| Patent | Date |
|---|
Semiconductor device with a booster layer and method for fabricating the same
Grant 11,410,813 - Kang , et al. August 9, 2 | 2022-08-09 |
Semiconductor Device
App 20210359100 - MAENG; Wan Joo ; et al. | 2021-11-18 |
Semiconductor Device And Method For Fabricating The Same
App 20210142946 - KANG; Se-Hun ; et al. | 2021-05-13 |
Semiconductor device having capacitor and method of fabricating the semiconductor device
Grant 9,716,094 - Kang , et al. July 25, 2 | 2017-07-25 |
Semiconductor devices including nanowire capacitors and fabricating methods thereof
Grant 9,646,971 - Im , et al. May 9, 2 | 2017-05-09 |
Semiconductor Device Having Capacitor And Method Of Fabricating The Semiconductor Device
App 20170098652 - Kang; Sang-Yeol ; et al. | 2017-04-06 |
Semiconductor Devices Including Nanowire Capacitors And Fabricating Methods Thereof
App 20170062435 - IM; Dong-Hyun ; et al. | 2017-03-02 |
Methods of Fabricating Semiconductor Devices
App 20160079260 - Bae; Jin-woo ; et al. | 2016-03-17 |
Semiconductor device and fabricating method thereof
Grant 9,287,270 - Oh , et al. March 15, 2 | 2016-03-15 |
Methods of fabricating semiconductor devices
Grant 9,269,720 - Bae , et al. February 23, 2 | 2016-02-23 |
Semiconductor Devices Having Self-aligned Contact Pads
App 20160027786 - KIM; Young-Kuk ; et al. | 2016-01-28 |
Semiconductor devices having self-aligned contact pads
Grant 9,240,414 - Kim , et al. January 19, 2 | 2016-01-19 |
Methods of manufacturing semiconductor devices having self-aligned contact pads
Grant 9,184,227 - Kim , et al. November 10, 2 | 2015-11-10 |
Semiconductor Device And Method Of Forming Thereof
App 20150311297 - IM; Badro ; et al. | 2015-10-29 |
Semiconductor Devices Having Self-aligned Contact Pads And Methods Of Manufacturing The Same
App 20150311276 - KIM; YOUNG-KUK ; et al. | 2015-10-29 |
Semiconductor Device And Method For Fabricating The Same
App 20150091133 - Cho; Kyu-Ho ; et al. | 2015-04-02 |
Semiconductor Device And Fabricating Method Thereof
App 20150091069 - OH; Jung-Hwan ; et al. | 2015-04-02 |
Semiconductor devices including capacitor support pads
Grant 8,941,164 - Cho , et al. January 27, 2 | 2015-01-27 |
Electronic Devices Including Oxide Dielectric And Interface Layers
App 20140327062 - PARK; Ki-Yeon ; et al. | 2014-11-06 |
Capacitors Having Dielectric Layers With Different Band Gaps And Semiconductor Devices Using The Same
App 20140231958 - Lim; Han-Jin ; et al. | 2014-08-21 |
Semiconductor device including insulating layer of cubic system or tetragonal system
Grant 8,710,564 - Lee , et al. April 29, 2 | 2014-04-29 |
Semiconductor Devices Including Capacitor Support Pads
App 20130292796 - Cho; Young-kyu ; et al. | 2013-11-07 |
Atomic layer deposition apparatus
Grant 8,546,270 - Kim , et al. October 1, 2 | 2013-10-01 |
Atomic Layer Deposition Apparatus
App 20130178070 - KIM; Ki-Hyun ; et al. | 2013-07-11 |
Semiconductor devices including capacitor support pads
Grant 8,405,136 - Cho , et al. March 26, 2 | 2013-03-26 |
Methods of fabricating semiconductor devices including multilayer dielectric layers
Grant 8,399,364 - Kim , et al. March 19, 2 | 2013-03-19 |
Atomic layer deposition apparatus
Grant 8,394,201 - Kim , et al. March 12, 2 | 2013-03-12 |
Methods of removing water from semiconductor substrates and methods of depositing atomic layers using the same
Grant 8,357,593 - Kim , et al. January 22, 2 | 2013-01-22 |
Capacitor
Grant 8,339,765 - Choi , et al. December 25, 2 | 2012-12-25 |
Semiconductor Device Including Insulating Layer of Cubic System or Tetragonal System
App 20120168904 - Lee; Jong-cheol ; et al. | 2012-07-05 |
Semiconductor device including insulating layer of cubic system or tetragonal system
Grant 8,159,012 - Lee , et al. April 17, 2 | 2012-04-17 |
Methods Of Fabricating Semiconductor Devices Including Multilayer Dielectric Layers
App 20110230056 - Kim; Kil-chul ; et al. | 2011-09-22 |
Semiconductor Devices Including Capacitor Support Pads
App 20110079879 - Cho; Young-kyu ; et al. | 2011-04-07 |
Method of manufacturing semiconductor devices including capacitor support pads
Grant 7,871,891 - Cho , et al. January 18, 2 | 2011-01-18 |
Dielectric layer, method of manufacturing the dielectric layer and method of manufacturing capacitor using the same
Grant 7,838,438 - Im , et al. November 23, 2 | 2010-11-23 |
In-situ method of cleaning vaporizer during dielectric layer deposition process
Grant 7,824,501 - Choi , et al. November 2, 2 | 2010-11-02 |
Semiconductor devices having dielectric layers and methods of forming the same
Grant 7,791,125 - Choi , et al. September 7, 2 | 2010-09-07 |
Methods Of Removing Water From Semiconductor Substrates And Methods Of Depositing Atomic Layers Using The Same
App 20100190320 - Kim; Ki-chul ; et al. | 2010-07-29 |
Method manufacturing capacitor dielectric
Grant 7,759,718 - Kang , et al. July 20, 2 | 2010-07-20 |
Etch stop structure and method of manufacture, and semiconductor device and method of manufacture
Grant 7,741,222 - You , et al. June 22, 2 | 2010-06-22 |
Capacitor
App 20100134950 - Choi; Hoon-Sang ; et al. | 2010-06-03 |
Storage electrode of a capacitor and a method of forming the same
Grant 7,723,182 - Jang , et al. May 25, 2 | 2010-05-25 |
Semiconductor Device and Method of Fabricating the Same
App 20090309187 - Choi; Jae-hyoung ; et al. | 2009-12-17 |
Multilayer Electrode Structures Including Capacitor Structures Having Aluminum Oxide Diffusion Barriers
App 20090195962 - Lee; Jong-Cheol ; et al. | 2009-08-06 |
Atomic Layer Deposition Apparatus
App 20090191717 - KIM; Ki-Hyun ; et al. | 2009-07-30 |
Methods of forming capacitor structures having aluminum oxide diffusion barriers
Grant 7,514,315 - Lee , et al. April 7, 2 | 2009-04-07 |
Semiconductor Device Including Insulating Layer of Cubic System or Tetragonal System
App 20090085160 - Lee; Jong-cheol ; et al. | 2009-04-02 |
Semiconductor Devices Including Capacitor Support Pads and Related Methods
App 20090068814 - Cho; Young-kyu ; et al. | 2009-03-12 |
Method of forming a thin film, method of manufacturing a gate structure using the same and method of manufacturing a capacitor using the same
Grant 7,485,585 - Park , et al. February 3, 2 | 2009-02-03 |
In-situ Method Of Cleaning Vaporizer During Dielectric Layer Deposition Process
App 20080121184 - Choi; Hoon-sang ; et al. | 2008-05-29 |
Method Manufacturing Capacitor Dielectric
App 20080122044 - KANG; Sang-yeol ; et al. | 2008-05-29 |
Capicitor Using Binary Metal Electrode, Semiconductor Device Having The Capacitor And Method of Fabricating The Same
App 20080087930 - Lee; Jong-Cheol ; et al. | 2008-04-17 |
Phase Change Memory Device And Method Of Forming The Same
App 20080054244 - Lee; Jin-Il ; et al. | 2008-03-06 |
Semiconductor devices having dielectric layers and methods of forming the same
App 20080023746 - Choi; Hoon-Sang ; et al. | 2008-01-31 |
Methods Of Forming Metal Thin Films, Lanthanum Oxide Films, And High Dielectric Films For Semiconductor Devices Using Atomic Layer Deposition
App 20070259212 - Park; Ki-yeon ; et al. | 2007-11-08 |
Multilayer Electrode Structures Including Capacitor Structures Having Aluminum Oxide Diffusion Barriers And Methods Of Forming The Same
App 20070257370 - Lee; Jong-Cheol ; et al. | 2007-11-08 |
Capacitors and methods of fabricating the same
App 20070236863 - Lee; Jong-cheol ; et al. | 2007-10-11 |
Method Of Forming A Layer And Method Of Manufacturing A Capacitor Using The Same
App 20070098892 - CHUNG; Eun-Ae ; et al. | 2007-05-03 |
Dielectric layer, method of manufacturing the dielectric layer and method of manufacturing capacitor using the same
App 20070059895 - Im; Ki Vin ; et al. | 2007-03-15 |
Methods Of Forming A Metal Oxide Layer Including Zirconium Oxide And Methods Of Forming A Capacitor For Semiconductor Devices Including The Same
App 20070032013 - Yoon; Kyoung-Ryul ; et al. | 2007-02-08 |
Capacitor and methods of manufacturing the same
App 20060267019 - Kim; Kyoung-Seok ; et al. | 2006-11-30 |
Method of forming a thin film, method of manufacturing a gate structure using the same and method of manufacturing a capacitor using the same
App 20060205198 - Park; Young-Geun ; et al. | 2006-09-14 |
High performance MIS capacitor with HfO.sub.2 dielectric
Grant 7,094,712 - Im , et al. August 22, 2 | 2006-08-22 |
Storage electrode of a capacitor and a method of forming the same
App 20060113575 - Jang; Won-Jun ; et al. | 2006-06-01 |
Etch stop structure and method of manufacture, and semiconductor device and method of manufacture
App 20060084275 - You; Young-Sub ; et al. | 2006-04-20 |
Apparatus for forming dielectric structures in integrated circuits
App 20060084225 - Park; In-Sung ; et al. | 2006-04-20 |
Method of forming a layer and method of forming a capacitor of a semiconductor device having the same
App 20060063346 - Lee; Jong-Cheol ; et al. | 2006-03-23 |
Method of forming a layer and forming a capacitor of a semiconductor device having the same layer
App 20060014384 - Lee; Jong-Cheol ; et al. | 2006-01-19 |
Semiconductor device and method for manufacturing the same
App 20050272272 - Yeo, Jae-Hyun ; et al. | 2005-12-08 |
Semiconductor device and method for manufacturing the same
Grant 6,946,342 - Yeo , et al. September 20, 2 | 2005-09-20 |
Capacitor of semiconductor memory device that has composite Al2O3/HfO2 dielectric layer and method of manufacturing the same
Grant 6,897,106 - Park , et al. May 24, 2 | 2005-05-24 |
Capacitor of semiconductor memory device that has composite A12O3/HfO2 dielectric layer and method of manufacturing the same
App 20050087791 - Park, Ki-Yeon ; et al. | 2005-04-28 |
Apparatus and method for supplying a source, and method of depositing an atomic layer using the same
App 20050081787 - Im, Ki-Vin ; et al. | 2005-04-21 |
High performance MIS capacitor with HfO2 dielectric
App 20050070063 - Im, Ki-Vin ; et al. | 2005-03-31 |
Methods of forming metal thin films, lanthanum oxide films, and high dielectric films for semiconductor devices using atomic layer deposition
App 20050051828 - Park, Ki-yeon ; et al. | 2005-03-10 |
Methods and apparatus for depositing a thin film on a substrate
App 20050000426 - Im, Ki-Vin ; et al. | 2005-01-06 |
Methods and apparatus for forming dielectric structures in integrated circuits
App 20040166628 - Park, In-Sung ; et al. | 2004-08-26 |
Capacitor of semiconductor memory device that has composite Al2O3/HfO2 dielectric layer and method of manufacturing the same
App 20040157391 - Park, Ki-Yeon ; et al. | 2004-08-12 |
Semiconductor device and method for manufacturing the same
App 20040033661 - Yeo, Jae-Hyun ; et al. | 2004-02-19 |
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