IKEGAWA; Hiroaki
Patent Applications and Registrations
Patent applications and USPTO patent grants for IKEGAWA; Hiroaki.The latest application filed is for "method for manufacturing semiconductor device and substrate processing apparatus".
- IKEGAWA; Hiroaki - Yamanashi JP
- Ikegawa; Hiroaki - Nirasaki JP
- IKEGAWA; Hiroaki - Nirasaki City JP
- Ikegawa; Hiroaki - Iwate JP
- Ikegawa; Hiroaki - Tokyo-To JP
- Ikegawa, Hiroaki - Tokyo JP
| Patent | Date |
|---|---|
| Method For Manufacturing Semiconductor Device And Substrate Processing Apparatus App 20220189785 - MOTOYAMA; Yutaka ; et al. | 2022-06-16 |
| Boat Transfer Method And Heat Treatment Apparatus App 20220122867 - HISHIYA; Shingo ; et al. | 2022-04-21 |
| Substrate processing method and substrate processing apparatus Grant 11,171,014 - Hane , et al. November 9, 2 | 2021-11-09 |
| Method of manufacturing semiconductor device and apparatus of manufacturing semiconductor device Grant 10,900,121 - Fukiage , et al. January 26, 2 | 2021-01-26 |
| Film forming apparatus and operation method of film forming apparatus Grant 10,550,470 - Hane , et al. Fe | 2020-02-04 |
| Film formation apparatus Grant 10,550,467 - Ikegawa , et al. Fe | 2020-02-04 |
| Film formation apparatus Grant 10,519,550 - Ikegawa , et al. Dec | 2019-12-31 |
| Film forming method, film forming apparatus, and storage medium Grant 10,438,791 - Hane , et al. O | 2019-10-08 |
| Film-forming Method And Film-forming Apparatus App 20190292662 - HANE; Hideomi ; et al. | 2019-09-26 |
| Semiconductor device manufacturing method and semiconductor device manufacturing system Grant 10,297,443 - Ikegawa , et al. | 2019-05-21 |
| Film Forming Apparatus And Operation Method Of Film Forming Apparatus App 20190127849 - HANE; Hideomi ; et al. | 2019-05-02 |
| Film Forming Method, Film Forming Apparatus, and Storage Medium App 20180366315 - Hane; Hideomi ; et al. | 2018-12-20 |
| Substrate Processing Method And Substrate Processing Apparatus App 20180358235 - HANE; Hideomi ; et al. | 2018-12-13 |
| Film Formation Processing Method And Film Formation Procesing Apparatus App 20180142350 - Fukiage; Noriaki ; et al. | 2018-05-24 |
| Semiconductor Device Manufacturing Method and Semiconductor Device Manufacturing System App 20170278698 - IKEGAWA; Hiroaki ; et al. | 2017-09-28 |
| Film Formation Apparatus App 20170183779 - IKEGAWA; Hiroaki ; et al. | 2017-06-29 |
| Film Formation Apparatus App 20170183777 - IKEGAWA; Hiroaki ; et al. | 2017-06-29 |
| Film forming method, film forming apparatus, and storage medium Grant 9,640,448 - Ikegawa , et al. May 2, 2 | 2017-05-02 |
| Film Forming Method, Film Forming Apparatus, and Storage Medium App 20160284613 - IKEGAWA; Hiroaki ; et al. | 2016-09-29 |
| Film deposition method Grant 9,252,043 - Ikegawa , et al. February 2, 2 | 2016-02-02 |
| Method of depositing film Grant 9,136,133 - Oshimo , et al. September 15, 2 | 2015-09-15 |
| Method of depositing a film using a turntable apparatus Grant 8,987,147 - Ikegawa , et al. March 24, 2 | 2015-03-24 |
| Film deposition method Grant 8,980,371 - Ikegawa , et al. March 17, 2 | 2015-03-17 |
| Film deposition method Grant 8,962,495 - Ikegawa , et al. February 24, 2 | 2015-02-24 |
| Method Of Depositing Film App 20150011087 - OSHIMO; Kentaro ; et al. | 2015-01-08 |
| Method of depositing a film Grant 8,921,237 - Oshimo , et al. December 30, 2 | 2014-12-30 |
| Method of depositing a film Grant 8,895,456 - Tachibana , et al. November 25, 2 | 2014-11-25 |
| Film Deposition Apparatus App 20140209028 - OSHIMO; Kentaro ; et al. | 2014-07-31 |
| Method Of Depositing A Film App 20140179122 - Tachibana; Mitsuhiro ; et al. | 2014-06-26 |
| Method Of Depositing A Film App 20140179104 - Oshimo; Kentaro ; et al. | 2014-06-26 |
| Method Of Depositing A Film App 20140179121 - IKEGAWA; Hiroaki ; et al. | 2014-06-26 |
| Film Deposition Method, Storage Medium, And Film Deposition Apparatus App 20140147591 - IKEGAWA; Hiroaki ; et al. | 2014-05-29 |
| Film Deposition Method App 20140011353 - IKEGAWA; Hiroaki ; et al. | 2014-01-09 |
| Film Deposition Method App 20130337658 - Ikegawa; Hiroaki ; et al. | 2013-12-19 |
| Method of forming film and film forming apparatus App 20060216953 - Nakajima; Shigeru ; et al. | 2006-09-28 |
| Method of manufacturing semiconductor device, film-forming apparatus, and storage medium Grant 7,084,023 - Nakajima , et al. August 1, 2 | 2006-08-01 |
| Semiconductor processing method for processing substrate to be processed and its apparatus App 20050272271 - Furuya, Haruhiko ; et al. | 2005-12-08 |
| Method of manufacturing semiconductor device, film-forming apparatus, and storage medium App 20050142716 - Nakajima, Shigeru ; et al. | 2005-06-30 |
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