Patent | Date |
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Reflective mask blank for EUV lithography Grant 10,928,721 - Ikuta February 23, 2 | 2021-02-23 |
Reflective mask blank for EUV lithography, and process for its inspection and process for its production Grant 9,739,722 - Nakanishi , et al. August 22, 2 | 2017-08-22 |
Reflective Mask Blank For Euv Lithography App 20160357100 - IKUTA; Yoshiaki | 2016-12-08 |
Glass Substrate For Mask Blank App 20160266482 - UMEO; Naohiro ;   et al. | 2016-09-15 |
Method Of Finishing Pre-polished Glass Substrate Surface App 20160168020 - OKAMURA; Yuzo ;   et al. | 2016-06-16 |
Reflective Mask Blank For Euv Lithography, And Process For Its Inspection And Process For Its Production App 20160109384 - NAKANISHI; Hiroshi ;   et al. | 2016-04-21 |
Reflective mask blank for EUV lithography, method of manufacturing thereof, reflective mask for EUV lithography and method of manufacturing thereof Grant 9,268,207 - Ikuta February 23, 2 | 2016-02-23 |
Glass Substrate For Optical Lithography App 20160041463 - Ikuta; Yoshiaki ;   et al. | 2016-02-11 |
SPARC-derived tumor rejection antigenic peptides and medicaments comprising the same Grant 9,120,842 - Nishimura , et al. September 1, 2 | 2015-09-01 |
Reflective Mask Blank For Euv Lithography, Method Of Manufacturing Thereof, Reflective Mask For Euv Lithography And Method Of Manufacturing Thereof App 20150198874 - IKUTA; Yoshiaki | 2015-07-16 |
Reflective layer-equipped substrate for EUV lithography, reflective mask blank for EUV lithography, reflective mask for EUV lithography, and process for production of the reflective layer-equipped substrate Grant 8,993,201 - Mikami , et al. March 31, 2 | 2015-03-31 |
Multilayer substrate, manufacturing method for multilayer substrate, and quality control method for multilayer substrate Grant 8,921,017 - Okamura , et al. December 30, 2 | 2014-12-30 |
Reflecting mask blank, method for manufacturing reflective mask blank and method for quality control for reflective mask blank Grant 8,916,316 - Okamura , et al. December 23, 2 | 2014-12-23 |
Reflecting Mask Blank, Method For Manufacturing Reflective Mask Blank And Method For Quality Control For Reflective Mask Blank App 20140186753 - OKAMURA; Yuzo ;   et al. | 2014-07-03 |
Multilayer Substrate, Manufacturing Method For Multilayer Substrate, And Quality Control Method For Multilayer Substrate App 20140011123 - OKAMURA; Yuzo ;   et al. | 2014-01-09 |
Multilayer mirror for EUV lithography and process for its production Grant 8,580,465 - Mikami , et al. November 12, 2 | 2013-11-12 |
Sparc-derived Tumor Rejection Antigenic Peptides And Medicaments Comprising The Same App 20130288363 - NISHIMURA; Yasuharu ;   et al. | 2013-10-31 |
Optical member base material for EUV lithography, and method for producing same Grant 8,518,613 - Nakanishi , et al. August 27, 2 | 2013-08-27 |
SPARC-derived tumor rejection antigenic peptides and medicaments comprising the same Grant 8,470,968 - Nishimura , et al. June 25, 2 | 2013-06-25 |
Synthetic silica glass optical component and process for its production Grant 8,402,786 - Ikuta , et al. March 26, 2 | 2013-03-26 |
Optical Member Base Material For Euv Lithography, And Method For Producing Same App 20130011773 - NAKANISHI; Hiroshi ;   et al. | 2013-01-10 |
Reflective Layer-equipped Substrate For Euv Lithography, Reflective Mask Blank For Euv Lithography, Reflective Mask For Euv Lithography, And Process For Production Of The Reflective Layer-equipped Substrate App 20120231378 - Mikami; Masaki ;   et al. | 2012-09-13 |
Banknote deposit machine, processing system and method Grant 8,251,197 - Takeuchi , et al. August 28, 2 | 2012-08-28 |
Reflective mask blank for EUV lithography, process for producing the same and mask for EUV lithography Grant 8,241,821 - Ikuta August 14, 2 | 2012-08-14 |
Multilayer Mirror For Euv Lithography And Process For Its Production App 20120196208 - MIKAMI; Masaki ;   et al. | 2012-08-02 |
Method and apparatus for an in-situ ultraviolet cleaning tool Grant 8,206,510 - Rastegar , et al. June 26, 2 | 2012-06-26 |
Sparc-derived Tumor Rejection Antigenic Peptides And Medicaments Comprising The Same App 20120115221 - NISHIMURA; Yasuharu ;   et al. | 2012-05-10 |
Method for removing foreign matter from substrate surface Grant 8,052,797 - Ikuta November 8, 2 | 2011-11-08 |
SPARC-derived tumor rejection antigenic peptides and medicaments comprising the same Grant 8,053,557 - Nishimura , et al. November 8, 2 | 2011-11-08 |
Diagnostic kit for malignant melanoma Grant 8,017,345 - Nishimura , et al. September 13, 2 | 2011-09-13 |
Reflective Mask Blank For Euv Lithography, Process For Producing The Same And Mask For Euv Lithography App 20110165504 - IKUTA; Yoshiaki | 2011-07-07 |
Reflective-type mask blank for EUV lithography Grant 7,960,077 - Ikuta , et al. June 14, 2 | 2011-06-14 |
Method and Apparatus for an In-Situ Ultraviolet Cleaning Tool App 20110132394 - Rastegar; Abbas ;   et al. | 2011-06-09 |
Tio2-containing Quartz Glass Substrate App 20110089612 - IKUTA; YOSHIAKI ;   et al. | 2011-04-21 |
Method and apparatus for an in-situ ultraviolet cleaning tool Grant 7,921,859 - Rastegar , et al. April 12, 2 | 2011-04-12 |
Process for smoothing surface of glass substrate Grant 7,901,843 - Sugiyama , et al. March 8, 2 | 2011-03-08 |
TiO2-containing quartz glass substrate App 20100234205 - Ikuta; Yoshiaki ;   et al. | 2010-09-16 |
Optical member made of synthetic quartz glass, and process for its production Grant 7,784,307 - Ogawa , et al. August 31, 2 | 2010-08-31 |
Banknote Deposit Machine, Processing System And Method App 20100174403 - TAKEUCHI; HISASHI ;   et al. | 2010-07-08 |
Reflective-type Mask Blank For Euv Lithography App 20100167187 - IKUTA; Yoshiaki ;   et al. | 2010-07-01 |
Sparc-derived Tumor Rejection Antigenic Peptides And Medicaments Comprising The Same App 20100152421 - Nishimura; Yasuharu ;   et al. | 2010-06-17 |
Method for smoothing a surface of a glass substrate for a reflective mask blank used in EUV lithography Grant 7,712,333 - Uno , et al. May 11, 2 | 2010-05-11 |
Printed note processing machine and system Grant 7,694,797 - Takeuchi , et al. April 13, 2 | 2010-04-13 |
Reflective-type mask blank for EUV lithography Grant 7,678,511 - Ikuta , et al. March 16, 2 | 2010-03-16 |
Process For Smoothing Surface Of Glass Substrate App 20090286166 - SUGIYAMA; Takashi ;   et al. | 2009-11-19 |
Quartz glass substrate and process for its production Grant 7,592,063 - Ikuta , et al. September 22, 2 | 2009-09-22 |
Photomask, photomask manufacturing method, and photomask processing device Grant 7,549,141 - Ikuta , et al. June 16, 2 | 2009-06-16 |
Apparatus and method for cleaning substrate Grant 7,527,695 - Ikuta May 5, 2 | 2009-05-05 |
Novel Diagnostic Kit For Malignant Melanoma App 20090111095 - Nishimura; Yasuharu ;   et al. | 2009-04-30 |
Synthetic quartz glass for optical member and its production method Grant 7,514,382 - Ikuta , et al. April 7, 2 | 2009-04-07 |
Method for depositing multi-layer film of mask blank for EUV lithography and method for producing mask blank for EUV lithography Grant 7,504,185 - Ikuta , et al. March 17, 2 | 2009-03-17 |
Synthetic quartz glass for optical member, projection exposure apparatus and projection exposure method Grant 7,368,403 - Ikuta , et al. May 6, 2 | 2008-05-06 |
Method For Removing Foreign Matter From Substrate Surface App 20080092918 - IKUTA; Yoshiaki | 2008-04-24 |
Quartz glass substrate and process for its production App 20080057291 - Ikuta; Yoshiaki ;   et al. | 2008-03-06 |
Apparatus and method for cleaning substrate App 20070295355 - Ikuta; Yoshiaki | 2007-12-27 |
Method for removing contaminant from surface of glass substrate App 20070256703 - Ikuta; Yoshiaki | 2007-11-08 |
Method for smoothing a surface of a glass substrate, and substrate for a reflective mask blank used in EUV lithography, obtainable by that method App 20070240453 - Uno; Toshiyuki ;   et al. | 2007-10-18 |
Reflective-type mask blank for EUV lithography App 20070160916 - Ikuta; Yoshiaki ;   et al. | 2007-07-12 |
Defect repair device and defect repair method Grant 7,230,695 - Ikuta , et al. June 12, 2 | 2007-06-12 |
Method for depositing multi-layer film of mask blank for EUV lithography and method for producing mask blank for EUV lithography App 20070077499 - Ikuta; Yoshiaki ;   et al. | 2007-04-05 |
Photomask, photomask manufacturing method, and photomask processing device App 20070059608 - Ikuta; Yoshiaki ;   et al. | 2007-03-15 |
Optical member made of synthetic quartz glass, and process for its production App 20070027018 - Ogawa; Tomonori ;   et al. | 2007-02-01 |
Method and apparatus for an in-situ ultraviolet cleaning tool App 20060207629 - Rastegar; Abbas ;   et al. | 2006-09-21 |
Synthetic quartz glass for optical member and its production method App 20060183623 - Ikuta; Yoshiaki ;   et al. | 2006-08-17 |
Synthetic quartz glass and process for producing it Grant 7,022,633 - Ikuta , et al. April 4, 2 | 2006-04-04 |
Defect repair device and defect repair method App 20060007433 - Ikuta; Yoshiaki ;   et al. | 2006-01-12 |
Synthetic quartz glass App 20050176572 - Hosono, Hideo ;   et al. | 2005-08-11 |
Synthetic quartz glass for optical member, projection exposure apparatus and projection exposure method App 20050068644 - Ikuta, Yoshiaki ;   et al. | 2005-03-31 |
Printed note processing machine and system App 20040205025 - Takeuchi, Hisashi ;   et al. | 2004-10-14 |
Bill handling machine Grant 6,749,053 - Ikuta June 15, 2 | 2004-06-15 |
Synthetic quartz glass and process for producing it App 20030195107 - Ikuta, Yoshiaki ;   et al. | 2003-10-16 |
Exposure apparatus, semiconductor device, and photomask Grant 6,611,317 - Ogawa , et al. August 26, 2 | 2003-08-26 |
Synthetic quartz glass and method for preparing the same Grant 6,576,578 - Ikuta , et al. June 10, 2 | 2003-06-10 |
Synthetic quartz glass for optical member, process for producing the same, and method of using the same Grant 6,544,914 - Kikugawa , et al. April 8, 2 | 2003-04-08 |
Synthetic silica glass optical component and process for its production App 20030051507 - Ikuta, Yoshiaki ;   et al. | 2003-03-20 |
Pellicle and method for manufacture thereof Grant 6,475,575 - Ikuta , et al. November 5, 2 | 2002-11-05 |
Container for an optical article App 20010035361 - Mishiro, Hitoshi ;   et al. | 2001-11-01 |
Bill handling machine App 20010015309 - Ikuta, Yoshiaki | 2001-08-23 |
Method for drawing up special crude oil Grant 4,919,207 - Ikuta , et al. April 24, 1 | 1990-04-24 |
Method for drawing up special crude oil Grant 4,756,368 - Ikuta , et al. July 12, 1 | 1988-07-12 |