loadpatents
Patent applications and USPTO patent grants for Iizuka; Yoji.The latest application filed is for "substrate processing apparatus".
Patent | Date |
---|---|
Film-forming apparatus and film-forming method Grant 11,136,668 - Yamaguchi , et al. October 5, 2 | 2021-10-05 |
Substrate processing apparatus Grant 11,081,321 - Nozawa , et al. August 3, 2 | 2021-08-03 |
Film-forming apparatus and film-forming method Grant 11,035,041 - Iizuka June 15, 2 | 2021-06-15 |
Substrate Processing Apparatus App 20200083029 - NOZAWA; Syuji ;   et al. | 2020-03-12 |
Film-forming Apparatus And Film-forming Method App 20190323124 - YAMAGUCHI; Tatsuya ;   et al. | 2019-10-24 |
Film-Forming Apparatus and Film-Forming Method App 20190316257 - IIZUKA; Yoji | 2019-10-17 |
Shower Head And Film Forming Apparatus App 20170252756 - IIZUKA; Yoji | 2017-09-07 |
Method For Manufacturing Optical Device And Optical Device App 20150214423 - KIKUTA; Shinya ;   et al. | 2015-07-30 |
Method For Manufacturing Rod-type Light Emitting Device And Rod-type Light Emitting Device App 20150214429 - IIZUKA; Yoji ;   et al. | 2015-07-30 |
Transfer Device And Target Object Processing Apparatus Including Same App 20110142579 - SAKAUE; Hiromitsu ;   et al. | 2011-06-16 |
Process Module, Substrate Processing Apparatus, And Substrate Transferring Method App 20110076117 - IIZUKA; Yoji | 2011-03-31 |
Substrate Exchanging Mechanism And Method Of Exchanging Substrates App 20100247274 - IIZUKA; YOJI | 2010-09-30 |
Relay apparatus for relaying object to be treated Grant 6,013,112 - Iizuka , et al. January 11, 2 | 2000-01-11 |
Decompression container Grant 5,676,757 - Ikeda , et al. October 14, 1 | 1997-10-14 |
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