| Patent | Date |
|---|
Concentration Measurement Device
App 20220299432 - NAGASE; Masaaki ; et al. | 2022-09-22 |
Density Measurement Device
App 20220283081 - NAGASE; Masaaki ; et al. | 2022-09-08 |
Diaphragm Valve
App 20220268365 - HIRATA; Kaoru ; et al. | 2022-08-25 |
Pressure-type flow control device and flow control method
Grant 11,416,011 - Sugita , et al. August 16, 2 | 2022-08-16 |
Liquid level meter, vaporizer equipped with the same, and liquid level detection method
Grant 11,402,250 - Hidaka , et al. August 2, 2 | 2022-08-02 |
Concentration measurement device
Grant 11,391,668 - Nagase , et al. July 19, 2 | 2022-07-19 |
Fluid control device
Grant 11,390,951 - Hidaka , et al. July 19, 2 | 2022-07-19 |
Self-diagnosis method for flow rate control device
Grant 11,391,608 - Sugita , et al. July 19, 2 | 2022-07-19 |
Flow Rate Control Device
App 20220197316 - HIRATA; Kaoru ; et al. | 2022-06-23 |
Concentration Measurement Device
App 20220170849 - NAGASE; Masaaki ; et al. | 2022-06-02 |
Concentration Measurement Device
App 20220172969 - NAGASE; Masaaki ; et al. | 2022-06-02 |
Piezoelectric driven valve, pressure-type flow rate control device, and vaporization supply device
Grant 11,346,457 - Dohi , et al. May 31, 2 | 2022-05-31 |
Flow rate measuring method and flow rate measuring device
Grant 11,326,921 - Nagase , et al. May 10, 2 | 2022-05-10 |
Flow rate control device and abnormality detection method using flow rate control device
Grant 11,313,756 - Nagase , et al. April 26, 2 | 2022-04-26 |
Concentration Measurement Device
App 20220074851 - NAGASE; Masaaki ; et al. | 2022-03-10 |
Flow rate control method and flow rate control device
Grant 11,269,362 - Hirata , et al. March 8, 2 | 2022-03-08 |
Concentration Measurement Device
App 20220034794 - NAGASE; Masaaki ; et al. | 2022-02-03 |
Anomaly detection device for fluid controller, anomaly detection system, anamoly detection method, and fluid controller
Grant 11,226,257 - Harada , et al. January 18, 2 | 2022-01-18 |
Fluid control device
Grant 11,226,641 - Hirata , et al. January 18, 2 | 2022-01-18 |
Concentration Measurement Method
App 20220003662 - NAGASE; Masaaki ; et al. | 2022-01-06 |
Flow rate control method and flow rate control device
Grant 11,216,016 - Hirata , et al. January 4, 2 | 2022-01-04 |
Concentration Measurement Device
App 20210396657 - NAGASE; Masaaki ; et al. | 2021-12-23 |
Pressure Sensor
App 20210356346 - HIDAKA; Atsushi ; et al. | 2021-11-18 |
Flow Rate Control System And Flow Rate Measurement Method
App 20210310844 - NAGASE; Masaaki ; et al. | 2021-10-07 |
Piezoelectric Driven Valve, Pressure-type Flow Rate Control Device, And Vaporization Supply Device
App 20210239230 - DOHI; Ryousuke ; et al. | 2021-08-05 |
Flow Rate Control Method And Flow Rate Control Device
App 20210240208 - HIRATA; Kaoru ; et al. | 2021-08-05 |
Flow rate control device
Grant 11,079,774 - Sugita , et al. August 3, 2 | 2021-08-03 |
Piezoelectric-element-driven valve and flow rate control device
Grant 11,054,052 - Dohi , et al. July 6, 2 | 2021-07-06 |
Flow Rate Control Method And Flow Rate Control Device
App 20210157341 - HIRATA; Kaoru ; et al. | 2021-05-27 |
Concentration measurement device
Grant 10,976,240 - Deguchi , et al. April 13, 2 | 2021-04-13 |
Flow rate control device, method of calibrating flow rate of flow rate control device, flow rate measuring device, and method of measuring flow rate using flow rate measuring device
Grant 10,969,259 - Sawada , et al. April 6, 2 | 2021-04-06 |
Pressure-type flow rate control device and flow rate self-diagnosis method using critical expansion condition
Grant 10,928,813 - Nagase , et al. February 23, 2 | 2021-02-23 |
Concentration measuring device
Grant 10,928,303 - Deguchi , et al. February 23, 2 | 2021-02-23 |
Gas supply device capable of measuring flow rate, flowmeter, and flow rate measuring method
Grant 10,895,484 - Sawada , et al. January 19, 2 | 2021-01-19 |
Flow rate signal correction method and flow rate control device employing same
Grant 10,884,436 - Sugita , et al. January 5, 2 | 2021-01-05 |
Pressure-based flow rate control device and malfunction detection method therefor
Grant 10,883,866 - Sugita , et al. January 5, 2 | 2021-01-05 |
Pressure type flow rate control device, and flow rate calculating method and flow rate control method for same
Grant 10,884,435 - Nagase , et al. January 5, 2 | 2021-01-05 |
Method of determining flow rate of a gas in a substrate processing system
Grant 10,876,870 - Miyoshi , et al. December 29, 2 | 2020-12-29 |
Pressure-type flow rate control device
Grant 10,838,435 - Hirata , et al. November 17, 2 | 2020-11-17 |
Flow Rate Control Device
App 20200348704 - SUGITA; Katsuyuki ; et al. | 2020-11-05 |
Self-diagnosis Method For Flow Rate Control Device
App 20200348158 - SUGITA; Katsuyuki ; et al. | 2020-11-05 |
Flow Rate Control Device And Abnormality Detection Method Using Flow Rate Control Device
App 20200232873 - NAGASE; Masaaki ; et al. | 2020-07-23 |
Fluid Control Device
App 20200199753 - HIDAKA; Atsushi ; et al. | 2020-06-25 |
Fluid Control System and Flow Rate Measurement Method
App 20200159257 - YAMASHITA; Satoru ; et al. | 2020-05-21 |
Fluid Control Device
App 20200149162 - HIDAKA; Atsushi ; et al. | 2020-05-14 |
Valve with built-in orifice, and pressure-type flow rate control device
Grant 10,648,572 - Sawada , et al. | 2020-05-12 |
Vaporization supply apparatus
Grant 10,646,844 - Hidaka , et al. | 2020-05-12 |
Flow rate control device
Grant 10,641,407 - Hirai , et al. | 2020-05-05 |
Liquid level indicator and liquid raw material vaporization feeder
Grant 10,604,840 - Hidaka , et al. | 2020-03-31 |
Liquid Level Meter, Vaporizer Equipped With The Same, And Liquid Level Detection Method
App 20200088561 - HIDAKA; Atsushi ; et al. | 2020-03-19 |
Pressure-type Flow Control Device And Flow Control Method
App 20200033895 - SUGITA; Katsuyuki ; et al. | 2020-01-30 |
Piezoelectric-element-driven Valve And Flow Rate Control Device
App 20200018413 - DOHI; Ryousuke ; et al. | 2020-01-16 |
Flow Rate Measuring Method And Flow Rate Measuring Device
App 20200011720 - NAGASE; Masaaki ; et al. | 2020-01-09 |
Optical gas concentration measuring method by forming a differential signal using lights with different absorbabilities to a raw material in a gas flow path using a time-sharing method
Grant 10,408,742 - Nagase , et al. Sept | 2019-09-10 |
Concentration Measuring Device
App 20190271636 - DEGUCHI; Yoshihiro ; et al. | 2019-09-05 |
Pressure type flow control system with flow monitoring, and method for detecting anomaly in fluid supply system and handling method at abnormal monitoring flow rate using the same
Grant 10,386,861 - Hirata , et al. A | 2019-08-20 |
Pressure-type flow controller
Grant 10,386,863 - Hirata , et al. A | 2019-08-20 |
Pressure-type Flow Rate Control Device
App 20190250648 - HIRATA; Kaoru ; et al. | 2019-08-15 |
Fluid Control Device
App 20190243391 - HIRATA; Kaoru ; et al. | 2019-08-08 |
Pressure-type flow rate control device
Grant 10,372,145 - Hirose , et al. | 2019-08-06 |
Inline concentration meter and concentration detection method
Grant 10,371,630 - Deguchi , et al. | 2019-08-06 |
Pressure Type Flow Rate Control Device, And Flow Rate Calculating Method And Flow Rate Control Method For Same
App 20190227577 - NAGASE; Masaaki ; et al. | 2019-07-25 |
Method Of Determining Flow Rate Of Gas
App 20190212176 - MIYOSHI; Risako ; et al. | 2019-07-11 |
Concentration measurement device
Grant 10,324,029 - Deguchi , et al. | 2019-06-18 |
Valve With Built-in Orifice, And Pressure-type Flow Rate Control Device
App 20190178389 - SAWADA; Yohei ; et al. | 2019-06-13 |
Flow passage sealing structure
Grant 10,309,561 - Dohi , et al. | 2019-06-04 |
Flow Rate Control Device, Method Of Calibrating Flow Rate Of Flow Rate Control Device, Flow Rate Measuring Device, And Method Of Measuring Flow Rate Using Flow Rate Measuring Device
App 20190137309 - SAWADA; Yohei ; et al. | 2019-05-09 |
Liquid level detection circuit, liquid level meter, container provided with liquid level meter, and vaporizer using container
Grant 10,274,356 - Hirata , et al. | 2019-04-30 |
Pressure-type flow rate control device
Grant 10,261,522 - Nagase , et al. | 2019-04-16 |
Pressure-type Flow Rate Control Device And Flow Rate Self-diagnosis Method
App 20190094847 - NAGASE; Masaaki ; et al. | 2019-03-28 |
Flow Rate Control Device
App 20190085988 - HIRAI; Toru ; et al. | 2019-03-21 |
Inline concentration measurement device
Grant 10,222,323 - Deguchi , et al. | 2019-03-05 |
Gas Supply Device Capable Of Measuring Flow Rate, Flowmeter, And Flow Rate Measuring Method
App 20190017855 - SAWADA; Yohei ; et al. | 2019-01-17 |
Piezoelectric element-driven valve and flow rate control device including piezoelectric element-driven valve
Grant 10,174,858 - Hirata , et al. J | 2019-01-08 |
Piezoelectric linear actuator, piezoelectrically driven valve, and flow rate control device
Grant 10,156,295 - Yasumoto , et al. Dec | 2018-12-18 |
Flow Rate Signal Correction Method And Flow Rate Control Device Employing Same
App 20180314271 - SUGITA; Katsuyuki ; et al. | 2018-11-01 |
Pressure-based Flow Rate Control Device And Malfunction Detection Method Therefor
App 20180283914 - SUGITA; Katsuyuki ; et al. | 2018-10-04 |
Flow meter and flow control device provided therewith
Grant 10,073,469 - Nagase , et al. September 11, 2 | 2018-09-11 |
Concentration Measurement Device
App 20180217054 - DEGUCHI; Yoshihiro ; et al. | 2018-08-02 |
Concentration Measurement Device
App 20180217053 - DEGUCHI; Yoshihiro ; et al. | 2018-08-02 |
Diaphragm valve
Grant 10,030,789 - Shinohara , et al. July 24, 2 | 2018-07-24 |
Structure for attaching pressure detector
Grant 10,012,334 - Dohi , et al. July 3, 2 | 2018-07-03 |
Raw material vaporization and supply apparatus
Grant 9,994,955 - Hidaka , et al. June 12, 2 | 2018-06-12 |
Fastening structure for brittle-fracturable panel, and method for fastening light transmission window panel comprising brittle-fracturable panel employing same
Grant 9,983,051 - Nagase , et al. May 29, 2 | 2018-05-29 |
Flow rate range variable type flow rate control apparatus
Grant 9,921,089 - Ohmi , et al. March 20, 2 | 2018-03-20 |
Vaporization Supply Apparatus
App 20180071702 - HIDAKA; Atsushi ; et al. | 2018-03-15 |
Pressure type flow control system with flow monitoring
Grant 9,870,006 - Hirata , et al. January 16, 2 | 2018-01-16 |
Flow Control System With Build-down System Flow Monitoring
App 20170364099 - Nagase; Masaaki ; et al. | 2017-12-21 |
Pressure-type flow control device and method for preventing overshooting at start of flow control performed by said device
Grant 9,841,770 - Hirata , et al. December 12, 2 | 2017-12-12 |
Liquid Level Indicator And Liquid Raw Material Vaporization Feeder
App 20170327949 - Hidaka; Atsushi ; et al. | 2017-11-16 |
Optical Gas Concentration Measuring Method, And Method For Monitoring Gas Concentration By Said Method
App 20170315051 - Nagase; Masaaki ; et al. | 2017-11-02 |
Flow control device equipped with flow monitor
Grant 9,791,867 - Nagase , et al. October 17, 2 | 2017-10-17 |
Liquid Level Detection Circuit, Liquid Level Meter, Container Provided With Liquid Level Meter, And Vaporizer Using Container
App 20170268919 - HIRATA; Kaoru ; et al. | 2017-09-21 |
Piezoelectric Element-driven Valve And Flow Rate Control Device Including Piezoelectric Element-driven Valve
App 20170254430 - Hirata; Kaoru ; et al. | 2017-09-07 |
Multi-hole orifice plate for flow control, and flow controller using the same
Grant 9,746,856 - Hirata , et al. August 29, 2 | 2017-08-29 |
Pressure Type Flow Control System With Flow Monitoring, And Method For Detecting Anomaly In Fluid Supply System And Handling Method At Abnormal Monitoring Flow Rate Using The Same
App 20170234455 - Hirata; Kaoru ; et al. | 2017-08-17 |
Flow control system with build-down system flow monitoring
Grant 9,733,649 - Nagase , et al. August 15, 2 | 2017-08-15 |
Pressure-type Flow Rate Control Device
App 20170212531 - NAGASE; Masaaki ; et al. | 2017-07-27 |
Inline Concentration Measurement Device
App 20170199117 - DEGUCHI; Yoshihiro ; et al. | 2017-07-13 |
Leakage detection device and fluid controller including same
Grant 9,702,781 - Dohi , et al. July 11, 2 | 2017-07-11 |
Raw material fluid density detector
Grant 9,651,467 - Deguchi , et al. May 16, 2 | 2017-05-16 |
Calibration method and flow rate measurement method for flow rate controller for gas supply device
Grant 9,638,560 - Nagase , et al. May 2, 2 | 2017-05-02 |
Raw material vaporizing and supplying apparatus equipped with raw material concentration
Grant 9,631,777 - Nagase , et al. April 25, 2 | 2017-04-25 |
Pressure type flow control system with flow monitoring, and method for detecting anomaly in fluid supply system and handling method at abnormal monitoring flow rate using the same
Grant 9,632,511 - Hirata , et al. April 25, 2 | 2017-04-25 |
Pressure type flow rate control device
Grant 9,574,917 - Hidaka , et al. February 21, 2 | 2017-02-21 |
Flow Passage Sealing Structure
App 20170037987 - DOHI; Ryousuke ; et al. | 2017-02-09 |
Raw material gas supply apparatus for semiconductor manufacturing equipment
Grant 9,556,518 - Nagase , et al. January 31, 2 | 2017-01-31 |
Pressure Type Flow Control System With Flow Monitoring
App 20160370808 - Hirata; Kaoru ; et al. | 2016-12-22 |
Piezoelectric Linear Actuator, Piezoelectrically Driven Valve, And Flow Rate Control Device
App 20160363231 - Yasumoto; Naofumi ; et al. | 2016-12-15 |
Pressure-type Flow Rate Control Device
App 20160349763 - Hirose; Takashi ; et al. | 2016-12-01 |
Variable orifice type pressure-controlled flow controller
Grant 9,507,352 - Dohi , et al. November 29, 2 | 2016-11-29 |
Pressure type flow control system with flow monitoring
Grant 9,494,947 - Hirata , et al. November 15, 2 | 2016-11-15 |
Pressure-type Flow Control Device And Method For Preventing Overshooting At Start Of Flow Control Performed By Said Device
App 20160327963 - HIRATA; Kaoru ; et al. | 2016-11-10 |
Apparatus for dividing and supplying gas and method for dividing and supplying gas
Grant 9,477,232 - Takahashi , et al. October 25, 2 | 2016-10-25 |
Flow Control Device Equipped With Flow Monitor
App 20160282880 - NAGASE; Masaaki ; et al. | 2016-09-29 |
Flow Rate Range Variable Type Flow Rate Control Apparatus
App 20160274595 - Ohmi; Tadahiro ; et al. | 2016-09-22 |
Pressure-type Flow Controller
App 20160252913 - HIRATA; Kaoru ; et al. | 2016-09-01 |
Flow Meter And Flow Control Device Provided Therewith
App 20160239026 - NAGASE; Masaaki ; et al. | 2016-08-18 |
Flow rate range variable type flow rate control apparatus
Grant 9,383,758 - Ohmi , et al. July 5, 2 | 2016-07-05 |
Inline Concentration Meter And Concentration Detection Method
App 20160169800 - Deguchi; Yoshihiro ; et al. | 2016-06-16 |
Diaphragm Valve
App 20160123497 - Shinohara; Tsutomu ; et al. | 2016-05-05 |
Flow Rate Range Variable Type Flow Rate Control Apparatus
App 20160109886 - Ohmi; Tadahiro ; et al. | 2016-04-21 |
Fastening Structure For Brittle-fracturable Panel, And Method For Fastening Light Transmission Window Panel Comprising Brittle-fracturable Panel Employing Same
App 20160084700 - NAGASE; Masaaki ; et al. | 2016-03-24 |
Multi-hole Orifice Plate For Flow Control, And Flow Controller Using The Same
App 20160070271 - HIRATA; Kaoru ; et al. | 2016-03-10 |
Raw Material Fluid Density Detector
App 20160061704 - DEGUCHI; Yoshihiro ; et al. | 2016-03-03 |
Structure For Attaching Pressure Detector
App 20160053925 - DOHI; Ryousuke ; et al. | 2016-02-25 |
Apparatus for dividing and supplying gas and method for dividing and supplying gas by use of this apparatus
Grant 9,261,884 - Sawada , et al. February 16, 2 | 2016-02-16 |
Mixed gas supply device
Grant 9,233,347 - Nagase , et al. January 12, 2 | 2016-01-12 |
Gasket-integrated Ceramic Orifice Plate
App 20150362105 - NAGASE; Masaaki ; et al. | 2015-12-17 |
Opening degree detection device for manual valve
Grant 9,200,725 - Dohi , et al. December 1, 2 | 2015-12-01 |
Raw Material Vaporization And Supply Apparatus
App 20150322567 - Hidaka; Atsushi ; et al. | 2015-11-12 |
Fluid control apparatus
Grant 9,169,558 - Hirose , et al. October 27, 2 | 2015-10-27 |
Piezoelectrically driven valve and piezoelectrically driven flow rate control device
Grant 9,163,743 - Hidaka , et al. October 20, 2 | 2015-10-20 |
Flow rate measurement device and flow rate measurement method for flow rate controller for gas supply device
Grant 9,163,969 - Sawada , et al. October 20, 2 | 2015-10-20 |
Gasket type orifice and pressure type flow rate control apparatus for which the orifice is employed
Grant 9,133,951 - Ohmi , et al. September 15, 2 | 2015-09-15 |
Device and method for supplying gas while dividing to chamber from gas supplying facility equipped with flow controller
Grant 9,098,082 - Sugiyama , et al. August 4, 2 | 2015-08-04 |
Gas Divided Flow Supplying Apparatus For Semiconductor Manufacturing Equipment
App 20150192932 - Nishino; Kouji ; et al. | 2015-07-09 |
Flow Rate Range Variable Type Flow Rate Control Apparatus
App 20150160662 - Ohmi; Tadahiro ; et al. | 2015-06-11 |
Leakage Detection Device And Fluid Controller Including Same
App 20150143876 - Dohi; Ryousuke ; et al. | 2015-05-28 |
Opening degree detection device for automatically operated valve
Grant 9,038,663 - Dohi , et al. May 26, 2 | 2015-05-26 |
Flow Control System With Build-down System Flow Monitoring
App 20150136248 - Nagase; Masaaki ; et al. | 2015-05-21 |
Variable Orifice Type Pressure-controlled Flow Controller
App 20150114499 - Dohi; Ryousuke ; et al. | 2015-04-30 |
Flow rate range variable type flow rate control apparatus
Grant 9,010,369 - Ohmi , et al. April 21, 2 | 2015-04-21 |
Apparatus For Dividing And Supplying Gas And Method For Dividing And Supplying Gas
App 20150059859 - Takahashi; Eiji ; et al. | 2015-03-05 |
Gas supply apparatus equipped with vaporizer
Grant 8,931,506 - Nagata , et al. January 13, 2 | 2015-01-13 |
Gas Branched Flow Supplying Apparatus For Semiconductor Manufacturing Equipment
App 20140373935 - Nishino; Kouji ; et al. | 2014-12-25 |
Raw Material Vaporizing And Supplying Apparatus Equipped With Raw Material Concentration
App 20140299206 - Nagase; Masaaki ; et al. | 2014-10-09 |
Cam control valve
Grant 8,833,730 - Sawada , et al. September 16, 2 | 2014-09-16 |
Pressure Type Flow Control System With Flow Monitoring, And Method For Detecting Anomaly In Fluid Supply System And Handling Method At Abnormal Monitoring Flow Rate Using The Same
App 20140230911 - Hirata; Kaoru ; et al. | 2014-08-21 |
Raw Material Vaporizing And Supplying Apparatus
App 20140216339 - Nagase; Masaaki ; et al. | 2014-08-07 |
Raw Material Gas Supply Apparatus For Semiconductor Manufacturing Equipment
App 20140190581 - Nagase; Masaaki ; et al. | 2014-07-10 |
Pressure Type Flow Control System With Flow Monitoring
App 20140182692 - Hirata; Kaoru ; et al. | 2014-07-03 |
Automatic pressure regulator for flow rate regulator
Grant 8,757,197 - Hirata , et al. June 24, 2 | 2014-06-24 |
Electrochemical Element
App 20140162094 - Nishino; Atsushi ; et al. | 2014-06-12 |
Vaporizer
Grant 8,724,974 - Ohmi , et al. May 13, 2 | 2014-05-13 |
Raw Material Vaporizing And Supplying Apparatus
App 20140124064 - Hidaka; Atsushi ; et al. | 2014-05-08 |
Method for water hammerless opening of fluid passage, and method for supplying chemical solutions and device for water hammerless opening for which the method is used
Grant 8,714,188 - Ohmi , et al. May 6, 2 | 2014-05-06 |
Solenoid valve
Grant 8,662,471 - Ohmi , et al. March 4, 2 | 2014-03-04 |
Flow Rate Measurement Device And Flow Rate Measurement Method For Flow Rate Controller For Gas Supply Device
App 20140013838 - Sawada; Yohei ; et al. | 2014-01-16 |
Device And Method For Supplying Gas While Dividing To Chamber From Gas Supplying Facility Equipped With Flow Controller
App 20130340837 - Sugiyama; Kazuhiko ; et al. | 2013-12-26 |
Opening Degree Detection Device For Manual Valve
App 20130333777 - Dohi; Ryousuke ; et al. | 2013-12-19 |
Gas supply system for semiconductor manufacturing facilities
Grant 8,601,976 - Nishino , et al. December 10, 2 | 2013-12-10 |
Method for detecting malfunction of valve on the downstream side of throttle mechanism of pressure type flow control apparatus
Grant 8,606,412 - Nagase , et al. December 10, 2 | 2013-12-10 |
Opening Degree Detection Device For Automatically Operated Valve
App 20130319551 - Dohi; Ryousuke ; et al. | 2013-12-05 |
Pressure control valve driving circuit for pressure type flow rate control device with flow rate self-diagnosis function
Grant 8,587,180 - Sugita , et al. November 19, 2 | 2013-11-19 |
Cam valve
Grant 8,561,966 - Dohi , et al. October 22, 2 | 2013-10-22 |
Flow rate ratio variable type fluid supply apparatus
Grant 8,555,920 - Hirata , et al. October 15, 2 | 2013-10-15 |
Flow Rate Range Variable Type Flow Rate Control Apparatus
App 20130220451 - Ohmi; Tadahiro ; et al. | 2013-08-29 |
Apparatus For Dividing And Supplying Gas And Method For Dividing And Supplying Gas By Use Of This Apparatus
App 20130220433 - Sawada; Yohei ; et al. | 2013-08-29 |
Device and method for supplying gas while dividing to chamber from gas supplying facility equipped with flow controller
Grant 8,496,022 - Sugiyama , et al. July 30, 2 | 2013-07-30 |
Calibration Method And Flow Rate Measurement Method For Flow Rate Controller For Gas Supply Device
App 20130186471 - Nagase; Masaaki ; et al. | 2013-07-25 |
Method for parallel operation of reactors that generate moisture
Grant 8,469,046 - Minami , et al. June 25, 2 | 2013-06-25 |
Flow rate range variable type flow rate control apparatus
Grant 8,418,714 - Ohmi , et al. April 16, 2 | 2013-04-16 |
Vaporizer
App 20130084059 - Ohmi; Tadahiro ; et al. | 2013-04-04 |
Pressure type flow rate control reference and corrosion resistant pressure type flow rate controller used for the same
Grant 8,381,755 - Moriya , et al. February 26, 2 | 2013-02-26 |
Mixed Gas Supply Apparatus
App 20130025718 - Nagase; Masaaki ; et al. | 2013-01-31 |
Method For Water Hammerless Opening Of Fluid Passage, And Method For Supplying Chemical Solutions And Device For Water Hammerless Opening For Which The Method Is Used
App 20130000737 - OHMI; Tadahiro ; et al. | 2013-01-03 |
Pressure Type Flow Rate Control Device
App 20120298220 - HIDAKA; Atsushi ; et al. | 2012-11-29 |
Piezoelectrically Driven Valve and Piezoelectrically Driven Flow Rate Control Device
App 20120273061 - Hidaka; Atsushi ; et al. | 2012-11-01 |
Control Valve Device
App 20120241023 - Ikeda; Nobukazu ; et al. | 2012-09-27 |
Pressure Type Flow Rate Control Reference And Corrosion Resistant Pressure Type Flow Rate Controller Used For The Same
App 20120234406 - Moriya; Shuji ; et al. | 2012-09-20 |
Cam Control Valve
App 20120223265 - Sawada; Yohei ; et al. | 2012-09-06 |
Fluid coupling
Grant 8,246,087 - Yamaji , et al. August 21, 2 | 2012-08-21 |
Pressure type flow rate control reference and corrosion resistant pressure type flow rate controller used for the same
Grant 8,210,022 - Moriya , et al. July 3, 2 | 2012-07-03 |
Piezoelectric element driven metal diaphragm control valve
Grant 8,191,856 - Matsumoto , et al. June 5, 2 | 2012-06-05 |
Normally open type piezoelectric element driven metal diaphragm control valve
Grant 8,181,932 - Matsumoto , et al. May 22, 2 | 2012-05-22 |
Piezoelectric driven control valve
Grant 8,162,286 - Sawada , et al. April 24, 2 | 2012-04-24 |
Reactor for Moisture Generation
App 20120082596 - OHMI; Tadahiro ; et al. | 2012-04-05 |
Regulating Valve Device
App 20120074339 - Ikeda; Nobukazu ; et al. | 2012-03-29 |
Metal material having formed thereon chromium oxide passive film and method for producing the same, and parts contacting with fluid and system for supplying fluid and exhausting gas
Grant 8,137,787 - Ohmi , et al. March 20, 2 | 2012-03-20 |
Fluid Control Apparatus
App 20120031500 - Hirose; Jun ; et al. | 2012-02-09 |
Method for water hammerless opening of fluid passage, and method for supplying chemical solutions and device for water hammerless opening for which the method is used
Grant 8,047,225 - Ohmi , et al. November 1, 2 | 2011-11-01 |
Evaporation supply apparatus for raw material and automatic pressure regulating device used therewith
Grant 8,047,510 - Hirata , et al. November 1, 2 | 2011-11-01 |
Method for closing fluid passage, and water hammerless valve device and water hammerless closing device used in the method
Grant 8,020,574 - Ohmi , et al. September 20, 2 | 2011-09-20 |
Valve for vacuum exhaustion system
Grant 7,988,130 - Ohmi , et al. August 2, 2 | 2011-08-02 |
Automatic Pressure Regulator For Flow Rate Regulator
App 20110139271 - Hirata; Kaoru ; et al. | 2011-06-16 |
Discontinuous Switching Fluid Flow Rate Control Method Using Pressure Type Flow Rate Control Device
App 20110120566 - OHMI; Tadahiro ; et al. | 2011-05-26 |
Solenoid Valve
App 20110121217 - Ohmi; Tadahiro ; et al. | 2011-05-26 |
Method for detecting abnormality in fluid supply line using fluid control apparatus with pressure sensor
Grant 7,945,414 - Nagase , et al. May 17, 2 | 2011-05-17 |
Pressure Control Valve Driving Circuit For Pressure Type Flow Rate Control Device With Flow Rate Self-diagnosis Function
App 20110108138 - Sugita; Katsuyuki ; et al. | 2011-05-12 |
Gas Supply Apparatus Equipped With Vaporizer
App 20110100483 - Nagata; Atsushi ; et al. | 2011-05-05 |
Metal material having formed thereon chromium oxide passive film and method for producing the same, and parts contacting with fluid and system for supplying fluid and exhausting gas
Grant 7,935,385 - Ohmi , et al. May 3, 2 | 2011-05-03 |
Apparatus and method of dividing and supplying gas to a chamber from a gas supply apparatus equipped with flow-rate control system
App 20110094596 - Sugiyama; Kazuhiko ; et al. | 2011-04-28 |
Method for flow rate control of clustering fluid and device for flow rate control of clustering fluid employed in the method
Grant 7,926,509 - Ohmi , et al. April 19, 2 | 2011-04-19 |
Piezoelectric Element Driven Metal Diaphragm Control Valve
App 20110042595 - MATSUMOTO; Atsushi ; et al. | 2011-02-24 |
Method for water hammerless opening of fluid passage, and method for supplying chemical solutions and device for water hammerless opening for which the method is used
Grant 7,849,869 - Ohmi , et al. December 14, 2 | 2010-12-14 |
Joint for use in fluid control apparatus
Grant 7,841,628 - Tokuda , et al. November 30, 2 | 2010-11-30 |
Normally Open Type Piezoelectric Element Driven Metal Diaphragm Control Valve
App 20100294964 - Matsumoto; Atsushi ; et al. | 2010-11-25 |
Reactor for generating moisture and moisture generating and feeding apparatus for which the reactor is employed
Grant 7,815,872 - Nariai , et al. October 19, 2 | 2010-10-19 |
Internal pressure controller of chamber and internal pressure subject-to-control type chamber
Grant 7,798,167 - Ohmi , et al. September 21, 2 | 2010-09-21 |
Flow Rate Ratio Variable Type Fluid Supply Apparatus
App 20100229976 - Hirata; Kaoru ; et al. | 2010-09-16 |
Cam Valve
App 20100207044 - Dohi; Ryousuke ; et al. | 2010-08-19 |
Gas Supply System For Semiconductor Manufactruing Facilities
App 20100192854 - Nishino; Kouji ; et al. | 2010-08-05 |
Flow Rate Range Variable Type Flow Rate Control Apparatus
App 20100139775 - Ohmi; Tadahiro ; et al. | 2010-06-10 |
Method For Parallel Operation Of Reactors That Generate Moisture
App 20100143239 - Minami; Yukio ; et al. | 2010-06-10 |
Piezoelectric Driven Control Valve
App 20100127196 - Sawada; Yohei ; et al. | 2010-05-27 |
Vacuum thermal insulating valve
Grant 7,673,649 - Ohmi , et al. March 9, 2 | 2010-03-09 |
Automatic zero point correction device for a pressure sensor, a pressure control device and a pressure type flow rate control device
Grant 7,669,455 - Ohmi , et al. March 2, 2 | 2010-03-02 |
Corrosion-resistant metal made sensor for fluid and a fluid supply device for which the sensor is employed
Grant 7,654,137 - Hirata , et al. February 2, 2 | 2010-02-02 |
Evaporation Supply Apparatus For Raw Material And Automatic Pressure Regulating Device Used Therewith
App 20100012026 - Hirata; Kaoru ; et al. | 2010-01-21 |
Method For Detecting Abnormality In Fluid Supply Line Using Fluid Control Apparatus With Pressure Sensor
App 20090326719 - Nagase; Masaaki ; et al. | 2009-12-31 |
Method For Detecting Malfunction Of Valve On The Downstream Side Of Throttle Mechanism Of Pressure Type Flow Control Apparatus
App 20090292399 - Nagase; Masaaki ; et al. | 2009-11-26 |
Method For Water Hammerless Opening Of Fluid Passage, And Method For Supplying Chemical Solutions And Device For Water Hammerless Opening For Which The Method Is Used
App 20090255587 - OHMI; Tadahiro ; et al. | 2009-10-15 |
Process of forming platinum coating catalyst layer in moisture-generating reactor
Grant 7,595,087 - Ohmi , et al. September 29, 2 | 2009-09-29 |
Gas supply facility of a chamber and a method for an internal pressure control of the chamber for which the facility is employed
Grant 7,594,517 - Kannan , et al. September 29, 2 | 2009-09-29 |
Gas heating method, and gas-heating piping member
App 20090202957 - Ikeda; Nobukazu ; et al. | 2009-08-13 |
Gasket Type Orifice And Pressure Type Flow Rate Control Apparatus For Which The Orifice Is Employed
App 20090171507 - Ohmi; Tadahiro ; et al. | 2009-07-02 |
Method And Apparatus For Testing Leakage Of Pipe Passage
App 20090165534 - Kohno; Gisuke ; et al. | 2009-07-02 |
Apparatus and reactor for generating and feeding high purity moisture
Grant 7,553,459 - Ohmi , et al. June 30, 2 | 2009-06-30 |
Pressure Type Flow Rate Control Reference And Corrosion Resistant Pressure Type Flow Rate Controller Used For The Same
App 20090146089 - Moriya; Shuji ; et al. | 2009-06-11 |
Pipe joint
Grant 7,497,482 - Sugiyama , et al. March 3, 2 | 2009-03-03 |
Vacuum Thermal Insulating Valve
App 20090032115 - Ohmi; Tadahiro ; et al. | 2009-02-05 |
Valve for Vacuum Exhaustion System
App 20090020721 - Ohmi; Tadahiro ; et al. | 2009-01-22 |
System for recording valve actuation information
App 20090009297 - Shinohara; Tsutomu ; et al. | 2009-01-08 |
Valve for vacuum exhaustion system
Grant 7,472,887 - Ohmi , et al. January 6, 2 | 2009-01-06 |
Method for Water Hammerless Opening of Fluid Passage,and Method for Supplying Chemical Solutions and Device for Water Hammerless Opening for Which the Method is Used
App 20080257415 - Ohmi; Tadahiro ; et al. | 2008-10-23 |
Reactor for Generating Moisture and Moisture Generating and Feeding Apparatus for Which the Reactor is Employed
App 20080241022 - Nariai; Toshirou ; et al. | 2008-10-02 |
Diaphragm valve for the vacuum exhaustion system
Grant 7,416,165 - Ohmi , et al. August 26, 2 | 2008-08-26 |
Apparatus and reactor for generating and feeding high purity moisture
Grant 7,368,092 - Ohmi , et al. May 6, 2 | 2008-05-06 |
Differential pressure type flowmeter and differential pressure type flow controller
Grant 7,367,241 - Ohmi , et al. May 6, 2 | 2008-05-06 |
Corrosion resistant metal made thermal type mass flow rate sensor and a fluid supply device using the same
Grant 7,363,810 - Ikeda , et al. April 29, 2 | 2008-04-29 |
Method For Closing Fluid Passage, And Water Hammerless Valve Device And Water Hammerless Closing Device Used In The Method
App 20080035877 - OHMI; Tadahiro ; et al. | 2008-02-14 |
Metal material having formed thereon chromium oxide passive film and method for producing the same, and parts contacting with fluid and system
App 20080003441 - Ohmi; Tadahiro ; et al. | 2008-01-03 |
Method for closing fluid passage, and water hammerless valve device and water hammerless closing device used in the method
Grant 7,278,437 - Ohmi , et al. October 9, 2 | 2007-10-09 |
Apparatus And Reactor For Generating And Feeding High Purity Moisture
App 20070231225 - Ohmi; Tadahiro ; et al. | 2007-10-04 |
Gas Supply Facility Of A Chamber And A Fethod For An Internal Pressure Control Of The Chamber For Which The Facility Is Employed
App 20070193628 - Kannan; Hiroshi ; et al. | 2007-08-23 |
Apparatus and reactor for generating and feeding high purity moisture
Grant 7,258,845 - Ohmi , et al. August 21, 2 | 2007-08-21 |
Corrosion-resistant metal made sensor for fluid and a fluid supply device for which the sensor is employed
App 20070168150 - Hirata; Kaoru ; et al. | 2007-07-19 |
Automatic zero point correction device for a pressure sensor, a pressure control device and a pressure type flow rate control device
App 20070151321 - Ohmi; Tadahiro ; et al. | 2007-07-05 |
Joint for use in fluid control apparatus
App 20070132231 - Tokuda; Ichiro ; et al. | 2007-06-14 |
Small hole diameter automatic measuring apparatus, small hole diameter measurement method, and shower plate manufacturing method
Grant 7,219,533 - Ohmi , et al. May 22, 2 | 2007-05-22 |
Method For Closing Fluid Passage, And Water Hammerless Valve Device And Water Hammerless Closing Device Used In The Method
App 20070068577 - OHMI; Tadahiro ; et al. | 2007-03-29 |
Apparatus and reactor for generating and feeding high purity moisture
App 20060292047 - Ohmi; Tadahiro ; et al. | 2006-12-28 |
Valve with an integral orifice
Grant 7,150,444 - Ohmi , et al. December 19, 2 | 2006-12-19 |
Differential pressure type flowmeter and differential pressure type flowmeter controller
App 20060236781 - Ohmi; Tadahiro ; et al. | 2006-10-26 |
Internal Pressure Controller Of Chamber And Internal Pressure Subject -to- Control Type Chamber
App 20060207595 - OHMI; Tadahiro ; et al. | 2006-09-21 |
Rotary silicon wafer cleaning apparatus
Grant 7,103,990 - Ohmi , et al. September 12, 2 | 2006-09-12 |
Metal material having formed thereon chromium oxide passive film and method for producing the same, and parts contacting with fluid and system for supplying fluid and exhausting gas
App 20060174977 - Ohmi; Tadahiro ; et al. | 2006-08-10 |
Diaphragm valve for the vacuum evacuation system
App 20060175573 - Ohmi; Tadahiro ; et al. | 2006-08-10 |
Apparatus for the correction of temperature drift for pressure sensor, pressure control apparatus and pressure-type flow rate control apparatus
Grant 7,085,628 - Ohmi , et al. August 1, 2 | 2006-08-01 |
Method for closing fluid passage, and water hammerless valve device and water hammerless closing device used in the method
Grant 7,080,658 - Ohmi , et al. July 25, 2 | 2006-07-25 |
Method of supplying divided gas to a chamber from a gas supply apparatus equipped with a flow-rate control system
Grant 7,059,363 - Sugiyama , et al. June 13, 2 | 2006-06-13 |
Method for flow rate control of clustering fluid and device for flow rate control of clustering fluid employed in the method
App 20060076060 - Ohmi; Tadahiro ; et al. | 2006-04-13 |
Valve for vacuum exhaustion system
App 20060071192 - Ohmi; Tadahiro ; et al. | 2006-04-06 |
Thermal type mass flow rate sensor made of corrosion resistant metal, and fluid supply equipment using the same
App 20060053878 - Ikeda; Nobukazu ; et al. | 2006-03-16 |
Reactor for generating moisture
Grant 7,008,598 - Ohmi , et al. March 7, 2 | 2006-03-07 |
Small hole diameter automatic measuring apparatus, small hole diameter measurement method, and shower plate manufacturing method
App 20050257603 - Ohmi, Tadahiro ; et al. | 2005-11-24 |
Pressure-type flow rate control apparatus
Grant 6,964,279 - Ohmi , et al. November 15, 2 | 2005-11-15 |
Method for closing fluid passage, and water hammerless valve device and water hammerless closing device used in the method
App 20050241697 - Ohmi, Tadahiro ; et al. | 2005-11-03 |
Pipe joint
App 20050179259 - Sugiyama, Kazuhiko ; et al. | 2005-08-18 |
Method for forming platinum coating catalyst layer in reaction furnace ofr generating water gas
App 20050157834 - Ohmi, Tadahiro ; et al. | 2005-07-21 |
Reactor for generating moisture
Grant 6,919,056 - Ohmi , et al. July 19, 2 | 2005-07-19 |
Rotary silicon wafer cleaning apparatus
App 20050126030 - Ohmi, Tadahiro ; et al. | 2005-06-16 |
Valve with an integral orifice
App 20050109967 - Ohmi, Tadahiro ; et al. | 2005-05-26 |
Valve with an integral orifice
Grant 6,871,803 - Ohmi , et al. March 29, 2 | 2005-03-29 |
Parallel divided flow-type fluid supply apparatus, and fluid-switchable pressure-type flow control method and fluid-switchable pressure-type flow control system for the same fluid supply apparatus
Grant 6,848,470 - Ohmi , et al. February 1, 2 | 2005-02-01 |
Method for supplying gas while dividing to chamber from gas supply facility equipped with flow controller
App 20050005994 - Sugiyama, Kazuhiko ; et al. | 2005-01-13 |
Reactor for generating moisture
App 20040247502 - Ohmi, Tadahiro ; et al. | 2004-12-09 |
Parallel divided flow-type fluid supply apparatus, and fluid-switchable pressure-type flow control method and fluid-switchable pressure-type flow control system for the same fluid supply apparatus
Grant 6,820,632 - Ohmi , et al. November 23, 2 | 2004-11-23 |
Advance pressure type flow control device
App 20040204794 - Ohmi, Tadahiro ; et al. | 2004-10-14 |
Parallel divided flow-type fluid supply apparatus, and fluid-switchable pressure-type flow control method and fluid-switchable pressure-type flow control system for the same fluid supply apparatus
App 20040154664 - Ohmi, Tadahiro ; et al. | 2004-08-12 |
Pressure sensor, pressure controller and temperature drift corrector of pressure type flow controller
App 20040144178 - Ohmi, Tadahiro ; et al. | 2004-07-29 |
Apparatus and reactor for generating and feeding high purity moisture
App 20040137744 - Ohmi, Tadahiro ; et al. | 2004-07-15 |
Reactor for generating moisture
Grant 6,733,732 - Ohmi , et al. May 11, 2 | 2004-05-11 |
Grinding machine for welding electrodes
Grant 6,672,942 - Ikeda , et al. January 6, 2 | 2004-01-06 |
Gas detection sensor
Grant 6,622,543 - Ohmi , et al. September 23, 2 | 2003-09-23 |
Fluid control apparatus
Grant 6,615,871 - Ohmi , et al. September 9, 2 | 2003-09-09 |
Structure or construction for mounting a pressure detector
Grant 6,606,912 - Ohmi , et al. August 19, 2 | 2003-08-19 |
Fluid control apparatus
App 20030041910 - Morokoshi, Hiroshi ; et al. | 2003-03-06 |
Parallel divided flow-type fluid supply apparatus, and fluid-switchable pressure-type flow control method and fluid-switchable pressure-type flow control system for the same fluid supply apparatus
App 20020179149 - Ohmi, Tadahiro ; et al. | 2002-12-05 |
Unreacted gas detector and unreacted gas sensor
App 20020134135 - Komehana, Katsunori ; et al. | 2002-09-26 |
Reactor for generating moisture
App 20020136676 - Komehana, Katsunori ; et al. | 2002-09-26 |
Method of detecting abnormalities in flow rate in pressure-type flow controller
Grant 6,450,190 - Ohmi , et al. September 17, 2 | 2002-09-17 |
Fluid control device
App 20020124894 - Ohmi, Tadahiro ; et al. | 2002-09-12 |
Apparatus and reactor for generating and feeding high purity moisture
App 20020122758 - Ohmi, Tadahiro ; et al. | 2002-09-05 |
Parallel divided flow-type fluid supply apparatus, and fluid-switchable pressure-type flow control method and fluid-switchable pressure-type flow control system for the same fluid supply apparatus
Grant 6,422,264 - Ohmi , et al. July 23, 2 | 2002-07-23 |
Fluid control device
Grant 6,408,879 - Ohmi , et al. June 25, 2 | 2002-06-25 |
Method of detecting abnormalities in flow rate in pressure-type flow controller
App 20020005785 - Ohmi, Tadahiro ; et al. | 2002-01-17 |
Method of removing moisture in gas supply system
App 20020000161 - Ikeda, Nobukazu ; et al. | 2002-01-03 |
Reactor for generating moisture
App 20010048907 - Ohmi, Tadahiro ; et al. | 2001-12-06 |
Method for generating moisture, reactor for generating moisture, method for controlling temperature of reactor for generating moisture, and method for forming platinum-coated catalyst layer
App 20010042344 - Ohmi, Tadahiro ; et al. | 2001-11-22 |
Structure or construction for mounting a pressure detector
App 20010035052 - Ohmi, Tadahiro ; et al. | 2001-11-01 |
Method and apparatus for detection of orifice clogging in pressure-type flow rate controllers
Grant 6,302,130 - Ohmi , et al. October 16, 2 | 2001-10-16 |
Gas supply system equipped with pressure-type flow rate control unit
Grant 6,289,923 - Ohmi , et al. September 18, 2 | 2001-09-18 |
Apparatus and method for feeding gases for use in semiconductor manufacturing
App 20010013363 - Kitayama, Hirofumi ; et al. | 2001-08-16 |
Fluid control apparatus
Grant 6,273,139 - Ohmi , et al. August 14, 2 | 2001-08-14 |
Gasket and pipe joint
Grant 6,273,477 - Ohmi , et al. August 14, 2 | 2001-08-14 |
Apparatus for the treatment of exhaust gases by combining hydrogen and oxygen
Grant 6,274,098 - Tanabe , et al. August 14, 2 | 2001-08-14 |
Parallel divided flow-type fluid supply apparatus, and fluid-switchable pressure-type flow control method and fluid-switchable pressure-type flow control system for the same fluid supply apparatus
App 20010004903 - Ohmi, Tadahiro ; et al. | 2001-06-28 |
Fluid Control Apparatus
App 20010003287 - OHMI, TADAHIRO ; et al. | 2001-06-14 |
Apparatus for feeding gases for use in semiconductor manufacturing
Grant 6,210,482 - Kitayama , et al. April 3, 2 | 2001-04-03 |
Fluid control valve and fluid supply/exhaust system
Grant 6,193,212 - Ohmi , et al. February 27, 2 | 2001-02-27 |
Fluid supply apparatus
Grant 6,178,995 - Ohmi , et al. January 30, 2 | 2001-01-30 |
Pipe joint
Grant 6,170,890 - Ohmi , et al. January 9, 2 | 2001-01-09 |
Pressure-type flow rate control apparatus
Grant 6,152,168 - Ohmi , et al. November 28, 2 | 2000-11-28 |
Fluid control device
Grant 6,135,155 - Ohmi , et al. October 24, 2 | 2000-10-24 |
Device for heating fluid controller
Grant 6,060,691 - Minami , et al. May 9, 2 | 2000-05-09 |
Couplings for fluid controllers
Grant 6,039,360 - Ohmi , et al. March 21, 2 | 2000-03-21 |
System for supervising piping work
Grant 6,018,136 - Ohmi , et al. January 25, 2 | 2000-01-25 |
Shutoff-opening device
Grant 5,988,217 - Ohmi , et al. November 23, 1 | 1999-11-23 |
Shutoff-opening device
Grant 5,983,933 - Ohmi , et al. November 16, 1 | 1999-11-16 |
System for supervising piping work
Grant 5,981,905 - Ohmi , et al. November 9, 1 | 1999-11-09 |
Fluid control device
Grant 5,975,112 - Ohmi , et al. November 2, 1 | 1999-11-02 |
Fluid coupling
Grant 5,904,381 - Ohmi , et al. May 18, 1 | 1999-05-18 |
Pressure type flow rate control apparatus
Grant 5,816,285 - Ohmi , et al. October 6, 1 | 1998-10-06 |
Pressure type flow rate control apparatus
Grant 5,791,369 - Nishino , et al. August 11, 1 | 1998-08-11 |
Fluid control apparatus
Grant 5,769,110 - Ohmi , et al. June 23, 1 | 1998-06-23 |
Fluid controller
Grant 5,678,803 - Shinohara , et al. October 21, 1 | 1997-10-21 |
Pressure type flow rate control apparatus
Grant 5,669,408 - Nishino , et al. September 23, 1 | 1997-09-23 |
Tightening device
Grant 5,609,077 - Ohmi , et al. March 11, 1 | 1997-03-11 |
Method and apparatus for feeding gas into a chamber
Grant 5,488,967 - Minami , et al. February 6, 1 | 1996-02-06 |
Pipe joint with a gasket retainer
Grant 5,366,261 - Ohmi , et al. November 22, 1 | 1994-11-22 |
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