Processing Apparatus And Pipe Cleaning Method For Substrate Processing Apparatus App 20170117165 - KUNISAWA; Junji ;   et al. | 2017-04-27 |
Wafer Drying Apparatus And Wafer Drying Method App 20160372344 - IMAI; Masayoshi ;   et al. | 2016-12-22 |
Substrate Cleaning Apparatus And Polishing Apparatus App 20140190633 - Maeda; Koji ;   et al. | 2014-07-10 |
Substrate Cleaning Apparatus App 20130306116 - Imai; Masayoshi | 2013-11-21 |
Substrate processing apparatus Grant 7,479,205 - Okuda , et al. January 20, 2 | 2009-01-20 |
Substrate processing apparatus Grant 7,428,907 - Okuda , et al. September 30, 2 | 2008-09-30 |
Substrate processing apparatus Grant 7,267,130 - Okuda , et al. September 11, 2 | 2007-09-11 |
Substrate processing apparatus Grant 6,951,221 - Okuda , et al. October 4, 2 | 2005-10-04 |
Substrate processing apparatus App 20040206379 - Okuda, Seiichiro ;   et al. | 2004-10-21 |
Substrate processing apparatus App 20040206378 - Okuda, Seiichiro ;   et al. | 2004-10-21 |
Substrate processing apparatus App 20040206452 - Okuda, Seiichiro ;   et al. | 2004-10-21 |
Substrate processing apparatus App 20040200513 - Okuda, Seiichiro ;   et al. | 2004-10-14 |
Substrate processing apparatus App 20020035762 - Okuda, Seiichiro ;   et al. | 2002-03-28 |
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