Iliew; Rumen

Patent Applications and Registrations

Patent applications and USPTO patent grants for Iliew; Rumen.The latest application filed is for "projection lens for euv microlithography, film element and method for producing a projection lens comprising a film element".

Company Profile

0.4.5

Iliew; Rumen - Oberkochen DE

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Projection lens for EUV microlithography, film element and method for producing a projection lens comprising a film element Grant 10,001,631 - Bittner , et al. June 19, 2	2018-06-19
Projection Lens for EUV Microlithography, Film Element and Method for Producing a Projection Lens Comprising a Film Element App 20170261730 - Bittner; Boris ; et al.	2017-09-14
Mirror arrangement for an EUV projection exposure apparatus, method for operating the same, and EUV projection exposure apparatus Grant 9,709,770 - Bittner , et al. July 18, 2	2017-07-18
Reflective optical element Grant 9,470,872 - Bittner , et al. October 18, 2	2016-10-18
Microlithographic apparatus Grant 9,348,234 - Bittner , et al. May 24, 2	2016-05-24
Microlithographic Apparatus App 20160011521 - Bittner; Boris ; et al.	2016-01-14
Mirror Arrangement For An Euv Projection Exposure Apparatus, Method For Operating The Same, And Euv Projection Exposure Apparatus App 20150168674 - Bittner; Boris ; et al.	2015-06-18
Reflective Optical Element App 20150116703 - Bittner; Boris ; et al.	2015-04-30
Projection Lens for EUV Microlithography, Film Element and Method for Producing a Projection Lens Comprising a Film Element App 20140347721 - Bittner; Boris ; et al.	2014-11-27

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