Patent | Date |
---|
Multi Charged Particle Beam Writing Method And Multi Charged Particle Beam Writing Apparatus App 20180261421 - MATSUMOTO; Hiroshi ;   et al. | 2018-09-13 |
Multi charged particle beam writing method and multi charged particle beam writing apparatus Grant 10,020,159 - Matsumoto , et al. July 10, 2 | 2018-07-10 |
Multi Charged Particle Beam Writing Method And Multi Charged Particle Beam Writing Apparatus App 20170098524 - MATSUMOTO; Hiroshi ;   et al. | 2017-04-06 |
Multi charged particle beam writing method and multi charged particle beam writing apparatus Grant 9,570,267 - Matsumoto , et al. February 14, 2 | 2017-02-14 |
Multi Charged Particle Beam Writing Method And Multi Charged Particle Beam Writing Apparatus App 20160042908 - MATSUMOTO; Hiroshi ;   et al. | 2016-02-11 |
Multi charged particle beam writing method and multi charged particle beam writing apparatus Grant 9,202,673 - Matsumoto , et al. December 1, 2 | 2015-12-01 |
Multi Charged Particle Beam Writing Method And Multi Charged Particle Beam Writing Apparatus App 20140124684 - MATSUMOTO; Hiroshi ;   et al. | 2014-05-08 |
Data verification method and charged particle beam writing apparatus Grant 8,423,921 - Handa , et al. April 16, 2 | 2013-04-16 |
Beam dose computing method and writing method and record carrier body and writing apparatus Grant 8,352,889 - Emi , et al. January 8, 2 | 2013-01-08 |
Method and apparatus for writing Grant 8,309,283 - Kato , et al. November 13, 2 | 2012-11-13 |
Beam Dose Computing Method And Writing Method And Record Carrier Body And Writing Apparatus App 20120108063 - EMI; Keiko ;   et al. | 2012-05-03 |
Pattern inspection apparatus and pattern inspection method Grant 7,872,745 - Abe , et al. January 18, 2 | 2011-01-18 |
Method And Apparatus For Writing App 20100173235 - KATO; Yasuo ;   et al. | 2010-07-08 |
Beam dose computing method and writing method and record carrier body and writing apparatus for determining an optimal dose of a charged particle beam Grant 7,740,991 - Emi , et al. June 22, 2 | 2010-06-22 |
Pattern area value calculating method, proximity effect correcting method, and charged particle beam writing method and apparatus Grant 7,657,863 - Iijima , et al. February 2, 2 | 2010-02-02 |
Data Verification Method And Charged Particle Beam Writing Apparatus App 20090285494 - HANDA; Yujin ;   et al. | 2009-11-19 |
Charged particle beam writing method and apparatus and readable storage medium Grant 7,619,230 - Suzuki , et al. November 17, 2 | 2009-11-17 |
Charged particle beam writing method and apparatus Grant 7,511,290 - Suzuki , et al. March 31, 2 | 2009-03-31 |
Pattern Inspection Apparatus And Pattern Inspection Method App 20090040513 - ABE; Takayuki ;   et al. | 2009-02-12 |
Charged beam drawing apparatus and charged beam drawing method Grant 7,476,881 - Hattori , et al. January 13, 2 | 2009-01-13 |
Charged Particle Beam Writing Apparatus And Method Thereof, And Method For Resizing Dimension Variation Due To Loading Effect App 20080182185 - Abe; Takayuki ;   et al. | 2008-07-31 |
Charged Particle Beam Writing Method And Apparatus App 20070194250 - Suzuki; Junichi ;   et al. | 2007-08-23 |
Pattern Area Value Calculating Method, Proximity Effect Correcting Method, And Charged Particle Beam Writing Method And Apparatus App 20070170374 - Iijima; Tomohiro ;   et al. | 2007-07-26 |
Charged Beam Drawing Apparatus And Charged Beam Drawing Method App 20070114461 - HATTORI; Kiyoshi ;   et al. | 2007-05-24 |
Charged Particle Beam Writing Method And Apparatus And Readable Storage Medium App 20070114459 - SUZUKI; Junichi ;   et al. | 2007-05-24 |
Beam Dose Computing Method And Writing Method And Record Carrier Body And Writing Apparatus App 20070114453 - Emi; Keiko ;   et al. | 2007-05-24 |